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Effects of substrate properties and sputtering methods on self-formation of Ag particles on the Ag–Mo(Zr) alloy films

  • Haoliang Sun EMAIL logo , Xinxin Lian , Xiaoxue Huang , David Hui and Guangxin Wang
Published/Copyright: October 14, 2020
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Nanotechnology Reviews
From the journal Nanotechnology Reviews Volume 9 Issue 1

Abstract

This article studies two different sputtering methods for depositing Ag–Mo and Ag–Zr alloy films on single crystal silicon (Si), flexible polyimide (PI) and soda-lime glass substrates. The phase structure and the surface morphology of the Ag–Mo(Zr) alloy films were characterized by XRD, SEM and EDS. The effects of substrate properties and sputtering methods on the self-grown Ag particles on the Ag–Mo(Zr) alloy films were investigated. As the result of the experiment, nanoscale Ag particles were formed on the surface of Ag–Mo(Zr) alloy films. However, the size and the number of self-formed Ag particles on the Ag–Mo(Zr) alloy film on the PI substrate are significantly different from that on the Si substrate and glass substrate. This outcome is closely related to the different thermal stress evolution behaviors of the alloy films on different substrates during annealing.

Keywords: Ag–Mo(Zr) alloy film; substrate; thermal stress

1 Introduction

With the increasingly severe service conditions of microdevices, the requirements for the performance of the thin-film materials have gradually increased, leading to extensive applications such as nonenzyme glucose sensors [1], high-strength and high-conductivity films [2], antibacterial films [3], semiconductor interconnect [4], wear-resistant films [5], packaging film materials [6] and so on. There are many methods to prepare thin films, such as electrical deposition [7], arc evaporation [8], wet-laid and spunlace process [9], arc discharge [10] and son on [11], but these methods are not suitable for preparing low solid solubility alloy films. Magnetron sputtering has become an important method for preparing thin films due to its fast speed and good uniformity [12]. The alloy films with low solid solubility prepared by magnetron sputtering, such as Cu–Mn [13], Ag–Ta [14], Cu–Zr [15] and Cu–Ag–Cr [16], are usually in a metastable state, and their atomic diffusion and stress evolution behavior are easily affected by external fields [17]. In particular, as the thickness of the film decreases to the nanometer scale, the atomic diffusion and migration behaviors of the alloy films under the thermal, electric and stress fields become increasingly prominent [18]. Some researchers have shown that the thermal stability of pure Cu and Ag films can be improved by adding a small amount of Zr [19], Cr [20] and Mo [21] elements with the high melting point. However, when more supersaturated alloy elements are added to the alloy film, the larger distortion energy and stress in the film may aggravate the diffusion of atoms [22]. Mo is almost immiscible with Ag at the room temperature, and we had investigated the effect of the microstructure of supersaturated Ag–Mo alloy films on flexible polyimide (PI) substrates by magnetron sputtering in the previous study [23] and found that numerous Ag particles were spontaneously grown on the surface of the as-deposited alloy films [24]. The analysis shows that the main factors affecting the formation of Ag particles on the alloy films are alloy element content [25], film thickness [26] and annealing temperature [27]. In addition to these factors, the properties of the substrate and the sputtering method also have an important influence on the microstructure of the alloy film [28] and the formation of Ag particles [29]. Due to the different crystal structure, surface morphology and thermal expansion coefficient of different substrates, the alloy films on different substrates have different evolution behaviors of microstructure and residual stress during annealing [30]. In addition, alloy films prepared by co-sputtering deposition and composite target sputtering may have differences in composition uniformity, microstructure and residual stress [31]. Therefore, the authors applied two different sputtering methods to prepare Ag–Mo and Ag–Zr alloy films on PI, Si and glass substrates. The phase structure and surface morphology of the as-deposited and annealed alloy films were characterized by XRD, SEM and EDS. The effects of substrate properties and sputtering methods on the self-growth of Ag particles on the surface of Ag–Mo(Zr) alloy films were investigated.

2 Materials and methods

Composite target sputtering and co-sputtering were applied to deposit Ag–Mo(Zr) alloy films on flexible PI, single-crystal Si(100) and soda-lime glass substrates by JCP-350 magnetron sputtering machine. Composite target is composed of three pieces of Mo(Zr) (10 mm × 10 mm × 1 mm, purity 99.99%) on the surface of a pure Ag target (∅ 50 mm × 4 mm, purity 99.99%), as shown in Figure 1(a). Figure 1(b) is a schematic diagram of dual-target co-sputtering. Co-sputtering is the simultaneous sputtering of a pure Ag target (∅50 mm × 4 mm, purity 99.99%) and a pure Mo(Zr) target (∅50 mm × 4 mm, purity 99.99%).

Figure 1 The schematic diagram of sputtering targets: (a) composite target sputtering and (b) co-sputtering.
Figure 1

The schematic diagram of sputtering targets: (a) composite target sputtering and (b) co-sputtering.

