Abstract
Besides conventional high-temperature sintering processes for the preparation of ceramics, synthesis routes like chemical and physical vapor phase deposition or molecular beam epitaxy as well as sol-gel and polymer thermolysis carried out at decreased temperatures gain in significance. Such a trend is especially pronounced in the case of the deposition of oxide-based solids from aqueous solutions induced by organic templates. This approach is inspired by biomineralization that in general involves the formation of well-structured and complex-shaped organic/inorganic composites by the deposition of an inorganic solid on an organic matrix that consists of biomolecules like proteins. It occurs at ambient conditions with respect to temperature, pressure and atmosphere.
The imitation of these processes by technical means is the deposition of thin oxide films from aqueous solutions in the presence of organic self-assembled monolayers. Besides general features of this technique like low synthesis temperatures, processing costs and equipment expenditure as well as the line-of-sight deposition suitable for coating complex shaped and/or temperature-sensitive substrates the characteristics of the films and their mechanisms of formation are discussed by way of the oxide systems TiO2, ZrO2 and ZnO.
Abstract
Neben den klassischen Sinterverfahren zur Herstellung von keramischen Materialien bei hohen und höchsten Temperaturen etablieren sich zunehmend Synthesewege wie chemische und physikalische Bedampfungsmethoden oder Molekularstrahlepitaxie sowie Sol-Gel-Verfahren und die Thermolyse prökeramischer Polymere, welche teilweise bei wesentlich niedrigeren Prozesstemperaturen durchgeführt werden. Besonders ausgepragt ist dieser Trend bei der Erzeugung von oxidischen Festkörpern mittels einer durch organische Template induzierten Abscheidung aus wässriger Lösung. Ansatzpunkte für derartige neue Verfahren liefert die Biomineralisation, die im Allgemeinen mit der Bildung eines anorganischen Materials durch eine Biopolymermatrix und der Entstehung komplexer anorganischorganischer Verbundmaterialien bei Umgebungsbedingungen verbunden ist.
Eine Nachahmung dieser material- und strukturbildenden Prozesse mit technischen Mitteln ist die Abscheidung dünner oxidischer Schichten aus wässriger Losung in Gegenwart synthetischer organischer Grenzflächen. Die Strukturmerkmale und möglichen Bildungsmechanismen der Schichtsysteme werden an oxidischen Systemen wie TiO2, ZrO2 oder ZnO besprochen. Darüber hinaus werden wesentliche Charakteristika dieses Verfahrens und dessen Unterschiede gegenüber den konventionellen Techniken aufgezeigt. Hierzu gehören neben der niedrigen Abscheidungstemperatur der vergleichsweise geringe apparative Aufwand und die Möglichkeit einer gleichförmigen Beschichtung auch komplex geformter Körper und insbesondere temperaturempfindlicher Substrate.
-
We thank Prof. Mark De Guire for helpful discussions and for reviewing the manuscript. This project was supported by the Deutsche Forschungsgemeinschaft and the BMBF through grant 03C0294C/8. Polymers for ZnO deposition were kindly supplied by Dr. J. Rieger and Dr. M. Kroner, BASFAG, Ludwigshafen.
