Home Technology Self-diffusion of 71Ge and 31Si in Si –Ge alloys
Article
Licensed
Unlicensed Requires Authentication

Self-diffusion of 71Ge and 31Si in Si –Ge alloys

  • Andreas Strohm , Thilo Voss , Werner Frank EMAIL logo , Pauli Laitinen and Jyrki Räisänen
Published/Copyright: December 7, 2021

Abstract

The tracer self-diffusion coefficients DT of implanted 71Ge and 31Si in both relaxed monocrystalline SiyGe1 –y epilayers and specimens made from bulk SiyGe1 –y have been measured as functions of temperature T (653 °C ≤ T ≤ 1263 °C) and composition y (0 ≤ y ≤ 1) by means of radio-tracer techniques, in which serial sectioning was done by ion-beam sputtering. For all compositions, the T dependencies of DT for 71Ge and 31Si are of Arrhenius type. The y dependencies of the pre-exponential factors of the self-diffusion coefficients and of the diffusion enthalpies show a break at y ≈ 0.65. This is interpreted in terms of a transition from interstitialcy-(y ≳ 0.65) to vacancy-(y≲ 0.65) mediated self-diffusion.


Prof. Dr. Werner Frank Max-Planck-Institut für Metallforschung Heisenbergstr. 3, D-70569 Stuttgart, Germany Tel.: +49 711 6891940 Fax: +49 711 6891922

  1. The authors wish to thank Christian Grodon, Martin Hennemann, Jussi Huikari, and Arto Nieminen for their assistance in carrying out the experiments. The provision of the specimen materials by the institutions listed in Section 2.1 as well as the 71Ge implantations at ISOLDE, CERN, in Geneva, and at Bonn University are appreciated. Financial support by the Academy of Finland within the framework of the Finnish Center of Excellence Program 2000 –2005 (Project No. 44875 in the Nuclear and Condensed Matter Physics Program at JYFL), and by the HPRI Program of the European Community are acknowledged.

References

1 Schäffler, F.: Semicond. Sci. Technol. 12 (1997) 1515.10.1088/0268-1242/12/12/001Search in Google Scholar

2 Seeger, A.; Chik K.P.: phys. stat. sol. 29 (1968) 455.10.1002/pssb.19680290202Search in Google Scholar

3 Frank, W.; Gösele, U.; Mehrer, H.; Seeger, A., in: A.S. Nowick, G. Murch (eds.), Diffusion in Crystalline Solids, Academic Press, Orlando (1984) 63, and Refs. therein.10.1016/B978-0-12-522662-2.50007-8Search in Google Scholar

4 Frank, W.: Def. Diff. Forum 75 (1991) 121.10.4028/www.scientific.net/DDF.75.121Search in Google Scholar

5 Fischer, R.; Frank, W.; Lyutovich, K.: Physica B 273–274 (1999) 598.10.1016/S0921-4526(99)00582-7Search in Google Scholar

6 Hettich, G.; Mehrer, H.; Maier, K.: Inst. Phys. Conf. Ser. 46 (1979) 500.Search in Google Scholar

7 Zangenberg, N.R.; Lundsgaard Hansen, J.; Fage-Pedersen, J.; Nylandsted Larsen, A.: Phys. Rev. Lett. 87 (2001) 125901– 1.10.1103/PhysRevLett.87.125901Search in Google Scholar PubMed

8 Bracht, H.; Haller, E.E.; Clark-Phelps, R.: Phys. Rev. Lett. 81 (1998) 393.10.1103/PhysRevLett.81.393Search in Google Scholar

9 Ural, A.; Griffin, P.B.; Plummer, J.D.: Phys. Rev. Lett 83 (1999) 3454.10.1103/PhysRevLett.83.3454Search in Google Scholar

10 Tan, T.Y.; Gösele, U.: Appl.Phys. A 37 (1985) 1.10.1007/BF00617863Search in Google Scholar

11 Bracht, H.; Stolwijk, N.A.; Mehrer, H.: Phys. Rev. B 52 (1995) 16542.10.1103/PhysRevB.52.16542Search in Google Scholar

12 Giese, A.; Bracht, H.; Stolwijk, N.A.; Baither, D.: Mat. Sci. Eng. B 71 (2000) 160.10.1016/S0921-5107(99)00367-0Search in Google Scholar