The flexible PI with the thickness of 125 µm produced by DuPont company, the single-crystal Si(100) and the ordinary soda-lime glass with the size of 10 mm × 10 mm × 1 mm were used as substrates. The acetone, anhydrous ethanol and deionized water were used to clean the substrates in the ultrasonic cleaning machine for 10 min before deposition and then fixed them on the substrate holders. The sputtering power (80–120 W) was adjusted to ensure that the films prepared by the two sputtering methods have the similar composition. The vacuum of the chamber, working pressure and the flow of argon are 5 × 10−4 Pa, 0.4 Pa and 45 sccm, respectively. The distance between the substrate and the target is 7 cm, and the rotation speed of the substrate table is 30 rpm. Some samples are placed in a tube furnace to anneal under the argon protection, and the annealing temperature was 160–360°C.

The microstructure, morphology and composition of Ag–Mo(Zr) alloy films were characterized by X-ray diffraction (XRD; Bruker-AXS D8 Advance, Shimadzu Limited, Kyoto, Japan) (Cu K-alpha) and field emission scanning electron microscope (FE-SEM, JSM 7800F, JEOL Ltd, Tokyo, Japan) with energy dispersive spectroscopy (EDS).

3 Results and discussion

3.1 XRD patterns of the Ag–Mo films by different sputtering methods

Figure 2(a) shows the XRD patterns of the Ag–Mo alloy films deposited on different substrates by composite target sputtering. It can be seen that the diffraction peak intensity of the Ag–Mo alloy film on the PI substrate is significantly weaker than that on the glass and Si substrates. Obviously, the Mo(110) diffraction peak of the Ag–Mo alloy film on the glass is stronger than that on PI and Si substrates, which indicates that the glass substrate is conducive to the growth of Mo(110) grains. The XRD patterns of the Ag–Mo alloy films deposited on different substrates by co-sputtering are shown in Figure 2(b). Evidently, the Mo(110) diffraction peak of Ag–Mo alloy film on the PI substrate is consistent with those on the glass and Si substrates, which indicates that compared to the alloy films deposited by composite target sputtering, the films prepared on different substrates by co-sputtering have similar microstructure.

Figure 2 The XRD patterns of Ag–Mo alloy films deposited on different substrates by different sputtering methods: (a) composite target sputtering and (b) co-sputtering.
Figure 2

The XRD patterns of Ag–Mo alloy films deposited on different substrates by different sputtering methods: (a) composite target sputtering and (b) co-sputtering.

3.2 Morphology characterization of the Ag–Mo films on different substrates

Previous studies have found that the Ag content and the film thickness have significant influence on the microstructure of Ag–Mo and Ag–Zr alloy films [32]. In the recent study, it is surprisingly found that the substrate and the sputtering method also have important effects on the formation of Ag particles on the Ag–Mo and Ag–Zr alloy films. Figure 3 shows the SEM images of Ag–Mo alloy films deposited on different substrates by composite target sputtering for 5 min and then annealed at 360°C. It can be seen that many nanoscale polyhedron particles are formed on the Ag–Mo alloy films. In the previous study on the microstructure of Mo–Ag [23,24] and Ag–Zr [19] alloy films, EDS and TEM characterization confirmed that these polyhedral particles are single crystal Ag particles. Ag particles can be fabricated by some different methods, and most of the Ag particles are easy to move and gather, but difficult to fix on the films. The electron beam lithography [33], oxidation–reduction [34] and other methods can fix the Ag particles on the surface of some substrates, but they are complicated and expensive. The authors can self-assemble monodisperse Ag nanoparticles on the surface of the alloy film through a simple method. Moreover, the size and the quantity of these Ag particles are controllable, and they are very firmly bonded to the alloy film. It can be seen from Figure 3(a) that numerous Ag polyhedral particles were grown on the Ag–Mo alloy film/PI substrate. Figure 3(b) is an EDS pattern of the Ag–Mo alloy film/PI substrate, indicating that the contents of Ag and Mo are 50.9% and 49.1%, respectively. Compared with the Ag–Mo alloy film/PI substrate, Figure 3(c and d) shows that the number of polyhedral particles formed on the Ag–Mo alloy film/Si substrate and the Ag–Mo alloy film/glass substrate are much less than that on the Ag–Mo alloy film/PI substrates, which implied that the microstructure and residual stress evolution behavior of the Ag–Mo alloy film/PI substrate are more conducive to the growth of Ag particles.

Figure 3 Surface morphology of Ag–Mo alloy films annealed at 360°C on different substrates by composite target sputtering: (a) PI substrate, (b) EDS pattern of (a), (c) Si substrate, (d) glass substrate. surface morphology of the Ag–Mo alloy films annealed at 360°C on different substrates by co-sputtering: (e) PI substrate, (f) EDS pattern of (e), (g) Si substrate, (h) glass substrate; (i) square resistance of Ag–Mo films prepared by composite target sputtering, and (j) square resistance of Ag–Mo films prepared by co-sputtering.
Figure 3

Surface morphology of Ag–Mo alloy films annealed at 360°C on different substrates by composite target sputtering: (a) PI substrate, (b) EDS pattern of (a), (c) Si substrate, (d) glass substrate. surface morphology of the Ag–Mo alloy films annealed at 360°C on different substrates by co-sputtering: (e) PI substrate, (f) EDS pattern of (e), (g) Si substrate, (h) glass substrate; (i) square resistance of Ag–Mo films prepared by composite target sputtering, and (j) square resistance of Ag–Mo films prepared by co-sputtering.