References
1 Setter, N.; Waser, R.: Acta mater. 48 (2000) 151.10.1016/S1359-6454(99)00293-1Search in Google Scholar
2 Petzow, G.: Pract. Metallogr. 25 (1988) 53.10.1515/pm-1988-250202Search in Google Scholar
3 Motzfeld, K., in: M. Haviar (ed.), Proc. Int. Conf. Engineering Ceramics ’92, Reproprint, Bratislava (1993) 7.Search in Google Scholar
4 Omori, M.; Takei, H.: J. Am. Ceram. Soc. 65 (1982) C-92.10.1111/j.1151-2916.1982.tb10460.xSearch in Google Scholar
5 Rixecker, G.; Biswas, K.; Wiedmann, I.; Aldinger, F.: J. Ceram. Proc. Res. 1 (2000) 12.Search in Google Scholar
6 Ohring, M.: The Materials Science of Thin Films, Academic Press, Boston (1992).Search in Google Scholar
7 Segal, D.: Chemical Synthesis of Advanced Ceramic Materials, Cambridge University Press, Cambridge (1989).10.1017/CBO9780511565014Search in Google Scholar
8 Narula, C.K. (ed.): Ceramic Precursor Technology and Its Applications, Marcel Dekker, New York (1995).Search in Google Scholar
9 Lowenstam, H.A.;Weiner, S.: On Biomineralization, Oxford University Press, New York (1989). Mann, S.; Webb, J.; Williams, R.J.P. (eds.): Biomineralization, VCH Verlagsgesellschaft, Weinheim (1989). Baeuerlein, E.: Biomineralization, Wiley-VCH, Weinheim (2000).10.1093/oso/9780195049770.001.0001Search in Google Scholar
10 Ball, P.: Made to Measure, Princeton University Press, Princeton, New Jersey (1997) 193.10.1515/9781400865338Search in Google Scholar
11 Mann, S. (ed.): Biomimetic Materials Chemistry, VCH Publishers, New York (1996).Search in Google Scholar
12 Calvert, P.; Rieke, P.: Chem. Mater. 8 (1996) 1715.10.1021/cm960126oSearch in Google Scholar
13 Heuer, A.H.; Fink, D.J.; Laraia, V.J.; Arias, J.L.; Calvert, P.D.; Kendall, K.; Messing, G.L.; Blackwell, J.; Rieke, P.C.; Thompson, D.H.; Wheeler, A.P.; Veis, A.; Caplan, A.I.: Science 255 (1992) 1098. Bunker, B.C.; Rieke, P.C.; Tarasevich, B.J.; Campbell, A.A.; Fryxell, G.E.; Graff, G.L.; Song, L.; Liu, J.; Virden, J.W.; McVay, G.L.: Science 264 (1994) 48. Niesen, T.P.; De Guire, M.R.: J. Electroceramics 6 (2001) 169.10.1126/science.1546311Search in Google Scholar PubMed
14 Aizenberg, J.; Black, A.J.; Whitesides, G.M.: Nature 398 (1999) 495.10.1038/19047Search in Google Scholar
15 Aizenberg, J.; Black, A.J.; Whitesides, G.M.: J. Am. Chem. Soc. 121 (1999) 4500.10.1021/ja984254kSearch in Google Scholar
16 Aizenberg, J.: J. Cryst. Growth 211 (2000) 143.10.1016/S0022-0248(99)00814-3Search in Google Scholar
17 Liu, J.; Kim, A.Y.; Wang, L.Q.; Palmer, B.J.; Chen, Y.L.; Bruinsma, P.; Bunker, B.C.; Exarhos, G.J.; Graff, G.L.; Rieke, P.C.; Fryxell, G.E.; Virden, J.W.; Tarasevich, B.J.; Chick, L.A.: Adv. Coll. Interf. Sci. 69 (1996) 131.10.1016/S0001-8686(96)00309-0Search in Google Scholar
18 Tarasevich, B.J.; Rieke, P.C.: Chem. Mater. 8 (1996) 292.10.1021/cm940391eSearch in Google Scholar
19 Maiti, M.: M.Sc. Thesis, Case Western Reserve University (1994).Search in Google Scholar
20 Rieke, P.C.; Marsh, B.D.; Wood, L.L.; Tarasevich, B.J.; Liu, J.; Song, L.; Fryxell, G. E.: Langmuir 11 (1995) 318.10.1021/la00001a054Search in Google Scholar
21 Rieke, P.C.; Wiecek, R.; Marsh, B.D.; Wood, L.L.; Liu, J.; Song, L.; Fryxell, G.E.; Tarasevich, B.J.: Langmuir 12 (1996) 4266.10.1021/la950584wSearch in Google Scholar
