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Nanoindentation studies of stamp materials for nanoimprint lithography

  • D. Denkiewicz , S. Landis , L. Ratajczyk und Z. Rymuza EMAIL logo
Veröffentlicht/Copyright: 21. Januar 2022
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International Journal of Materials Research
Aus der Zeitschrift International Journal of Materials Research Band 97 Heft 9

Abstract

We tested the nanomechanical properties of various materials (Si, SiO2, Si3N4, AlCu, TiN) for the design of stamps used in nanoimprint lithography. Nanoindentation was used on both insulated and non-insulated areas. The test enabled an estimation of the nanohardness and Young’s modulus of the tested materials (films). The results are very useful for selecting the material for a protective film on the stamps used in nanoinprinting lithography.

Keywords: Nanoimprint lithography; Stamp material; Nanoindentation; Hardness; Young’s modulus
Prof. Zygmunt Rymuza, Warsaw University of Technology, Institute of Micromechanics and Photonics, ul. Sw. A.Boboli 8, 02-525 Warsaw, Poland, Tel.: +48 22 660 8540, Fax: +48 22 660 8601

  1. The donation of the TriboScope instrument to J.T. Wyrobek and T.Wyrobek is greatly acknowledged. The permanent support from Hysitron Inc. to our laboratory is significant to our research activities. This work was also supported by a NaPa project under contract NMP4-CT-2003-500120.

References

[1] C.M. Sottomayor-Torres (Ed): Alternative Lithography, Kluwer Academic, New York 2003.10.1007/978-1-4419-9204-8Suche in Google Scholar

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[4] A.C. Fisher-Cripps: Nanoindentations, 2nd ed., Springer-Verlag, Berlin, 2004.10.1007/978-1-4757-5943-3Suche in Google Scholar

[5] W.N. Sharpe, Jr., B. Yuan, R.L. Edwards: J. Micromech. Syst. 6, No. 3 (1997) 193.10.1109/84.623107Suche in Google Scholar

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Received: 2006-02-27
Accepted: 2006-04-27
Published Online: 2022-01-21

© 2006 Carl Hanser Verlag, München

Artikel in diesem Heft

  1. Contents
  2. Editorial
  3. Nanoindentation creep and stress relaxation tests of polycarbonate: Analysis of viscoelastic properties by different rheological models
  4. Investigation of SiO2 thin films on Si substrates for use as standards for laser-acoustic measuring devices
  5. Determination of the critical tensile stress of sapphire by spherical indentation with additional lateral forces
  6. The deformation behaviour of electrodeposited nanocrystalline Ni in an atomic force microscope with a newly developed in situ bending machine
  7. In situ electrochemical nanoindentation of a nickel (111) single crystal: hydrogen effect on pop-in behaviour
  8. Indentation behaviour of (011) thin films of III–V semiconductors: polarity effect differences between GaAs and InP
  9. Multiwall carbon nanotubes-based composites – mechanical characterization using the nanoindentation technique
  10. Nanoindentation studies of stamp materials for nanoimprint lithography
  11. Experimental and thermodynamic evaluation of the Co–Cr–C system
  12. Thermodynamics of high-temperature cuprous sulfide
  13. Sintering of Si3N4 with Li-exchanged zeolite additive
  14. Effect of LiYO2 addition on sintering behavior and indentation properties of silicon nitride ceramics
  15. Mechanism of quasi-viscous flow of zinc single crystals
  16. The absolute thermoelectric power of chromium, molybdenum, and tungsten
  17. Modelling of metal – mould interface resistance in the Al-11.5 wt.% Si alloy casting process
  18. Award/Preisverleihung
  19. Personal
  20. Conferences
  21. Contents
  22. Editorial
  23. Editorial
  24. Basic
  25. Nanoindentation creep and stress relaxation tests of polycarbonate: Analysis of viscoelastic properties by different rheological models
  26. Investigation of SiO2 thin films on Si substrates for use as standards for laser-acoustic measuring devices
  27. Determination of the critical tensile stress of sapphire by spherical indentation with additional lateral forces
  28. The deformation behaviour of electrodeposited nanocrystalline Ni in an atomic force microscope with a newly developed in situ bending machine
  29. In situ electrochemical nanoindentation of a nickel (111) single crystal: hydrogen effect on pop-in behaviour
  30. Indentation behaviour of (011) thin films of III–V semiconductors: polarity effect differences between GaAs and InP
  31. Multiwall carbon nanotubes-based composites – mechanical characterization using the nanoindentation technique
  32. Nanoindentation studies of stamp materials for nanoimprint lithography
  33. Experimental and thermodynamic evaluation of the Co–Cr–C system
  34. Applied
  35. Thermodynamics of high-temperature cuprous sulfide
  36. Sintering of Si3N4 with Li-exchanged zeolite additive
  37. Effect of LiYO2 addition on sintering behavior and indentation properties of silicon nitride ceramics
  38. Mechanism of quasi-viscous flow of zinc single crystals
  39. The absolute thermoelectric power of chromium, molybdenum, and tungsten
  40. Modelling of metal – mould interface resistance in the Al-11.5 wt.% Si alloy casting process
  41. Kösterpreis
  42. Award/Preisverleihung
  43. Notifications
  44. Personal
  45. Conferences
https://doi.org/10.3139/ijmr-2006-0196
Schlagwörter für diesen Artikel
Nanoimprint lithography; Stamp material; Nanoindentation; Hardness; Young’s modulus