Figure 3(e), (g) and (h) show the surface morphologies of Ag–Mo alloy films, respectively, deposited on PI, Si and glass substrates by co-sputtering for 5 min and then annealed at 360°C. The morphology of the Ag particles on the three substrates is significantly different from that of the Ag particles prepared by composite target sputtering. Numerous particles are uniformly distributed on the surface of the Ag–Mo film/PI substrate as shown in Figure 3(e), which can be used as surface-enhanced Raman scattering substrates. Moreover, large area particles/films suitable for industrial applications can be easily prepared by using this method, as long as the coating machine and target materials are suitable. The EDS pattern of Figure 3(f) shows that the content of Ag and Mo in the Ag–Mo alloy film is 51.7% and 48.3%, respectively. However, the particle morphologies on the Ag–Mo film/Si substrate and the Ag–Mo film/glass substrate have changed significantly, as shown in Figure 3(g and h). There are many polyhedral particles, and some vermicular particles are grown on the Mo–Ag films/Si substrate, as shown in Figure 3(g). Moreover, it is worth noting that the self-formation Ag particles on the Mo–Ag films/glass substrate are all vermicular particles as shown in Figure 3(h). The formation mechanism of these vermicular particles is similar to that of Sn whiskers grown on the surface of the Cu–Sn alloy [31]. Its essence is that atoms diffuse along the grain boundary and surface to form Ag particles driven by the release of residual stress and strain energy. At the same time, there are also some defects on the surface of some Ag particles, which leads to the stress gradient inside the particles. Furthermore, some atoms are extruded to form vermicular particles at the defects or edges of the Ag particles driven by the stress gradient. To compare the electrical properties of the Ag–Mo films prepared by different sputtering methods, the authors tested the square resistance of the films through four-point probe resistance. In the case of the Ag–Mo alloy film with the same composition and film thickness, the square resistance of the alloy film mainly depends on the grain size, defects and the uniformity of the alloy film composition in the film. Obviously, comparing Figure 3(i) with Figure 3(j), it is found that the square resistance of the film prepared by co-sputtering is significantly lower than that of the composite target sputtering.

3.3 Surface morphology of the Ag–Zr films on different substrates

The surface morphology of Ag–Zr alloy films on the glass, Si and PI substrates prepared by composite target sputtering after annealing at 260°C is shown in Figure 4(a)–(c). Obviously, some monodisperse polyhedral Ag particles have grown on the surface of the alloy films on the three substrates, and the measurement results show the average size of the Ag particles on the glass, Si and PI substrates were 725, 576, and 156, respectively. The number of self-grown Ag particles on the Ag–Zr film/PI substrates is far more than those on the glass and Si substrates. Moreover, the gap between Ag particles on the Ag–Zr film/PI is much smaller than those on the glass and Si substrates. Figure 4(d)–(f) are the surface morphologies of the annealed Ag–Zr alloy films on different substrates prepared by co-sputtering. Figure 4(f) shows a large number of monodisperse Ag particles uniformly distributed on the Ag–Zr film/PI substrate. The EDS pattern shows that the Ag and Zr content in the alloy film is 85.68% and 14.32%, respectively. Compared with the Ag–Zr film/PI substrate, the number of Ag particles on the Ag–Zr film/glass substrate is significantly reduced, and the size of Ag particles on the Ag–Zr film/Si substrate is significantly decreased. The main reason for this phenomenon is that different types of substrates have different crystal structures, roughness, thermal expansion coefficients and stress release behaviors [35]. These factors directly affect the microstructure, thermal stress and residual stress of the alloy film and further affect the atoms diffusion of the alloy film during annealing.

Figure 4 Surface morphology of Ag–Zr alloy films on different substrates by composite target sputtering after annealing at 260°C: (a) glass substrate, (b) Si substrate and (c) PI substrate. Surface morphology of Ag–Zr alloy films on different substrates by co-sputtering: (d) glass substrate, (e) Si substrate and (f) PI substrate.
Figure 4

Surface morphology of Ag–Zr alloy films on different substrates by composite target sputtering after annealing at 260°C: (a) glass substrate, (b) Si substrate and (c) PI substrate. Surface morphology of Ag–Zr alloy films on different substrates by co-sputtering: (d) glass substrate, (e) Si substrate and (f) PI substrate.

3.4 Effect of thermal stress on the formation of Ag particles on the Ag–Mo(Zr) film on different substrates

Due to the difference of the thermal expansion coefficients of the three types of substrates and alloy films, large thermal stress will be generated in the alloy films during annealing. We had calculated the thermal stress of Ag–Mo and Ag–Zr thin films generated during annealing by the following formula [36]:

