Startseite Structure, properties and applications of diamond-like carbon coatings prepared by reactive magnetron sputtering
Artikel
Lizenziert
Nicht lizenziert Erfordert eine Authentifizierung

Structure, properties and applications of diamond-like carbon coatings prepared by reactive magnetron sputtering

  • Klaus Bewilogua EMAIL logo , Jochen Brand , Helge Thomsen , Martin Weber und Ralf Wittorf
Veröffentlicht/Copyright: 16. Februar 2022
Veröffentlichen auch Sie bei De Gruyter Brill
Informationen für Autor*innen
International Journal of Materials Research
Aus der Zeitschrift International Journal of Materials Research Band 96 Heft 9

Abstract

Metal containing and metal free amorphous diamond-like carbon films were prepared by reactive magnetron sputter deposition using targets from transition metals or graphite and acetylene as reactive gas. Both types of coating materials are well known for their low friction coefficients. However, metal containing films exhibit clearly lower wear resistances and lower hardness values than metal free films. To study the differences between both materials, tungsten containing and metal free coatings were compared. The deposition experiments were carried out in an industrial scale d.c. magnetron sputter machine. Transmission electron microscopy, secondary ion mass spectroscopy, and Raman spectroscopy as well as hardness measurements and wear tests were performed to characterize and to compare composition, structure, mechanical, and tribological properties of both coating materials.

Keywords: Sputter deposition; Diamond-like carbon; Hardness; Wear; Friction
Dr. Klaus Bewilogua Fraunhofer-Institut für Schicht- und Oberflächentechnik Bienroder Weg 54E, D-38108 Braunschweig, Germany Tel.: +49 531 2155 642 Fax: +49 531 2155 900

Dedicated to Professor Dr. Dr. h. c. Klaus Wetzig on the occasion of his 65th birthday

References

[1] C. Donnet: Surf. Coat. Technol. 80 (1996) 151.10.1016/0257-8972(95)02702-5Suche in Google Scholar

[2] C.-P. Klages, R. Memming: Mater. Sci. Forum 52–53 (1989) 609.10.4028/www.scientific.net/MSF.52-53.609Suche in Google Scholar

[3] A. Matthews, S.S. Eskildsen: Diamond Relat. Mater. 3 (1994) 902.10.1016/0925-9635(94)90297-6Suche in Google Scholar

[4] Th. Lampe, S. Eisenberg, E. Rodriguez Caebo: Surf. Coat. Technol. 174–175 (2003) 1.10.1016/S0257-8972(03)00473-0Suche in Google Scholar

[5] V. Derflinger, H. Brändle, H. Zimmermann: Surf. Coat. Technol. 113 (1999) 286.10.1016/S0257-8972(99)00004-3Suche in Google Scholar

[6] K. Taube: Surf. Coat. Technol. 98 (1998) 976.10.1016/S0257-8972(97)00178-3Suche in Google Scholar

[7] C. Donnet, A.Erdemir: Surf. Coat. Technol. 180–181 (2004) 76.10.1016/j.surfcoat.2003.10.022Suche in Google Scholar

[8] A. Hieke, K. Bewilogua, K. Taube, I. Bialuch, K. Weigel, in: SVC 43rd Annual Technical Conference Proceedings, Denver, CO, 2000, Published by Society of Vacuum Coaters (2000) 301.Suche in Google Scholar

[9] C. Strondl, G.J. van der Kolk, T. Hurkmans, W. Fleischer, T. Trinh, N.M. Carvalho, J.Th.M. de Hosson: Surf. Coat. Technol. 142–144 (2001) 707.10.1016/S0257-8972(01)01179-3Suche in Google Scholar

[10] M. Hans, R. Büchel, M. Grischke, R. Hobi, M. Zäch: Surf. Coat. Technol. 123 (2000) 288.10.1016/S0257-8972(99)00477-6Suche in Google Scholar

[11] K. Bewilogua, C.V. Cooper, C. Specht, J. Schröder, R. Wittorf, M. Grischke: Surf. Coat. Technol. 127 (2000) 224.10.1016/S0257-8972(00)00666-6Suche in Google Scholar

