Grain growth in magnetron-sputtered nickel films
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T. Wagner
und
D. Müller
Abstract
Grain growth and texture development of magnetron-sputtered Ni films on thermally oxidized Si wafers were investigated as a function of sputtering and annealing atmospheres. Ni films of 1 μm thickness were sputtered in either pure Ar or an Ar–H2 gas mixture and subsequently annealed in high vacuum or a hydrogen atmosphere at 800 °C. The films were characterized by focused ion-beam microscopy and X-ray diffraction. The Ni films had a strong {111} texture after sputtering. Films sputtered in an Ar–H2 mixture and annealed in H2 underwent abnormal grain growth, resulting in a {100} texture. These films had a mean grain diameter of about 50 mm. The unusual abnormal grain growth is believed to be caused by a cleaning of the Ni films during sputtering and annealing in H2.
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© 2002 Carl Hanser Verlag, München
Artikel in diesem Heft
- Frontmatter
- Editorial
- Editorial
- Max-Planck-Institut für Metallforschung
- Articles/Aufsätze
- Towards a micromechanical understanding of biological surface devices
- Solid state phase transformation kinetics: a modular transformation model
- Electronic structure investigations of Ni and Cr films on (100)SrTiO3 substrates using electron energy-loss spectroscopy
- Surface magnetization reversal of sputtered CrO2
- Magnetic imaging with full-field soft X-ray microscopy
- Dislocation dynamics in sub-micron confinement: recent progress in Cu thin film plasticity
- Fatigue behavior of polycrystalline thin copper films
- Grain growth in magnetron-sputtered nickel films
- Thin Pd films on SrTiO3 (001) substrates: ab initio local-density-functional theory
- Coupled grain boundary and surface diffusion in a polycrystalline thin film constrained by substrate
- Gallium segregation at grain boundaries in aluminium
- Current work at the Stuttgart UHV diffusion bonding facility
- Bonding between Cu and α-Al2O3
- Compressive deformation of niobium sandwich-bonded to alumina
- SiO2-coated carbon nanotubes: theory and experiment
- Simulation of solidification structures of binary alloys
- Gaseous nitriding of iron-chromium alloys
- Deposition of ceramic materials from aqueous solution induced by organic templates
- Notifications/Mitteilungen
- Personen
- Books
- Information
- DGM Further Training
Artikel in diesem Heft
- Frontmatter
- Editorial
- Editorial
- Max-Planck-Institut für Metallforschung
- Articles/Aufsätze
- Towards a micromechanical understanding of biological surface devices
- Solid state phase transformation kinetics: a modular transformation model
- Electronic structure investigations of Ni and Cr films on (100)SrTiO3 substrates using electron energy-loss spectroscopy
- Surface magnetization reversal of sputtered CrO2
- Magnetic imaging with full-field soft X-ray microscopy
- Dislocation dynamics in sub-micron confinement: recent progress in Cu thin film plasticity
- Fatigue behavior of polycrystalline thin copper films
- Grain growth in magnetron-sputtered nickel films
- Thin Pd films on SrTiO3 (001) substrates: ab initio local-density-functional theory
- Coupled grain boundary and surface diffusion in a polycrystalline thin film constrained by substrate
- Gallium segregation at grain boundaries in aluminium
- Current work at the Stuttgart UHV diffusion bonding facility
- Bonding between Cu and α-Al2O3
- Compressive deformation of niobium sandwich-bonded to alumina
- SiO2-coated carbon nanotubes: theory and experiment
- Simulation of solidification structures of binary alloys
- Gaseous nitriding of iron-chromium alloys
- Deposition of ceramic materials from aqueous solution induced by organic templates
- Notifications/Mitteilungen
- Personen
- Books
- Information
- DGM Further Training