(1) Δ σ = E f ( 1 − ν f ) ∫ T 1 T 2 [ α f ( T ) − α s ( T ) ] d T

α s and α f are the thermal expansion coefficients of the substrate and film, respectively. T 1 is the room temperature, T 2 is the annealing temperature. E f is the elastic modulus of the film, ν f is the Poisson’s ratio of the film. Elastic modulus and Poisson’s ratio of Ag–Mo alloy film are as follows [37]: E f(Ag) = 76 GPa, E f(Mo) = 320 GPa, E f(Ag–Mo) = 198 GPa, ν f(Ag) = 0.37, ν f(Ag–Mo) = 0.33, α Ag = 19 × 10−6/K, α Ag–Mo = 12.5 × 10−6/K, α glass = 7.6 × 10−6/K, α Si = 5.2 × 10−6/K and α PI = 29.5 × 10−6/K. Calculation based on equation (1) shows that the thermal stress of the Ag–Mo film on three substrates can be estimated as follows: Δσ glass ≈ 1.507 × 106ΔT, Δσ Si ≈ 2.157 × 106ΔT and Δσ PI ≈ −5.024 × 106ΔT. Due to the low Zr content in the Ag–Zr film, the relevant parameters of the Ag–Zr film adopt the parameters of the Ag film. The thermal stress of the Ag–Zr film on three substrates can be estimated as follows: Δσ glass ≈ 1.375 × 106ΔT, Δσ Si ≈ 1.665 × 106ΔT, and Δσ PI ≈ −1.267 × 106ΔT, as shown in Figure 5.

Figure 5 Thermal stress of Ag–Mo and Ag–Zr alloy films on different substrates annealed at 260°C and 360°C.
Figure 5

Thermal stress of Ag–Mo and Ag–Zr alloy films on different substrates annealed at 260°C and 360°C.

The thermal expansion coefficient of Si and glass substrates is significantly smaller than that of the Ag–Mo(Zr) alloy film, while the thermal expansion coefficient of PI substrate is significantly larger than that of the Ag–Mo(Zr) alloy film. As a result, the evolution behavior of thermal stress of alloy film on rigid substrates is obviously different from that on flexible substrate [38]. Exactly, the thermal stress of Ag–Mo(Zr) alloy film on the flexible substrate is compressive thermal stress, while that on the rigid substrate is the tensile thermal stress. The release of compressive thermal stress in the film will promote the formation of hillocks or particles on the surface of the alloy film [39], which is the main driven force for the formation of Ag particles on the Ag–Mo(Zr) alloy film on the flexible substrate. However, the tensile stress of the Ag–Mo(Zr) alloy films on the rigid substrate is not conducive to the formation of Ag particles [40]. Based on the aforementioned analysis, it can be concluded that the size and the number of Ag particles formed on the Ag–Mo(Zr) alloy films on different substrates mainly depend on the substrate properties and sputtering methods.

4 Conclusions

Ag–Mo and Ag–Zr alloy films were fabricated on PI, Si and glass substrates by composite target sputtering and co-sputtering. The results show that a great amount of Ag particles self-grown on the Ag–Mo(Zr) alloy films’ surface and the quantity of Ag particles on the PI substrate is significantly more than that on the glass and Si substrates. The reason is that in comparison with the tensile thermal stress in the Ag–Mo(Zr) alloy films bonded on the rigid substrates, the release of compressive thermal stress on the flexible substrate can promote the formation of Ag particles on the alloy films. In addition, the Ag-Mo(Zr) alloy film prepared by co-sputtering has uniform element distribution and fewer defects, which is more conducive to atomic diffusion to form Ag particles.

These authors have contributed equally to this work.

Acknowledgments

This work was financially supported by the National Natural Science Foundation of China (Grant No. U12041869) and National Undergraduate Entrepreneurship Training Program (Grant number 202010464013).

  1. Conflict of interest: The authors declare no conflict of interest regarding the publication of this paper.

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Received: 2020-09-20
Accepted: 2020-09-25
Published Online: 2020-10-14

© 2020 Haoliang Sun et al., published by De Gruyter

This work is licensed under the Creative Commons Attribution 4.0 International License.