22 Nagtegaal, M.; Stroeve, P.; Tremel, W.: Thin Solid Films 327 – 329 (1998) 571.10.1016/S0040-6090(98)00715-9Search in Google Scholar
23 Nagtegaal, M.; Stroeve, P.; Ensling, J.; Gütlich, P.; Schurrer, M.; Voit, H.; Flath, J.; Käshammer, J.; Knoll, W.; Tremel, W.: Chem. Eur. J. 5 (1999) 1331.10.1002/(SICI)1521-3765(19990401)5:4<1331::AID-CHEM1331>3.0.CO;2-SSearch in Google Scholar
24 Agarwal, M.; DeGuire, M.R.; Heuer, A.H.: Appl. Phys. Lett. 71 (1997) 891.10.1063/1.119679Search in Google Scholar
25 Shin, H.; Collins, R.J.; DeGuire, M.R.; Heuer, A.H.; Sukenik, C.N.: J. Mater. Res. 10 (1995) 692.10.1557/JMR.1995.0692Search in Google Scholar
26 Shin, H., Ph.D. Thesis, Case Western Reserve University (1996).Search in Google Scholar
27 Collins, R.J.; Shin, H.; DeGuire, M.R.; Heuer, A.H.; Sukenik, C.N.: Appl. Phys. Lett. 69 (1996) 860.10.1063/1.117916Search in Google Scholar
28 Huang, D.; Xiao, Z.D.; Gu, J.H.; Huang, N.P.; Yuan, C.W.: Thin Solid Films 305 (1997) 110.10.1016/S0040-6090(97)00202-2Search in Google Scholar
29 Shin, H.; DeGuire, M.R.; Heuer, A.H.: J. Appl. Phys. 83 (1998) 3311.10.1063/1.367132Search in Google Scholar
30 Xiao, Z.; Gu, J.; Huang, D.; Lu, Z.; Wei, Y.: Appl. Surf. Sci. 125 (1998) 85.10.1016/S0169-4332(97)00388-7Search in Google Scholar
31 Xiao, Z.; Su, L.; Gu, N.; Wei, Y.: Thin Solid Films 333 (1998) 25.10.1016/S0040-6090(98)00760-3Search in Google Scholar
32 Xiao, Z.; Xu, M.; Gu, J.; Huang, D.; Lu, Z.: Mater. Chem. Phys. 52 (1998) 170.10.1016/S0254-0584(98)80022-9Search in Google Scholar
33 Baskaran, S.; Song, L.; Liu, J.; Chen, Y.L.; Graff, G.L.: J. Am. Ceram. Soc. 81 (1998) 401.10.1111/j.1151-2916.1998.tb02347.xSearch in Google Scholar
34 Niesen, T.P.; DeGuire, M.R.; Bill, J.; Aldinger, F.; Rühle, M.; Fischer, A.; Jentoft, F. C. ; Schlögl, R.: J. Mater. Res. 14 (1999) 2464.10.1557/JMR.1999.0331Search in Google Scholar
35 Niesen, T.P.; Wolff, J.; Bill, J.; DeGuire, M.R.; Aldinger, F. in: L.C. Klein, L.F. Francis, M.R. DeGuire, J.E. Mark (eds.): Organic-Inorganic Hybrid Materials II, Materials Research Society, Warrendale, PA, 576 (1999) 197.Search in Google Scholar
36 Niesen, T.P.; Bill, J.; Aldinger, F.: Chem. Mater. 13 (2001) 1552.10.1021/cm001227wSearch in Google Scholar
37 Agarwal, M.; DeGuire, M.R.; Heuer, A.H.: J. Am. Ceram. Soc. 80 (1997) 2967.10.1111/j.1151-2916.1997.tb03222.xSearch in Google Scholar
38 Sampathkumaran, U.; DeGuire, M.R.; Heuer, A.H.; Niesen, T.; Bill, J.; Aldinger, F. in: N.P. Bansal, J.P. Singh (eds.), Proc. Symp. on Innovative Processing and Synthesis of Ceramics, Glasses, and Composites II, American Ceramic Society, Westerville, OH, 94 (1999) 307.Search in Google Scholar
39 Fischer, A.; Jentoft, F.C.; Weinberg, G.; Schlögl, R.; Niesen, T.P.; Bill, J.; Aldinger, F.; DeGuire, M.R. ; Rühle, M.: J. Mater. Res. 14 (1999) 3725.10.1557/JMR.1999.0503Search in Google Scholar
40 Palacin, S.; Hidber, P.C.; Bourgoin, J.P.; Miramond, C.; Fermon, C.; Whitesides, G. M.: Chem. Mater. 8 (1996) 1316.10.1021/cm950587uSearch in Google Scholar
