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Investigation of SiO2 thin films on Si substrates for use as standards for laser-acoustic measuring devices

  • D. A. Lucca EMAIL logo , K. Herrmann , M. J. Klopfstein and F. Menelao
Published/Copyright: January 21, 2022
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International Journal of Materials Research
From the journal International Journal of Materials Research Volume 97 Issue 9

Abstract

We report on an investigation of the suitability of SiO2 thin films for use as calibration standards for the measurement of elastic modulus by laser-acoustic measuring devices. Film thicknesses for a range of thin film standards, originally developed for the calibration of ellipsometers, were obtained by X-ray reflectometry, ellipsometry, and metrological scanning force microscopy. Using the calibrated values of film thickness, a laser-acoustic method was used to obtain the elastic moduli of the thin films. Nanoindentation of the films, performed at two different laboratories was used to provide an independent measure of the elastic modulus values. The modulus values determined by nanoindentation and the laser-acoustic method were found to agree within 4.6 %, which was within the calculated uncertainty of the measurements performed. As a result of their high homogeneity with respect to film thickness and elastic modulus, their low surface roughness and the good laser-acoustic signal quality, the thin films investigated appear to hold promise as standards for laser-acoustic measuring devices.

Keywords: Thin films; Elastic modulus; Nanoindentation; Laser-acoustic method
Prof. D. A. Lucca School of Mechanical and Aerospace Engineering Oklahoma State University 218 Engineering North, Stillwater, OK 74078, USA Tel.: +1 405 744 5900 Fax: +1 405 744 7873

References

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Received: 2006-02-03
Accepted: 2006-03-02
Published Online: 2022-01-21

© 2006 Carl Hanser Verlag, München

Articles in the same Issue

  1. Contents
  2. Editorial
  3. Nanoindentation creep and stress relaxation tests of polycarbonate: Analysis of viscoelastic properties by different rheological models
  4. Investigation of SiO2 thin films on Si substrates for use as standards for laser-acoustic measuring devices
  5. Determination of the critical tensile stress of sapphire by spherical indentation with additional lateral forces
  6. The deformation behaviour of electrodeposited nanocrystalline Ni in an atomic force microscope with a newly developed in situ bending machine
  7. In situ electrochemical nanoindentation of a nickel (111) single crystal: hydrogen effect on pop-in behaviour
  8. Indentation behaviour of (011) thin films of III–V semiconductors: polarity effect differences between GaAs and InP
  9. Multiwall carbon nanotubes-based composites – mechanical characterization using the nanoindentation technique
  10. Nanoindentation studies of stamp materials for nanoimprint lithography
  11. Experimental and thermodynamic evaluation of the Co–Cr–C system
  12. Thermodynamics of high-temperature cuprous sulfide
  13. Sintering of Si3N4 with Li-exchanged zeolite additive
  14. Effect of LiYO2 addition on sintering behavior and indentation properties of silicon nitride ceramics
  15. Mechanism of quasi-viscous flow of zinc single crystals
  16. The absolute thermoelectric power of chromium, molybdenum, and tungsten
  17. Modelling of metal – mould interface resistance in the Al-11.5 wt.% Si alloy casting process
  18. Award/Preisverleihung
  19. Personal
  20. Conferences
  21. Contents
  22. Editorial
  23. Editorial
  24. Basic
  25. Nanoindentation creep and stress relaxation tests of polycarbonate: Analysis of viscoelastic properties by different rheological models
  26. Investigation of SiO2 thin films on Si substrates for use as standards for laser-acoustic measuring devices
  27. Determination of the critical tensile stress of sapphire by spherical indentation with additional lateral forces
  28. The deformation behaviour of electrodeposited nanocrystalline Ni in an atomic force microscope with a newly developed in situ bending machine
  29. In situ electrochemical nanoindentation of a nickel (111) single crystal: hydrogen effect on pop-in behaviour
  30. Indentation behaviour of (011) thin films of III–V semiconductors: polarity effect differences between GaAs and InP
  31. Multiwall carbon nanotubes-based composites – mechanical characterization using the nanoindentation technique
  32. Nanoindentation studies of stamp materials for nanoimprint lithography
  33. Experimental and thermodynamic evaluation of the Co–Cr–C system
  34. Applied
  35. Thermodynamics of high-temperature cuprous sulfide
  36. Sintering of Si3N4 with Li-exchanged zeolite additive
  37. Effect of LiYO2 addition on sintering behavior and indentation properties of silicon nitride ceramics
  38. Mechanism of quasi-viscous flow of zinc single crystals
  39. The absolute thermoelectric power of chromium, molybdenum, and tungsten
  40. Modelling of metal – mould interface resistance in the Al-11.5 wt.% Si alloy casting process
  41. Kösterpreis
  42. Award/Preisverleihung
  43. Notifications
  44. Personal
  45. Conferences
https://doi.org/10.3139/ijmr-2006-0190
Keywords for this article
Thin films; Elastic modulus; Nanoindentation; Laser-acoustic method