Artikel in diesem Heft

  1. Contents
  2. Editorial
  3. Nanoindentation creep and stress relaxation tests of polycarbonate: Analysis of viscoelastic properties by different rheological models
  4. Investigation of SiO2 thin films on Si substrates for use as standards for laser-acoustic measuring devices
  5. Determination of the critical tensile stress of sapphire by spherical indentation with additional lateral forces
  6. The deformation behaviour of electrodeposited nanocrystalline Ni in an atomic force microscope with a newly developed in situ bending machine
  7. In situ electrochemical nanoindentation of a nickel (111) single crystal: hydrogen effect on pop-in behaviour
  8. Indentation behaviour of (011) thin films of III–V semiconductors: polarity effect differences between GaAs and InP
  9. Multiwall carbon nanotubes-based composites – mechanical characterization using the nanoindentation technique
  10. Nanoindentation studies of stamp materials for nanoimprint lithography
  11. Experimental and thermodynamic evaluation of the Co–Cr–C system
  12. Thermodynamics of high-temperature cuprous sulfide
  13. Sintering of Si3N4 with Li-exchanged zeolite additive
  14. Effect of LiYO2 addition on sintering behavior and indentation properties of silicon nitride ceramics
  15. Mechanism of quasi-viscous flow of zinc single crystals
  16. The absolute thermoelectric power of chromium, molybdenum, and tungsten
  17. Modelling of metal – mould interface resistance in the Al-11.5 wt.% Si alloy casting process
  18. Award/Preisverleihung
  19. Personal
  20. Conferences
  21. Contents
  22. Editorial
  23. Editorial
  24. Basic
  25. Nanoindentation creep and stress relaxation tests of polycarbonate: Analysis of viscoelastic properties by different rheological models
  26. Investigation of SiO2 thin films on Si substrates for use as standards for laser-acoustic measuring devices
  27. Determination of the critical tensile stress of sapphire by spherical indentation with additional lateral forces
  28. The deformation behaviour of electrodeposited nanocrystalline Ni in an atomic force microscope with a newly developed in situ bending machine
  29. In situ electrochemical nanoindentation of a nickel (111) single crystal: hydrogen effect on pop-in behaviour
  30. Indentation behaviour of (011) thin films of III–V semiconductors: polarity effect differences between GaAs and InP
  31. Multiwall carbon nanotubes-based composites – mechanical characterization using the nanoindentation technique
  32. Nanoindentation studies of stamp materials for nanoimprint lithography
  33. Experimental and thermodynamic evaluation of the Co–Cr–C system
  34. Applied
  35. Thermodynamics of high-temperature cuprous sulfide
  36. Sintering of Si3N4 with Li-exchanged zeolite additive
  37. Effect of LiYO2 addition on sintering behavior and indentation properties of silicon nitride ceramics
  38. Mechanism of quasi-viscous flow of zinc single crystals
  39. The absolute thermoelectric power of chromium, molybdenum, and tungsten
  40. Modelling of metal – mould interface resistance in the Al-11.5 wt.% Si alloy casting process
  41. Kösterpreis
  42. Award/Preisverleihung
  43. Notifications
  44. Personal
  45. Conferences
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