[12] K. Bewilogua, R. Wittorf, H. Thomsen, M. Weber: Thin Solid Films 447–448 (2004) 142.10.1016/S0040-6090(03)01088-5Suche in Google Scholar

[13] H. Dimigen, C.-P. Klages: Surf. Coat. Technol. 49 (1991) 543.10.1016/0257-8972(91)90114-CSuche in Google Scholar

[14] X.L. Peng, T.W. Clyne: Thin Solid Films 312 (1998) 207.10.1016/S0040-6090(97)00588-9Suche in Google Scholar

[15] M. Grischke, K. Bewilogua, K. Trojan, H. Dimigen: Surf. Coat. Technol. 74–75 (1995) 739.10.1016/0257-8972(94)08201-4Suche in Google Scholar

[16] B. Window: Surf. Coat. Technol. 81 (1996) 92.10.1016/0257-8972(95)02620-7Suche in Google Scholar

[17] P. Willich, R. Bethke: Secondary Ion Mass Spectroscopy SIMS X, (Eds. A. Benninghoven et al.), John Wiley, Chichester, 1997, p. 609.Suche in Google Scholar

[18] T. Michler, C. Siebert: Surf. Coat. Technol. 163 –164 (2003) 546.10.1016/S0257-8972(02)00620-5Suche in Google Scholar

[19] L.E. Toth: Transition Metal Carbides and Nitrides, Academic Press, New York (1971) 71.Suche in Google Scholar

[20] K. Bewilogua, H.-J. Heinitz, B. Rau, S. Schulze: Thin Solid Films 167 (1988) 233.10.1016/0040-6090(88)90500-7Suche in Google Scholar

[21] G. Berg, C. Friedrich, E. Broszeit, C. Berger, in: R. Riedel (Ed.), Handbook of Ceramic Hard Materials, Vol. 2, Wiley-VCH, Weinheim (2000) 965.10.1002/9783527618217.ch24Suche in Google Scholar

[22] J. Robertson: J. Non-Cryst. Solids 137–138 (1991) 825.10.1016/S0022-3093(05)80247-9Suche in Google Scholar

[23] M. Wutz, H. Adam, W. Walcher: Theorie und Praxis der Vakuumtechnik, Vieweg-Verlag, Braunschweig (1992) 292.10.1007/978-3-322-87814-4Suche in Google Scholar

[24] K.I. Schiffmann, M. Fryda, G. Goerigk, R. Lauer, P. Hinze, A. Bulack: Thin Solid Films 347 (1999) 60.10.1016/S0040-6090(98)01607-1Suche in Google Scholar

[25] T. Zehnder, J. Patscheider: Surf. Coat. Technol. 133 –134 (2000) 138.10.1016/S0257-8972(00)00888-4Suche in Google Scholar

[26] R. Hauert, J. Patscheider: Adv. Eng. Mater. 2 (2000) 247.10.1002/(SICI)1527-2648(200005)2:5<247::AID-ADEM247>3.0.CO;2-USuche in Google Scholar

[27] A. Leonhardt, H. Liepack, K. Bartsch: Surf. Coat. Technol. 133 – 134 (2000) 186.10.1016/S0257-8972(00)00962-2Suche in Google Scholar

[28] D.P. Monaghan, D.G. Teer, P.A. Logan, I. Efeoglu, R.D. Arnell: Surf. Coat. Technol. 60 (1993) 525.10.1016/0257-8972(93)90146-FSuche in Google Scholar

[29] J.C. Jiang, W.C. Meng, A.G. Evans, C.V. Cooper: Surf. Coat. Technol. 176 (2003) 50.10.1016/S0257-8972(03)00445-6Suche in Google Scholar

[30] M. Weber, K. Bewilogua, H. Thomsen, R. Wittorf: Surf. Coat. Technol. (subm.)Suche in Google Scholar
Received: 2005-03-01
Accepted: 2005-06-22
Published Online: 2022-02-16