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  19. Crack closure and flexural tensile capacity with SMA fibers randomly embedded on tensile side of mortar beams
  20. An experimental study on one-step and two-step foaming of natural rubber/silica nanocomposites
  21. Utilization of red mud for producing a high strength binder by composition optimization and nano strengthening
  22. One-pot synthesis of nano titanium dioxide in supercritical water
  23. Printability of photo-sensitive nanocomposites using two-photon polymerization
  24. In situ synthesis of expanded graphite embedded with amorphous carbon-coated aluminum particles as anode materials for lithium-ion batteries
  25. Effect of nano and micro conductive materials on conductive properties of carbon fiber reinforced concrete
  26. Tribological performance of nano-diamond composites-dispersed lubricants on commercial cylinder liner mating with CrN piston ring
  27. Supramolecular ionic polymer/carbon nanotube composite hydrogels with enhanced electromechanical performance
  28. Genetic mechanisms of deep-water massive sandstones in continental lake basins and their significance in micro–nano reservoir storage systems: A case study of the Yanchang formation in the Ordos Basin
  29. Effects of nanoparticles on engineering performance of cementitious composites reinforced with PVA fibers
  30. Band gap manipulation of viscoelastic functionally graded phononic crystal
  31. Pyrolysis kinetics and mechanical properties of poly(lactic acid)/bamboo particle biocomposites: Effect of particle size distribution
  32. Manipulating conductive network formation via 3D T-ZnO: A facile approach for a CNT-reinforced nanocomposite
  33. Microstructure and mechanical properties of WC–Ni multiphase ceramic materials with NiCl2·6H2O as a binder
  34. Effect of ball milling process on the photocatalytic performance of CdS/TiO2 composite
  35. Berberine/Ag nanoparticle embedded biomimetic calcium phosphate scaffolds for enhancing antibacterial function
  36. Effect of annealing heat treatment on microstructure and mechanical properties of nonequiatomic CoCrFeNiMo medium-entropy alloys prepared by hot isostatic pressing
  37. Corrosion behaviour of multilayer CrN coatings deposited by hybrid HIPIMS after oxidation treatment
  38. Surface hydrophobicity and oleophilicity of hierarchical metal structures fabricated using ink-based selective laser melting of micro/nanoparticles
  39. Research on bond–slip performance between pultruded glass fiber-reinforced polymer tube and nano-CaCO3 concrete
  40. Antibacterial polymer nanofiber-coated and high elastin protein-expressing BMSCs incorporated polypropylene mesh for accelerating healing of female pelvic floor dysfunction
  41. Effects of Ag contents on the microstructure and SERS performance of self-grown Ag nanoparticles/Mo–Ag alloy films
  42. A highly sensitive biosensor based on methacrylated graphene oxide-grafted polyaniline for ascorbic acid determination
  43. Arrangement structure of carbon nanofiber with excellent spectral radiation characteristics
  44. Effect of different particle sizes of nano-SiO2 on the properties and microstructure of cement paste
  45. Superior Fe x N electrocatalyst derived from 1,1′-diacetylferrocene for oxygen reduction reaction in alkaline and acidic media
  46. Facile growth of aluminum oxide thin film by chemical liquid deposition and its application in devices
  47. Liquid crystallinity and thermal properties of polyhedral oligomeric silsesquioxane/side-chain azobenzene hybrid copolymer
  48. Laboratory experiment on the nano-TiO2 photocatalytic degradation effect of road surface oil pollution
  49. Binary carbon-based additives in LiFePO4 cathode with favorable lithium storage
  50. Conversion of sub-µm calcium carbonate (calcite) particles to hollow hydroxyapatite agglomerates in K2HPO4 solutions
  51. Exact solutions of bending deflection for single-walled BNNTs based on the classical Euler–Bernoulli beam theory
  52. Effects of substrate properties and sputtering methods on self-formation of Ag particles on the Ag–Mo(Zr) alloy films
  53. Enhancing carbonation and chloride resistance of autoclaved concrete by incorporating nano-CaCO3
  54. Effect of SiO2 aerogels loading on photocatalytic degradation of nitrobenzene using composites with tetrapod-like ZnO
  55. Radiation-modified wool for adsorption of redox metals and potentially for nanoparticles
  56. Hydration activity, crystal structural, and electronic properties studies of Ba-doped dicalcium silicate
  57. Microstructure and mechanical properties of brazing joint of silver-based composite filler metal
  58. Polymer nanocomposite sunlight spectrum down-converters made by open-air PLD
  59. Cryogenic milling and formation of nanostructured machined surface of AISI 4340
  60. Braided composite stent for peripheral vascular applications
  61. Effect of cinnamon essential oil on morphological, flammability and thermal properties of nanocellulose fibre–reinforced starch biopolymer composites
  62. Study on influencing factors of photocatalytic performance of CdS/TiO2 nanocomposite concrete
  63. Improving flexural and dielectric properties of carbon fiber epoxy composite laminates reinforced with carbon nanotubes interlayer using electrospray deposition
  64. Scalable fabrication of carbon materials based silicon rubber for highly stretchable e-textile sensor
  65. Degradation modeling of poly-l-lactide acid (PLLA) bioresorbable vascular scaffold within a coronary artery
  66. Combining Zn0.76Co0.24S with S-doped graphene as high-performance anode materials for lithium- and sodium-ion batteries
