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Nanoindentation responses of Si–Ge multilayers

  • Derming Lian
Published/Copyright: February 7, 2014
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International Journal of Materials Research
From the journal International Journal of Materials Research Volume 105 Issue 2

Abstract

In this study, we employed the nanoindentation technique to evaluate the pop-in events of Si–Ge multilayers under extra-low forces. X-ray diffraction revealed a shift of the peaks of the Ge atoms from 68.70 to 68.50°, due to gradual mixing of previously isolated Si and Ge atoms into an SiGe compound, upon increasing the annealing temperature. Atomic force microscopy images of the vicinity near the triangular indentation mark revealed that the primarily plastic deformation, the pop-in event observed in the load–displacement curve, was based on slightly active dislocation nucleation and propagation during treatment with the artificial indenter. The samples annealed at RT, 400, 500, and 600°C exhibited hardnesses (H) of 18.6 ± 1.2, 17.9 ± 1.1, 18.9 ± 1.2, and 15.0 ± 0.8 GPa, respectively, and elastic moduli (E) of 220.0 ± 5.2, 224.9 ± 5.4, 220.7 ± 4.5, and 186.7 ± 3.8 GPa, respectively. These values reveal that elastic/plastic contact translation of the Si–Ge multilayer occurred to various extents depending upon the annealing conditions; in addition, the values of hf/hmax for the samples annealed at RT, 400, 500, and 600°C were 0.449, 0.416, 0.412, and 0.470, respectively. In a crystal structure, release of the indentation load reflects the directly compressed volume; the total penetration depth into the film was approximately 30 nm with a peak load of 500 μN. Accordingly, the annealed samples can exhibit pop-in after indentation earlier than samples treated merely at RT.

Keywords: Thin films; Vapor deposition; Crystal structure
* Correspondence address, Dr. Derming Lian, No. 57, Sec. 2, Zhongshan Road, Taiping Dist., Taichung 41170, Taiwan (R.O.C.), Tel.: (+886)(4)23924505, Fax: (+886)(4)23930681, E-mail:

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Received: 2013-03-03
Accepted: 2013-07-29
Published Online: 2014-02-07
Published in Print: 2014-02-10

© 2014, Carl Hanser Verlag, München

Articles in the same Issue

  1. Contents
  2. Contents
  3. Original Contributions
  4. Experimental determination of a representative texture and insight into the range of significant neighboring grain interactions via orientation and misorientation statistics
  5. Methods of segregation analysis applied to simulated multicomponent multiphase microstructures
  6. Nanoindentation responses of Si–Ge multilayers
  7. Microstructural and thermodynamic investigations on friction stir welded Mg/Al-joints
  8. Ingot metallurgy and microstructural characterization of Ti–Ta alloys
  9. Microstructural evolution of aluminium–copper alloys during the downward directional solidification process
  10. Indium ion cementation onto aluminum plates in hydrochloric acid solutions: a kinetic perspective
  11. Development of Sn–Cu–Sb alloys for making lead- and bismuth-free pewter
  12. The effect of Sn addition and sulfide ion concentration on the corrosion behavior of Cu-35Zn in NaCl solution
  13. Synthesis and characteristics of precipitation hardened Cu–Cr alloy and multiply hardened Cu–Cr–Al2O3 nanocomposite obtained using powder metallurgy techniques
  14. Effect of rhenium addition on the strengthening of chromium–alumina composite materials
  15. Grain growth and sinterability in Er2O3-doped cubic zirconia (c-ZrO2)
  16. Short Communications
  17. Properties of aluminium coatings produced using manual and robotized flame spraying processes
  18. DGM News
  19. DGM News
https://doi.org/10.3139/146.111001
Keywords for this article
Thin films; Vapor deposition; Crystal structure

Articles in the same Issue

  1. Contents
  2. Contents
  3. Original Contributions
  4. Experimental determination of a representative texture and insight into the range of significant neighboring grain interactions via orientation and misorientation statistics
  5. Methods of segregation analysis applied to simulated multicomponent multiphase microstructures
  6. Nanoindentation responses of Si–Ge multilayers
  7. Microstructural and thermodynamic investigations on friction stir welded Mg/Al-joints
  8. Ingot metallurgy and microstructural characterization of Ti–Ta alloys
  9. Microstructural evolution of aluminium–copper alloys during the downward directional solidification process
  10. Indium ion cementation onto aluminum plates in hydrochloric acid solutions: a kinetic perspective
  11. Development of Sn–Cu–Sb alloys for making lead- and bismuth-free pewter
  12. The effect of Sn addition and sulfide ion concentration on the corrosion behavior of Cu-35Zn in NaCl solution
  13. Synthesis and characteristics of precipitation hardened Cu–Cr alloy and multiply hardened Cu–Cr–Al2O3 nanocomposite obtained using powder metallurgy techniques
  14. Effect of rhenium addition on the strengthening of chromium–alumina composite materials
  15. Grain growth and sinterability in Er2O3-doped cubic zirconia (c-ZrO2)
  16. Short Communications
  17. Properties of aluminium coatings produced using manual and robotized flame spraying processes
  18. DGM News
  19. DGM News
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