Articles in the same Issue

  1. Contents
  2. Editorial
  3. Nanoindentation creep and stress relaxation tests of polycarbonate: Analysis of viscoelastic properties by different rheological models
  4. Investigation of SiO2 thin films on Si substrates for use as standards for laser-acoustic measuring devices
  5. Determination of the critical tensile stress of sapphire by spherical indentation with additional lateral forces
  6. The deformation behaviour of electrodeposited nanocrystalline Ni in an atomic force microscope with a newly developed in situ bending machine
  7. In situ electrochemical nanoindentation of a nickel (111) single crystal: hydrogen effect on pop-in behaviour
  8. Indentation behaviour of (011) thin films of III–V semiconductors: polarity effect differences between GaAs and InP
  9. Multiwall carbon nanotubes-based composites – mechanical characterization using the nanoindentation technique
  10. Nanoindentation studies of stamp materials for nanoimprint lithography
  11. Experimental and thermodynamic evaluation of the Co–Cr–C system
  12. Thermodynamics of high-temperature cuprous sulfide
  13. Sintering of Si3N4 with Li-exchanged zeolite additive
  14. Effect of LiYO2 addition on sintering behavior and indentation properties of silicon nitride ceramics
  15. Mechanism of quasi-viscous flow of zinc single crystals
  16. The absolute thermoelectric power of chromium, molybdenum, and tungsten
  17. Modelling of metal – mould interface resistance in the Al-11.5 wt.% Si alloy casting process
  18. Award/Preisverleihung
  19. Personal
  20. Conferences
  21. Contents
  22. Editorial
  23. Editorial
  24. Basic
  25. Nanoindentation creep and stress relaxation tests of polycarbonate: Analysis of viscoelastic properties by different rheological models
  26. Investigation of SiO2 thin films on Si substrates for use as standards for laser-acoustic measuring devices
  27. Determination of the critical tensile stress of sapphire by spherical indentation with additional lateral forces
  28. The deformation behaviour of electrodeposited nanocrystalline Ni in an atomic force microscope with a newly developed in situ bending machine
  29. In situ electrochemical nanoindentation of a nickel (111) single crystal: hydrogen effect on pop-in behaviour
  30. Indentation behaviour of (011) thin films of III–V semiconductors: polarity effect differences between GaAs and InP
  31. Multiwall carbon nanotubes-based composites – mechanical characterization using the nanoindentation technique
  32. Nanoindentation studies of stamp materials for nanoimprint lithography
  33. Experimental and thermodynamic evaluation of the Co–Cr–C system
  34. Applied
  35. Thermodynamics of high-temperature cuprous sulfide
  36. Sintering of Si3N4 with Li-exchanged zeolite additive
  37. Effect of LiYO2 addition on sintering behavior and indentation properties of silicon nitride ceramics
  38. Mechanism of quasi-viscous flow of zinc single crystals
  39. The absolute thermoelectric power of chromium, molybdenum, and tungsten
  40. Modelling of metal – mould interface resistance in the Al-11.5 wt.% Si alloy casting process
  41. Kösterpreis
  42. Award/Preisverleihung
  43. Notifications
  44. Personal
  45. Conferences
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