© 2005 Carl Hanser Verlag, München

Artikel in diesem Heft

  1. Frontmatter
  2. Kösterpreis
  3. Award/Preisverleihung
  4. Editorial
  5. Editorial
  6. Articles Basic
  7. Effect of interface strength on electromigration-induced inlaid copper interconnect degradation: Experiment and simulation
  8. Application of factor analysis in electron spectrometry (AES, XPS) for materials science
  9. Focussing and defocussing effects at radio frequency glow discharge optical emission spectroscopy analyses of thin films with partly nonconductive components
  10. Semi-flexible star-shaped molecules: conformational analysis of nano-segregated mesogens forming columnar liquid-crystal phases
  11. Articles Applied
  12. Structure, properties and applications of diamond-like carbon coatings prepared by reactive magnetron sputtering
  13. Local texture and back-end defect in hot extruded AZ91 magnesium alloy
  14. A comparison of thermal stability in nanocrystalline Ni- and Co-based materials
  15. Microstructure and phase formation of Heusler thin film compounds
  16. Correlation between the average composition of coherent superlattice and the GMR properties of electrodeposited Co–Cu/Cu multilayers
  17. Articles Basic
  18. Towards a description of complex pearlite structures
  19. Modeling of axial strain in free-end torsion of textured copper
  20. Vacancies in plastically deformed copper
  21. An analytic and generalized formulation of the sin2 ψ-method
  22. Nanoindentation applied on a tungsten–copper composite before and after high-pressure torsion
  23. Articles Applied
  24. The local deformation behaviour of MMCs – an experimental study
  25. X-ray elastic constants determined by the combination of sin2 ψ and substrate-curvature methods
  26. Combining complementary techniques to study precipitates in steels
  27. Precipitation hardening in Mg–Zn–Sn alloys with minor additions of Ca and Si
  28. Notifications/Mitteilungen
  29. Personal
https://doi.org/10.1515/ijmr-2005-0173
Schlagwörter für diesen Artikel
Sputter deposition; Diamond-like carbon; Hardness; Wear; Friction

Artikel in diesem Heft

  1. Frontmatter
  2. Kösterpreis
  3. Award/Preisverleihung
  4. Editorial
  5. Editorial
  6. Articles Basic
  7. Effect of interface strength on electromigration-induced inlaid copper interconnect degradation: Experiment and simulation
  8. Application of factor analysis in electron spectrometry (AES, XPS) for materials science
  9. Focussing and defocussing effects at radio frequency glow discharge optical emission spectroscopy analyses of thin films with partly nonconductive components
  10. Semi-flexible star-shaped molecules: conformational analysis of nano-segregated mesogens forming columnar liquid-crystal phases
  11. Articles Applied
  12. Structure, properties and applications of diamond-like carbon coatings prepared by reactive magnetron sputtering
  13. Local texture and back-end defect in hot extruded AZ91 magnesium alloy
  14. A comparison of thermal stability in nanocrystalline Ni- and Co-based materials
  15. Microstructure and phase formation of Heusler thin film compounds
  16. Correlation between the average composition of coherent superlattice and the GMR properties of electrodeposited Co–Cu/Cu multilayers
  17. Articles Basic
  18. Towards a description of complex pearlite structures
  19. Modeling of axial strain in free-end torsion of textured copper
  20. Vacancies in plastically deformed copper
  21. An analytic and generalized formulation of the sin2 ψ-method
  22. Nanoindentation applied on a tungsten–copper composite before and after high-pressure torsion
  23. Articles Applied
  24. The local deformation behaviour of MMCs – an experimental study
  25. X-ray elastic constants determined by the combination of sin2 ψ and substrate-curvature methods
  26. Combining complementary techniques to study precipitates in steels
  27. Precipitation hardening in Mg–Zn–Sn alloys with minor additions of Ca and Si
  28. Notifications/Mitteilungen
  29. Personal
Jetzt anmelden und 20% sparen
Institutioneller Zugang
Wie funktioniert Authentifizierung?
Haben Sie eine Idee, wie wir unsere Website verbessern können?
Bitte schreiben Sie uns.
© 2025 De Gruyter Brill
Heruntergeladen am 24.9.2025 von https://www.degruyterbrill.com/document/doi/10.1515/ijmr-2005-0173/html
Button zum nach oben scrollen