  67. Synthesis of functionalized carbon nanotubes for fluorescent biosensors
  68. Effect of nano-silica slurry on engineering, X-ray, and γ-ray attenuation characteristics of steel slag high-strength heavyweight concrete
  69. Incorporation of redox-active polyimide binder into LiFePO4 cathode for high-rate electrochemical energy storage
  70. Microstructural evolution and properties of Cu–20 wt% Ag alloy wire by multi-pass continuous drawing
  71. Transparent ultraviolet-shielding composite films made from dispersing pristine zinc oxide nanoparticles in low-density polyethylene
  72. Microfluidic-assisted synthesis and modelling of monodispersed magnetic nanocomposites for biomedical applications
  73. Preparation and piezoresistivity of carbon nanotube-coated sand reinforced cement mortar
  74. Vibrational analysis of an irregular single-walled carbon nanotube incorporating initial stress effects
  75. Study of the material engineering properties of high-density poly(ethylene)/perlite nanocomposite materials
  76. Single pulse laser removal of indium tin oxide film on glass and polyethylene terephthalate by nanosecond and femtosecond laser
  77. Mechanical reinforcement with enhanced electrical and heat conduction of epoxy resin by polyaniline and graphene nanoplatelets
  78. High-efficiency method for recycling lithium from spent LiFePO4 cathode
  79. Degradable tough chitosan dressing for skin wound recovery
  80. Static and dynamic analyses of auxetic hybrid FRC/CNTRC laminated plates
  81. Review articles
  82. Carbon nanomaterials enhanced cement-based composites: advances and challenges
  83. Review on the research progress of cement-based and geopolymer materials modified by graphene and graphene oxide
  84. Review on modeling and application of chemical mechanical polishing
  85. Research on the interface properties and strengthening–toughening mechanism of nanocarbon-toughened ceramic matrix composites
  86. Advances in modelling and analysis of nano structures: a review
  87. Mechanical properties of nanomaterials: A review
  88. New generation of oxide-based nanoparticles for the applications in early cancer detection and diagnostics
  89. A review on the properties, reinforcing effects, and commercialization of nanomaterials for cement-based materials
  90. Recent development and applications of nanomaterials for cancer immunotherapy
  91. Advances in biomaterials for adipose tissue reconstruction in plastic surgery
  92. Advances of graphene- and graphene oxide-modified cementitious materials
  93. Theories for triboelectric nanogenerators: A comprehensive review
  94. Nanotechnology of diamondoids for the fabrication of nanostructured systems
  95. Material advancement in technological development for the 5G wireless communications
  96. Nanoengineering in biomedicine: Current development and future perspectives
  97. Recent advances in ocean wave energy harvesting by triboelectric nanogenerator: An overview
  98. Application of nanoscale zero-valent iron in hexavalent chromium-contaminated soil: A review
  99. Carbon nanotube–reinforced polymer composite for electromagnetic interference application: A review
  100. Functionalized layered double hydroxide applied to heavy metal ions absorption: A review
  101. A new classification method of nanotechnology for design integration in biomaterials
  102. Finite element analysis of natural fibers composites: A review
  103. Phase change materials for building construction: An overview of nano-/micro-encapsulation
  104. Recent advance in surface modification for regulating cell adhesion and behaviors
  105. Hyaluronic acid as a bioactive component for bone tissue regeneration: Fabrication, modification, properties, and biological functions
  106. Theoretical calculation of a TiO2-based photocatalyst in the field of water splitting: A review
  107. Two-photon polymerization nanolithography technology for fabrication of stimulus-responsive micro/nano-structures for biomedical applications
  108. A review of passive methods in microchannel heat sink application through advanced geometric structure and nanofluids: Current advancements and challenges
  109. Stress effect on 3D culturing of MC3T3-E1 cells on microporous bovine bone slices
  110. Progress in magnetic Fe3O4 nanomaterials in magnetic resonance imaging
  111. Synthesis of graphene: Potential carbon precursors and approaches
  112. A comprehensive review of the influences of nanoparticles as a fuel additive in an internal combustion engine (ICE)
  113. Advances in layered double hydroxide-based ternary nanocomposites for photocatalysis of contaminants in water
  114. Analysis of functionally graded carbon nanotube-reinforced composite structures: A review
  115. Application of nanomaterials in ultra-high performance concrete: A review
  116. Therapeutic strategies and potential implications of silver nanoparticles in the management of skin cancer
  117. Advanced nickel nanoparticles technology: From synthesis to applications
  118. Cobalt magnetic nanoparticles as theranostics: Conceivable or forgettable?
  119. Progress in construction of bio-inspired physico-antimicrobial surfaces
  120. From materials to devices using fused deposition modeling: A state-of-art review
  121. A review for modified Li composite anode: Principle, preparation and challenge
  122. Naturally or artificially constructed nanocellulose architectures for epoxy composites: A review
https://doi.org/10.1515/ntrev-2020-0077
Keywords for this article
Ag–Mo(Zr) alloy film; substrate; thermal stress
Creative Commons
BY 4.0