41 (a) DeGuire, M.R.; Niesen, T.P.; Supothina, S.; Wolff, J.; Bill, J.; Sukenik, C.N.; Aldinger, F.; Heuer, A.H.; Rühle, M.: Z. Metallkd. 89 (1998) 758. (b) DeGuire, M.R.; Niesen, T.P.; Wolff, J.; Supothina, S.; Bill, J.; Aldinger, F.; Rühle, M.: Synthesis of Oxide and Non-oxide Inorganic Materials at Organic Surfaces, in: J. Bill, F. Wakai, F. Aldinger (eds.), Precursor-Derived Ceramics, Proc. International workshop on Grain Boundary Dynamics of Precursor-Derived Ceramics, Wiley-VCH, Weinheim (1999) 143.Search in Google Scholar
42 Kovtyukhova, N.I.; Buzaneva, E.V.; Waraksa, C.C.; Martin, B.R.; Mallouk, T.E.: Chem. Mater. 12 (2000) 383.10.1021/cm990395pSearch in Google Scholar
43 Hoffmann, R.; Fuchs, T.; Niesen, T. P.; Bill, J.; Aldinger, F.: Surf. Interface Anal., in press.Search in Google Scholar
44 Supothina, S.; DeGuire, M.R.; Heuer, A.H.; Niesen, T.P.; Bill, J.; Aldinger, F., in: L. C. Klein, L. F. Francis, M. R. DeGuire, J. E. Mark (eds.), Organic-Inorganic Hybrid Materials II, Materials Research Society, Warrendale, PA, 576 (1999) 203.Search in Google Scholar
45 Supothina, S.; DeGuire, M.R.: Thin Solid Films 371 (2000) 1.10.1016/S0040-6090(00)00989-5Search in Google Scholar
46 Sampathkumaran, U.; Supothina, S.; Wang, R.; DeGuire, M.R., in: P. Li, P. Calvert, R.J. Levy, T. Kokubo, C.R. Schied (eds): Mineralization in Natural and Synthetic Biominerals, Materials Research Society, Warrendale, PA, 599 (2000) 177.Search in Google Scholar
47 Meldrum, F.C.; Flath, J.; Knoll, W.: Langmuir 13 (1997) 2033.10.1021/la9608369Search in Google Scholar
48 Meldrum, F.C.; Flath, J.; Knoll, W.: Thin Solid Films 348 (1999) 188.10.1016/S0040-6090(99)00044-9Search in Google Scholar
49 Meldrum, F.C.; Flath, J.; Knoll, W.: J. Mater. Chem. 9 (1999) 711.10.1039/a807100dSearch in Google Scholar
50 Hwang, Y.K.; Woo, S.Y.; Lee, J.H.; Jung, D.Y.; Kwon, Y.U.: Chem. Mater. 12 (2000) 2059.10.1021/cm000304kSearch in Google Scholar
51 Flath, J.; Meldrum, F.C.; Knoll, W.: Thin Solid Films 327–329 (1998) 506.10.1016/S0040-6090(98)00698-1Search in Google Scholar
52 Minh, N.Q.: J. Am. Ceram. Soc. 76 (1993) 563.10.1111/j.1151-2916.1993.tb03645.xSearch in Google Scholar
53 Fuyuki, T.; Matsunami, H.: Jpn. J. Appl. Phys. 9 (1986) 1288.10.1143/JJAP.25.1288Search in Google Scholar
54 Foster, N.F.; Rozgonyi, G.A.: Appl. Phys. Lett. 8 (1966) 221.10.1063/1.1754565Search in Google Scholar
55 Ulman, A.: Chem. Rev. 96 (1996) 1533. Ulman A.: An Introduction to Ultrathin Organic Films, Academic Press, San Diego, CA (1991).10.1021/cr9502357Search in Google Scholar
56 Collins, R.J.; Sukenik, C.N.: Langmuir 11 (1995) 2322.10.1021/la00006a078Search in Google Scholar
57 Jolivet, J.P.: Metal Oxide Chemistry and Synthesis, John Wiley, New York (2000).Search in Google Scholar
58 Shin, H.; Agarwal, M.; DeGuire, M.R.; Heuer, A.H.: Acta Mater. 46 (1998) 801.10.1016/S1359-6454(97)00258-9Search in Google Scholar
59 Shin, H.; Wang, Y.; Sampathkumaran, U.; DeGuire, M.R.; Heuer, A.H.; Sukenik, C.N.: J. Mater. Res. 14 (1999) 2116.10.1557/JMR.1999.0286Search in Google Scholar
60 Fuchs, T.; Hoffmann, R.; Niesen, T.; Tew, H.; Bill, J.; Aldinger, F.: J. Mater. Chem., in press.Search in Google Scholar
61 Andrés-Vergés, M.; Mifsud, A.; Serna, C.J.: J. Chem. Soc. Faraday Trans. 86 (1990) 959.10.1039/FT9908600959Search in Google Scholar
