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Gesicherte Interpretationen der FTIR-Reflexionsspektren von SiC–CVD-Schichten durch Spektrensimulation

  • Wulf Grählert EMAIL logo and Volkmar Hopfe
Published/Copyright: January 13, 2022
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International Journal of Materials Research
From the journal International Journal of Materials Research Volume 92 Issue 10

Abstract

Anhand des Schichtsystems SiC auf Graphit, hergestellt durch ein Chemical-vapour-deposition (CVD) Verfahren, wurde die Anwendung der Fourier-Transform-Infrarot (FTIR)-Reflexionsspektroskopie als zerstörungsfreie Methode zur Probencharakterisierung demonstriert. Dabei zeigte sich, dass neben den in der Probe enthaltenen Materialien die Topologie des Schichtsystems maßgeblich die Reflexionsspektren beeinflusst und eine herkömmliche Spektreninterpretation sogar unmöglich macht. Spektrensimulationen auf Basis eines die Probe adäquat beschreibenden optischenModells ermöglichen es, aus den gemessenen Reflexionsspektren Informationen über Schichtzusammensetzung und Probenaufbau zu gewinnen. Dabei wurde die Interface-Rauheit im optischen Modell durch Effektiv-Medien-Modelle beschrieben.

Abstract

Infrared reflection spectroscopy as non-destructive characterization method has been applied for the interpretation of SiC coatings deposited by chemical vapour deposition (CVD). Additional spectral features caused by sample topology make worse a conventional interpretation of the reflectance spectra. Simulation calculations using an adequate optical model allow the separation of the absorption properties of coating and the topology of the sample. Thereby, the surface roughness of SiC coatings have been considered in the optical model using an effective media approximation.

Keywords: FTIR reflectance spectroscopy; Silicon carbide; Optical modelling; Surface roughness; Effective media approximation
Wulf Grählert Fraunhofer Institut für Werkstoff- und Strahltechnik Winterbergstr. 28, D-01277 Dresden, Germany Fax: +49 351 2583 300

Dedicated to Professor Dr.-Ing. Dieter Neuschütz on the occasion of his 65th birthday

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Received: 2001-05-23
Published Online: 2022-01-13

© 2001 Carl Hanser Verlag, München

Articles in the same Issue

  1. Frontmatter
  2. Editorial
  3. Dieter Neuschütz 65 Years
  4. Aufsätze/Articles
  5. Combinatorial Methods for Advanced Materials Research & Development
  6. Chemische Gasphasenabscheidung von SiC und SiC + Si auf Kohlenstoffsubstraten und ihre chemische Oberflächenmodifizierung
  7. Fabrication and Characterization of Hydrogen Absorption LaNi5 Alloy Films Sputtered on Nickel Substrate
  8. On the Importance of Gas Phase Chemistry in Two CVD Systems: Deposition of Silicon and Diamond
  9. Thermodynamic Prediction of Metastable Coating Structures in PVD Processes
  10. Setting Kinetic Controls for Complex Equilibrium Calculations
  11. Modeling of the Thermochemical Properties of Multicomponent Oxide Melts
  12. Subsolidus Phase Relationships of the β–Sialon Solid Solution in the Oxygen-Rich Part of the Nd–Si–Al–O–N System
  13. Investigation of Microstructure and Chemical Stability in Composites of NiAl Reinforced by Alumina-Silica Fibers
  14. Gesicherte Interpretationen der FTIR-Reflexionsspektren von SiC–CVD-Schichten durch Spektrensimulation
  15. Characterization of Cohesion, Adhesion and Creep-Properties of Dynamically Loaded Coatings through the Impact Tester
  16. Peculiarities of Diffusion Controlled Phase Formation in the Al–Co System
  17. Mitteilungen/Notifications
  18. Personen
  19. Bücher/Books
  20. Tagungen
https://doi.org/10.3139/ijmr-2001-0214
Keywords for this article
FTIR reflectance spectroscopy; Silicon carbide; Optical modelling; Surface roughness; Effective media approximation

Articles in the same Issue

  1. Frontmatter
  2. Editorial
  3. Dieter Neuschütz 65 Years
  4. Aufsätze/Articles
  5. Combinatorial Methods for Advanced Materials Research & Development
  6. Chemische Gasphasenabscheidung von SiC und SiC + Si auf Kohlenstoffsubstraten und ihre chemische Oberflächenmodifizierung
  7. Fabrication and Characterization of Hydrogen Absorption LaNi5 Alloy Films Sputtered on Nickel Substrate
  8. On the Importance of Gas Phase Chemistry in Two CVD Systems: Deposition of Silicon and Diamond
  9. Thermodynamic Prediction of Metastable Coating Structures in PVD Processes
  10. Setting Kinetic Controls for Complex Equilibrium Calculations
  11. Modeling of the Thermochemical Properties of Multicomponent Oxide Melts
  12. Subsolidus Phase Relationships of the β–Sialon Solid Solution in the Oxygen-Rich Part of the Nd–Si–Al–O–N System
  13. Investigation of Microstructure and Chemical Stability in Composites of NiAl Reinforced by Alumina-Silica Fibers
  14. Gesicherte Interpretationen der FTIR-Reflexionsspektren von SiC–CVD-Schichten durch Spektrensimulation
  15. Characterization of Cohesion, Adhesion and Creep-Properties of Dynamically Loaded Coatings through the Impact Tester
  16. Peculiarities of Diffusion Controlled Phase Formation in the Al–Co System
  17. Mitteilungen/Notifications
  18. Personen
  19. Bücher/Books
  20. Tagungen
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