13 McVay, G.L. ; Du Charme, A.R.: Phys. Rev. B 9 (1974) 627.10.1103/PhysRevB.9.627Search in Google Scholar

14 Dorner, P.; Gust, W.; Predel, B.; Roll, U.; Lodding, A.; Odelius, H.: Phil. Mag. A 49 (1984) 55710.1080/01418618408236556Search in Google Scholar

15 Werner, M.; Mehrer, H.; Hochheimer, H.D.: Phys. Rev. B 32 (1985) 3930.10.1103/PhysRevB.32.3930Search in Google Scholar

16 Fahey, P.M.; Griffin, P.B.; Plummer, J. D.: Rev. Mod. Phys. 61 (1989) 289, and Refs. therein.10.1103/RevModPhys.61.289Search in Google Scholar

17 Fuchs, H.D.; Walukiewicz, W.; Haller, E.E.; Dondl, W.; Schorer, R.; Abstreiter, G.; Rudnev, A.I.; Tikhomirov, A.V.; Ozhogin, V.I.: Phys. Rev. B 51 (1995) 16817.10.1103/PhysRevB.51.16817Search in Google Scholar

18 Haller, E.E.; Hansen, W.L.; Goulding, F.S.: Advances in Physics 30 (1981) 93.10.1080/00018738100101357Search in Google Scholar

19 Abrosimov, N.V.; Rossolenko, S.N.; Thieme, W.; Gerhardt, A.; Schröder, W.: J. Cryst. Growth 174 (1997) 182.10.1016/S0022-0248(96)01102-5Search in Google Scholar

20 Dold, P.; Barz, A.; Recha, S.; Pressel, K.; Franz, M.; Benz, K.W.: J. Crystal. Growth 192 (1998) 125.10.1016/S0022-0248(98)00410-2Search in Google Scholar

21 Kummer, M.; Rosenblad, C.; Dommann, A.; Hackbarth, T.; Höck, G.; Zeuner, M.; Müller, E.; von Känel, H.: Mat. Sci. Eng. B 89 (2002) 288.10.1016/S0921-5107(01)00801-7Search in Google Scholar

22 Nylandsted Larsen, A.; Lundsgard Hansen, J.; Jensen, R.S.; Shiryaev, S.Y.; Ostergaard, P.R.; Hartung, J.; Davies, G.; Jensen, F.; Petersen, J.W.: Physica Scripta T 54 (1994) 208.10.1088/0031-8949/1994/T54/052Search in Google Scholar

23 Hackbarth, T.; Kibbel, H.; Glueck, M.; Hoeck, G.; Herzog, H.-J.: Thin Solid Films 321 (1998) 136.10.1016/S0040-6090(98)00462-3Search in Google Scholar

24 Nagesh, V.; Grimmeiss, H.G.; Hellqvist, E.-L.; Ljutovich, K.L.; Ljutovich, A.S.: Semicond. Sci. Technol. 5 (1990) 566.10.1088/0268-1242/5/6/018Search in Google Scholar

25 Voss, T.; Strohm, A.; Matics, S.; Scharwaechter, P.; Frank, W.: Z. Metallkd., to be submitted.Search in Google Scholar

26 Dendooven, P.: Nucl. Instr. Meth. B 126 (1997) 182.10.1016/S0168-583X(96)01010-5Search in Google Scholar

27 Räisänen, J.; Hirvonen, J.; Anttila, A.: Solid-State Electronics 24 (1981) 33310.1016/0038-1101(81)90027-7Search in Google Scholar

28 Sizmann, R.: J. Nucl. Mater. 69&70 (1978) 386.10.1016/0022-3115(78)90256-8Search in Google Scholar

29 Seeger, A.; Föll, H.; Frank, W.: Inst. Phys. Conf. Ser. 31 (1977) 12.Search in Google Scholar

30 Stolwijk, N.A.; Frank, W.; Hölzl, J.; Pearton, S.J.; Haller, E.E.: J. Appl. Phys. 57 (1985) 5211.10.1063/1.335259Search in Google Scholar

31 Stolwijk N.A.; Schuster, B.; Hölzl, J.: Appl. Phys. A 33 (1984) 133.10.1007/BF00617619Search in Google Scholar

32 Hauber, J.; Frank, W.; Stolwijk, N.A.: Mater. Sci. Forum 38–41 (1989) 707.Search in Google Scholar

33 Perret, M.; Stolwijk, N.A.; Cohausz, L.: J. Phys: Condens. Matter 1 (1989) 6347.Search in Google Scholar

34 Aldrich, D.B.; Neumann, R.J.; Sayers, D.E.: Phys. Rev. B 50 (1994) 15026.10.1103/PhysRevB.50.15026Search in Google Scholar