62 Ito, K.; Nakamura, K.: Thin Solid Films 286 (1996) 35.10.1016/S0040-6090(96)08856-6Search in Google Scholar
63 Saeed, T.; O’Brien, P.: Thin Solid Films 271 (1995) 35.10.1016/0040-6090(95)06826-0Search in Google Scholar
64 Öner, M.; Norwig, J.; Meyer, W.H.; Wegner, G.: Chem. Mater. 10 (1998) 460.10.1021/cm970450zSearch in Google Scholar
© 2002 Carl Hanser Verlag, München
Articles in the same Issue
- Frontmatter
- Editorial
- Editorial
- Max-Planck-Institut für Metallforschung
- Articles/Aufsätze
- Towards a micromechanical understanding of biological surface devices
- Solid state phase transformation kinetics: a modular transformation model
- Electronic structure investigations of Ni and Cr films on (100)SrTiO3 substrates using electron energy-loss spectroscopy
- Surface magnetization reversal of sputtered CrO2
- Magnetic imaging with full-field soft X-ray microscopy
- Dislocation dynamics in sub-micron confinement: recent progress in Cu thin film plasticity
- Fatigue behavior of polycrystalline thin copper films
- Grain growth in magnetron-sputtered nickel films
- Thin Pd films on SrTiO3 (001) substrates: ab initio local-density-functional theory
- Coupled grain boundary and surface diffusion in a polycrystalline thin film constrained by substrate
- Gallium segregation at grain boundaries in aluminium
- Current work at the Stuttgart UHV diffusion bonding facility
- Bonding between Cu and α-Al2O3
- Compressive deformation of niobium sandwich-bonded to alumina
- SiO2-coated carbon nanotubes: theory and experiment
- Simulation of solidification structures of binary alloys
- Gaseous nitriding of iron-chromium alloys
- Deposition of ceramic materials from aqueous solution induced by organic templates
- Notifications/Mitteilungen
- Personen
- Books
- Information
- DGM Further Training
Articles in the same Issue
- Frontmatter
- Editorial
- Editorial
- Max-Planck-Institut für Metallforschung
- Articles/Aufsätze
- Towards a micromechanical understanding of biological surface devices
- Solid state phase transformation kinetics: a modular transformation model
- Electronic structure investigations of Ni and Cr films on (100)SrTiO3 substrates using electron energy-loss spectroscopy
- Surface magnetization reversal of sputtered CrO2
- Magnetic imaging with full-field soft X-ray microscopy
- Dislocation dynamics in sub-micron confinement: recent progress in Cu thin film plasticity
- Fatigue behavior of polycrystalline thin copper films
- Grain growth in magnetron-sputtered nickel films
- Thin Pd films on SrTiO3 (001) substrates: ab initio local-density-functional theory
- Coupled grain boundary and surface diffusion in a polycrystalline thin film constrained by substrate
- Gallium segregation at grain boundaries in aluminium
- Current work at the Stuttgart UHV diffusion bonding facility
- Bonding between Cu and α-Al2O3
- Compressive deformation of niobium sandwich-bonded to alumina
- SiO2-coated carbon nanotubes: theory and experiment
- Simulation of solidification structures of binary alloys
- Gaseous nitriding of iron-chromium alloys
- Deposition of ceramic materials from aqueous solution induced by organic templates
- Notifications/Mitteilungen
- Personen
- Books
- Information
- DGM Further Training