Combinatorial Methods for Advanced Materials Research & Development
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R. Cremer
,
S. Dondorf
Abstract
The applicability of combinatorial methods in developing advanced materials is illustrated presenting four examples for the deposition and characterization of one- and two-dimensionally laterally graded coatings, which were deposited by means of (reactive) magnetron sputtering and plasma- enhanced chemical vapor deposition. To emphasize the advantages of combinatorial approaches, metastable hard coatings like (Ti,Al)N and (Ti,Al,Hf)N respectively, as well as Ge–Sb–Te based films for rewritable optical data storage were investigated with respect to the relations between structure, composition, and the desired materials properties.
Abstract
Die Anwendbarkeit kombinatorischer Methoden für die Entwicklung fortschrittlicher Werkstoffe wird an vier Beispielen zur Abscheidung und Charakterisierung ein- und zweidimensional gradierter Schichten verdeutlicht. Hierbei erfolgte die Abscheidung der Schichten sowohl mittels (reaktivem) Magnetronsputtern als auch mittels plasmaunterstützter chemischer Gasphasenabscheidung. Um die Vorteile kombinatorischer Ansätze herauszustellen, wurden anhand metastabiler Hartstoffschichten wie (Ti,Al)N bzw. (Ti,Al,Hf)N sowie Ge–Sb–Te-Schichten für wiederbeschreibbare optische Datenspeicher die Zusammenhänge zwischen Struktur, Zusammensetzung und gewünschten Materialeigenschaften, wie z. B. Oxidationsbeständigkeit, Härte oder Phasenumwandlungsgeschwindigkeit, untersucht.
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The authors gratefully acknowledge the financial support granted by the Deutsche Forschungsgemeinschaft (DFG) within the Collaborative Research Center 289 and under contract no. Ne 351/22-1. In addition, the authors would like to thank the Institut für Halbleitertechnik II, RWTH Aachen, for the phase change measurements.
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© 2001 Carl Hanser Verlag, München
Artikel in diesem Heft
- Frontmatter
- Editorial
- Dieter Neuschütz 65 Years
- Aufsätze/Articles
- Combinatorial Methods for Advanced Materials Research & Development
- Chemische Gasphasenabscheidung von SiC und SiC + Si auf Kohlenstoffsubstraten und ihre chemische Oberflächenmodifizierung
- Fabrication and Characterization of Hydrogen Absorption LaNi5 Alloy Films Sputtered on Nickel Substrate
- On the Importance of Gas Phase Chemistry in Two CVD Systems: Deposition of Silicon and Diamond
- Thermodynamic Prediction of Metastable Coating Structures in PVD Processes
- Setting Kinetic Controls for Complex Equilibrium Calculations
- Modeling of the Thermochemical Properties of Multicomponent Oxide Melts
- Subsolidus Phase Relationships of the β–Sialon Solid Solution in the Oxygen-Rich Part of the Nd–Si–Al–O–N System
- Investigation of Microstructure and Chemical Stability in Composites of NiAl Reinforced by Alumina-Silica Fibers
- Gesicherte Interpretationen der FTIR-Reflexionsspektren von SiC–CVD-Schichten durch Spektrensimulation
- Characterization of Cohesion, Adhesion and Creep-Properties of Dynamically Loaded Coatings through the Impact Tester
- Peculiarities of Diffusion Controlled Phase Formation in the Al–Co System
- Mitteilungen/Notifications
- Personen
- Bücher/Books
- Tagungen
Artikel in diesem Heft
- Frontmatter
- Editorial
- Dieter Neuschütz 65 Years
- Aufsätze/Articles
- Combinatorial Methods for Advanced Materials Research & Development
- Chemische Gasphasenabscheidung von SiC und SiC + Si auf Kohlenstoffsubstraten und ihre chemische Oberflächenmodifizierung
- Fabrication and Characterization of Hydrogen Absorption LaNi5 Alloy Films Sputtered on Nickel Substrate
- On the Importance of Gas Phase Chemistry in Two CVD Systems: Deposition of Silicon and Diamond
- Thermodynamic Prediction of Metastable Coating Structures in PVD Processes
- Setting Kinetic Controls for Complex Equilibrium Calculations
- Modeling of the Thermochemical Properties of Multicomponent Oxide Melts
- Subsolidus Phase Relationships of the β–Sialon Solid Solution in the Oxygen-Rich Part of the Nd–Si–Al–O–N System
- Investigation of Microstructure and Chemical Stability in Composites of NiAl Reinforced by Alumina-Silica Fibers
- Gesicherte Interpretationen der FTIR-Reflexionsspektren von SiC–CVD-Schichten durch Spektrensimulation
- Characterization of Cohesion, Adhesion and Creep-Properties of Dynamically Loaded Coatings through the Impact Tester
- Peculiarities of Diffusion Controlled Phase Formation in the Al–Co System
- Mitteilungen/Notifications
- Personen
- Bücher/Books
- Tagungen