35 Ridgway, M.C.; Yu, K.M.; Glover, C.J.; Foran, G.J.; Clerc, C.; Hansen, J.L.; Nylandsted Larsen, A.: Phys. Rev. B 60 (1999) 10831.10.1103/PhysRevB.60.10831Search in Google Scholar

36 Aubry, J.C.; Tyliszczak, T.; Hitchcock, A.P.; Baribeau, J.-M.; Jackman, T.E.: Phys. Rev. B 59 (1999) 12872.10.1103/PhysRevB.59.12872Search in Google Scholar

37 Venezuela, P.; Dalpian, G.M.; da Silva, A.J.R.; Fazzio, A.: Phys. Rev. B 64 (2001) 193202-1.10.1103/PhysRevB.64.193202Search in Google Scholar

38 Pike, G.E.; Camp, W.J.; Seager, C.H.; McVay, G.L.: Phys. Rev. B 10 (1974) 4909.10.1103/PhysRevB.10.4909Search in Google Scholar

39 Nylandsted Larsen, A.; Kringhoj, P.: Appl. Phys. Lett. 68 (1996) 2684.10.1063/1.116281Search in Google Scholar

40 Mitha, S.; Aziz, M.J.; Schiferl, D.; Poker, D.B.: Def. Diff. Forum 143–147 (1997) 1041.10.4028/www.scientific.net/DDF.143-147.1041Search in Google Scholar

Received: 2002-04-16
Published Online: 2021-12-07

© 2002 Carl Hanser Verlag, München

Articles in the same Issue

  1. Frontmatter
  2. Editorial
  3. Editorial
  4. Articles/Aufsätze
  5. A model for the work hardening of WC–Co “hard metals”
  6. On the dispersion strengthening mechanisms in ODS materials
  7. Effect of hydrogen on the mechanical properties of the β titanium alloy Timetal® 21S
  8. Cyclic deformation behaviour of (α + β) titanium alloys under complex mechanical and physiological loading conditions
  9. Assessment of the influence of interdendritic shrinkage cavities on the thermo-mechanical fatigue behaviour of the nickel-base superalloy MAR-M247LC
  10. Effects of static strain aging on residual stress stability and alternating bending strength of shot peened AISI 4140
  11. On the possibilities to enhance the fatigue properties of ultrafine-grained metals
  12. New method of determining stress relaxation behavior in creep machines by controlled unloading
  13. Creep of binary Ni-rich NiTi shape memory alloys and the influence of pre-creep on martensitic transformations
  14. Interaction of high-cycle fatigue with high-temperature creep in superalloy single crystals
  15. A unified description of creep in pure and dispersion-strengthened copper
  16. A new interpretation of flow-stress measurements of high-purity NiAl below room temperature
  17. A mesoscopic plasticity model accounting for spatial fluctuations of plastic strains, internal stresses and dislocation densities
  18. Behavior of X-ray peak widths in the Wilkens model of a restrictedly random distribution of dislocations
  19. Dislocation structure and crystallite size distribution in hexagonal nanomaterials from X-ray peak profile analysis
  20. Werden gewichtsoptimiert konstruierte Bauteile durch die Verwendung von Leichtmetallen wirklich leichter?*)
  21. Strain-induced martensite formation in metastable austenitic steels with varying carbon content
  22. Isothermal bainitic transformation in low alloy steels: factors limiting prediction of the resulting material’s properties
  23. Fatigue damage evolution in a particulate-reinforced metal matrix composite determined by acoustic emission and compliance method
  24. Microstructure and modification mechanisms of Si phase in as-thixoformed alloy A356
  25. Influence of size effect on microstructural changes in cyclically deformed polycrystalline nickel
  26. Self-diffusion of 71Ge and 31Si in Si –Ge alloys
  27. On localised corrosive attack, stress corrosion cracking and corrosion fatigue effects in a hardmetal cutting-tool material
  28. The internal stress during growth of SiC single crystals
  29. Notifications/Mitteilungen
  30. Personal/Personelles
  31. Books/Bücher
  32. DGM Conferences/Training
Downloaded on 27.12.2025 from https://www.degruyterbrill.com/document/doi/10.3139/ijmr-2002-0124/html
Scroll to top button