Articles in the same Issue

  1. Research Articles
  2. Generalized locally-exact homogenization theory for evaluation of electric conductivity and resistance of multiphase materials
  3. Enhancing ultra-early strength of sulphoaluminate cement-based materials by incorporating graphene oxide
  4. Characterization of mechanical properties of epoxy/nanohybrid composites by nanoindentation
  5. Graphene and CNT impact on heat transfer response of nanocomposite cylinders
  6. A facile and simple approach to synthesis and characterization of methacrylated graphene oxide nanostructured polyaniline nanocomposites
  7. Ultrasmall Fe3O4 nanoparticles induce S-phase arrest and inhibit cancer cells proliferation
  8. Effect of aging on properties and nanoscale precipitates of Cu-Ag-Cr alloy
  9. Effect of nano-strengthening on the properties and microstructure of recycled concrete
  10. Stabilizing effect of methylcellulose on the dispersion of multi-walled carbon nanotubes in cementitious composites
  11. Preparation and electromagnetic properties characterization of reduced graphene oxide/strontium hexaferrite nanocomposites
  12. Interfacial characteristics of a carbon nanotube-polyimide nanocomposite by molecular dynamics simulation
  13. Preparation and properties of 3D interconnected CNTs/Cu composites
  14. On factors affecting surface free energy of carbon black for reinforcing rubber
  15. Nano-silica modified phenolic resin film: manufacturing and properties
  16. Experimental study on photocatalytic degradation efficiency of mixed crystal nano-TiO2 concrete
  17. Halloysite nanotubes in polymer science: purification, characterization, modification and applications
  18. Cellulose hydrogel skeleton by extrusion 3D printing of solution
  19. Crack closure and flexural tensile capacity with SMA fibers randomly embedded on tensile side of mortar beams
  20. An experimental study on one-step and two-step foaming of natural rubber/silica nanocomposites
  21. Utilization of red mud for producing a high strength binder by composition optimization and nano strengthening
  22. One-pot synthesis of nano titanium dioxide in supercritical water
  23. Printability of photo-sensitive nanocomposites using two-photon polymerization
  24. In situ synthesis of expanded graphite embedded with amorphous carbon-coated aluminum particles as anode materials for lithium-ion batteries
  25. Effect of nano and micro conductive materials on conductive properties of carbon fiber reinforced concrete
  26. Tribological performance of nano-diamond composites-dispersed lubricants on commercial cylinder liner mating with CrN piston ring
  27. Supramolecular ionic polymer/carbon nanotube composite hydrogels with enhanced electromechanical performance
  28. Genetic mechanisms of deep-water massive sandstones in continental lake basins and their significance in micro–nano reservoir storage systems: A case study of the Yanchang formation in the Ordos Basin
  29. Effects of nanoparticles on engineering performance of cementitious composites reinforced with PVA fibers
  30. Band gap manipulation of viscoelastic functionally graded phononic crystal
  31. Pyrolysis kinetics and mechanical properties of poly(lactic acid)/bamboo particle biocomposites: Effect of particle size distribution
  32. Manipulating conductive network formation via 3D T-ZnO: A facile approach for a CNT-reinforced nanocomposite
  33. Microstructure and mechanical properties of WC–Ni multiphase ceramic materials with NiCl2·6H2O as a binder
  34. Effect of ball milling process on the photocatalytic performance of CdS/TiO2 composite
  35. Berberine/Ag nanoparticle embedded biomimetic calcium phosphate scaffolds for enhancing antibacterial function
  36. Effect of annealing heat treatment on microstructure and mechanical properties of nonequiatomic CoCrFeNiMo medium-entropy alloys prepared by hot isostatic pressing
  37. Corrosion behaviour of multilayer CrN coatings deposited by hybrid HIPIMS after oxidation treatment
  38. Surface hydrophobicity and oleophilicity of hierarchical metal structures fabricated using ink-based selective laser melting of micro/nanoparticles
  39. Research on bond–slip performance between pultruded glass fiber-reinforced polymer tube and nano-CaCO3 concrete
  40. Antibacterial polymer nanofiber-coated and high elastin protein-expressing BMSCs incorporated polypropylene mesh for accelerating healing of female pelvic floor dysfunction
  41. Effects of Ag contents on the microstructure and SERS performance of self-grown Ag nanoparticles/Mo–Ag alloy films
  42. A highly sensitive biosensor based on methacrylated graphene oxide-grafted polyaniline for ascorbic acid determination
  43. Arrangement structure of carbon nanofiber with excellent spectral radiation characteristics
  44. Effect of different particle sizes of nano-SiO2 on the properties and microstructure of cement paste
  45. Superior Fe x N electrocatalyst derived from 1,1′-diacetylferrocene for oxygen reduction reaction in alkaline and acidic media
  46. Facile growth of aluminum oxide thin film by chemical liquid deposition and its application in devices
  47. Liquid crystallinity and thermal properties of polyhedral oligomeric silsesquioxane/side-chain azobenzene hybrid copolymer
  48. Laboratory experiment on the nano-TiO2 photocatalytic degradation effect of road surface oil pollution
  49. Binary carbon-based additives in LiFePO4 cathode with favorable lithium storage
  50. Conversion of sub-µm calcium carbonate (calcite) particles to hollow hydroxyapatite agglomerates in K2HPO4 solutions
  51. Exact solutions of bending deflection for single-walled BNNTs based on the classical Euler–Bernoulli beam theory
  52. Effects of substrate properties and sputtering methods on self-formation of Ag particles on the Ag–Mo(Zr) alloy films
  53. Enhancing carbonation and chloride resistance of autoclaved concrete by incorporating nano-CaCO3
  54. Effect of SiO2 aerogels loading on photocatalytic degradation of nitrobenzene using composites with tetrapod-like ZnO
  55. Radiation-modified wool for adsorption of redox metals and potentially for nanoparticles
  56. Hydration activity, crystal structural, and electronic properties studies of Ba-doped dicalcium silicate
  57. Microstructure and mechanical properties of brazing joint of silver-based composite filler metal
  58. Polymer nanocomposite sunlight spectrum down-converters made by open-air PLD
  59. Cryogenic milling and formation of nanostructured machined surface of AISI 4340
  60. Braided composite stent for peripheral vascular applications
  61. Effect of cinnamon essential oil on morphological, flammability and thermal properties of nanocellulose fibre–reinforced starch biopolymer composites
  62. Study on influencing factors of photocatalytic performance of CdS/TiO2 nanocomposite concrete
  63. Improving flexural and dielectric properties of carbon fiber epoxy composite laminates reinforced with carbon nanotubes interlayer using electrospray deposition
  64. Scalable fabrication of carbon materials based silicon rubber for highly stretchable e-textile sensor
  65. Degradation modeling of poly-l-lactide acid (PLLA) bioresorbable vascular scaffold within a coronary artery
  66. Combining Zn0.76Co0.24S with S-doped graphene as high-performance anode materials for lithium- and sodium-ion batteries
  67. Synthesis of functionalized carbon nanotubes for fluorescent biosensors
  68. Effect of nano-silica slurry on engineering, X-ray, and γ-ray attenuation characteristics of steel slag high-strength heavyweight concrete
  69. Incorporation of redox-active polyimide binder into LiFePO4 cathode for high-rate electrochemical energy storage
  70. Microstructural evolution and properties of Cu–20 wt% Ag alloy wire by multi-pass continuous drawing
  71. Transparent ultraviolet-shielding composite films made from dispersing pristine zinc oxide nanoparticles in low-density polyethylene
  72. Microfluidic-assisted synthesis and modelling of monodispersed magnetic nanocomposites for biomedical applications
  73. Preparation and piezoresistivity of carbon nanotube-coated sand reinforced cement mortar
  74. Vibrational analysis of an irregular single-walled carbon nanotube incorporating initial stress effects
  75. Study of the material engineering properties of high-density poly(ethylene)/perlite nanocomposite materials
  76. Single pulse laser removal of indium tin oxide film on glass and polyethylene terephthalate by nanosecond and femtosecond laser
  77. Mechanical reinforcement with enhanced electrical and heat conduction of epoxy resin by polyaniline and graphene nanoplatelets
  78. High-efficiency method for recycling lithium from spent LiFePO4 cathode
  79. Degradable tough chitosan dressing for skin wound recovery
  80. Static and dynamic analyses of auxetic hybrid FRC/CNTRC laminated plates
  81. Review articles
  82. Carbon nanomaterials enhanced cement-based composites: advances and challenges
  83. Review on the research progress of cement-based and geopolymer materials modified by graphene and graphene oxide
  84. Review on modeling and application of chemical mechanical polishing
  85. Research on the interface properties and strengthening–toughening mechanism of nanocarbon-toughened ceramic matrix composites
  86. Advances in modelling and analysis of nano structures: a review
  87. Mechanical properties of nanomaterials: A review
  88. New generation of oxide-based nanoparticles for the applications in early cancer detection and diagnostics
  89. A review on the properties, reinforcing effects, and commercialization of nanomaterials for cement-based materials
  90. Recent development and applications of nanomaterials for cancer immunotherapy
  91. Advances in biomaterials for adipose tissue reconstruction in plastic surgery
  92. Advances of graphene- and graphene oxide-modified cementitious materials
  93. Theories for triboelectric nanogenerators: A comprehensive review
  94. Nanotechnology of diamondoids for the fabrication of nanostructured systems
  95. Material advancement in technological development for the 5G wireless communications
  96. Nanoengineering in biomedicine: Current development and future perspectives
  97. Recent advances in ocean wave energy harvesting by triboelectric nanogenerator: An overview
  98. Application of nanoscale zero-valent iron in hexavalent chromium-contaminated soil: A review
  99. Carbon nanotube–reinforced polymer composite for electromagnetic interference application: A review
  100. Functionalized layered double hydroxide applied to heavy metal ions absorption: A review
  101. A new classification method of nanotechnology for design integration in biomaterials
  102. Finite element analysis of natural fibers composites: A review
  103. Phase change materials for building construction: An overview of nano-/micro-encapsulation
  104. Recent advance in surface modification for regulating cell adhesion and behaviors
  105. Hyaluronic acid as a bioactive component for bone tissue regeneration: Fabrication, modification, properties, and biological functions
  106. Theoretical calculation of a TiO2-based photocatalyst in the field of water splitting: A review
  107. Two-photon polymerization nanolithography technology for fabrication of stimulus-responsive micro/nano-structures for biomedical applications
  108. A review of passive methods in microchannel heat sink application through advanced geometric structure and nanofluids: Current advancements and challenges
  109. Stress effect on 3D culturing of MC3T3-E1 cells on microporous bovine bone slices
  110. Progress in magnetic Fe3O4 nanomaterials in magnetic resonance imaging
  111. Synthesis of graphene: Potential carbon precursors and approaches
  112. A comprehensive review of the influences of nanoparticles as a fuel additive in an internal combustion engine (ICE)
  113. Advances in layered double hydroxide-based ternary nanocomposites for photocatalysis of contaminants in water
  114. Analysis of functionally graded carbon nanotube-reinforced composite structures: A review
  115. Application of nanomaterials in ultra-high performance concrete: A review
  116. Therapeutic strategies and potential implications of silver nanoparticles in the management of skin cancer
  117. Advanced nickel nanoparticles technology: From synthesis to applications
  118. Cobalt magnetic nanoparticles as theranostics: Conceivable or forgettable?
  119. Progress in construction of bio-inspired physico-antimicrobial surfaces
  120. From materials to devices using fused deposition modeling: A state-of-art review
  121. A review for modified Li composite anode: Principle, preparation and challenge
  122. Naturally or artificially constructed nanocellulose architectures for epoxy composites: A review
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