Startseite Morphological study of SiC coating developed on 2D carbon composites using MTS precursor in a hot-wall vertical reactor
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Morphological study of SiC coating developed on 2D carbon composites using MTS precursor in a hot-wall vertical reactor

  • Ramani Venugopalan , Jyoti Prakash , Jitendra Nuwad , Chirakarumpil Gopalan Sivan Pillai , Avesh Kumar Tyagi und Sathiyamoorthy Dakshinamoorthy
Veröffentlicht/Copyright: 11. Juni 2013
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International Journal of Materials Research
Aus der Zeitschrift International Journal of Materials Research Band 103 Heft 10

Abstract

Silicon carbide coating was developed using chemical vapor deposition on carbon substrate as a protective coating. The present studies were carried out with methyl trichlorosilane as the SiC precursor, at 1673 K along with hydrogen and argon as carrier gas using a high-temperature vertical graphite reactor. The SiC coatings were characterized by means of X-ray diffraction for phase identification. Scanning electron microscopy analysis with energy dispersive X-ray spectrometer was also carried out for microstructure and elemental analysis. From the morphological study of different SiC deposits obtained at varying operating parameters it was observed that methyl trichlorosilane feed rate and hydrogen flow rate play a major role in deciding the nature of deposits and the argon percentage in the mixed gas also plays a vital role.

Keywords: Organometallic CVD; Silicon carbide; Coating; Microstructure; Methyl tichlorosilane
1 Correspondence address: Dr. Ramani Venugopalan, Powder Metallurgy Division, Bhabha Atomic Research Centre, Trombay-400085India, Tel.: +91-22-25590499, Fax: +91-22-25505151/27840032, E-mail:

Refrences

[1]J.D.Buckley: Ceram. Bull.67 (1988) 364.10.1007/BF01201973Suche in Google Scholar

[2]J.E.Sheehan: Ann. Rev. Mater. Sci.24 (1994) 19. 10.1146/annurev.ms.24.080194.000315Suche in Google Scholar

[3]M.E.Westwood, J.D.Webster, R.J.Day, F.H.Hayes, R.Taylor: J. Mat. Sci.31 (1996) 1389. 10.1007/BF00357844Suche in Google Scholar

[4]H.Fritze, J.Jojie, T.Witke, C.Ruscher, S.Weber, S.Scherrer: J. Eur. Ceram. Soc.18 (1988) 2351. 10.1016/S0955-2219(98)00242-8Suche in Google Scholar

[5]F.Smeacetto, M.Ferraris: Carbon40 (2002) 583. 10.1016/S0008-6223(01)00151-8Suche in Google Scholar

[6]R.Bruetsch: Thin Solid Films126 (1983) 313. 10.1016/0040-6090(85)90326-8Suche in Google Scholar

[7]A.Ravesh, A.Inspektor, U.Carmi, R.Auni: J. Vac. Sci. Technol. A5 (1987) 2836. 10.1116/1.574317Suche in Google Scholar

[8]C.A.A.Cairo, M.L.A.Gracca, C.R.M.Silva, J.C.Bressiani: J. Eur. Ceram. Soc.21 (2001) 325. 10.1016/S0955-2219(00)00191-6Suche in Google Scholar

[9]L.F.Cheng, Y.D.Xu, L.T.Zhang: Carbon38 (2000) 1493. 10.1016/S0008-6223(00)00086-5Suche in Google Scholar

[10]S.Lloyd, N.Avery, M.Pal: Carbon39 (2001) 991. 10.1016/S0008-6223(00)00200-1Suche in Google Scholar

[11]A.Ordine, C.A.Achete, O.R.Mattosa, I.C.P.Margaret, S.S.CamargoJr., T.Hirsch: Surf. Coat. Technol.133–134 (2000) 583. 10.1016/S0257-8972(00)00976-2Suche in Google Scholar

[12]S.K.Gong, H.B.Xu, Q.H.Yu, C.G.Zhou: Surf. Coat. Technol.130 (2000) 128. 10.1016/S0257-8972(00)00694-0Suche in Google Scholar

[13]K.L.Choy: Prog. Mater. Sci.48 (2003) 57. 10.1016/S0079-6425(01)00009-3Suche in Google Scholar

[14]W.G.Zhang, K.J.Huttinger: Chem. Vap. Deposition13 (2001) 167. 10.1002/1521-3862(200107)7:4<167::AID-CVDE167>3.0.CO;2-LSuche in Google Scholar

[15]Y.J.Lee, D.J.Choi, S.S.Kim, H.L.Lee, H.D.Kim: Surf. Coat. Technol.177–178 (2004) 415. 10.1016/j.surfcoat.2003.09.018Suche in Google Scholar

[16]A.K.Costa, S.S.CamargoJr., C.A.Achete, R.Carius: Thin Solid Films243 (2000) 377–378.Suche in Google Scholar

[17]D.N.Lee: J. Mater. Sci.24 (1989) 4375. 10.1007/BF00544515Suche in Google Scholar

[18]D.J.Ching, W.J.Shyy, D.H.Kuo and M.H.Hon: J. Electrochem. Soc.134 (1987) 3145. 10.1149/1.2100359Suche in Google Scholar

[19]T.M.Bessman, B.W.Sheldon, T.S.MossIII, M.D.Kaster: J. Am. Ceram. Soc.75 (1992) 2899. 10.1111/j.1151-2916.1992.tb05529.xSuche in Google Scholar

[20]D.Lespiaux, F.Langlias, R.Naslain, S.S.Schamm: J. Eur. Ceram. Soc.15 (1995) 81. 10.1016/0955-2219(95)91303-6Suche in Google Scholar

[21]S.Motojima, M.Hasegawa: Thin Solid Films186 (190) L39.10.1016/0040-6090(90)90154-6Suche in Google Scholar

Received: 2011-1-20
Accepted: 2012-2-8
Published Online: 2013-06-11
Published in Print: 2012-10-01

© 2012, Carl Hanser Verlag, Munich

Artikel in diesem Heft

  1. Contents
  2. Contents
  3. Original Contributions
  4. Phase equilibria in the Gd–Ni binary and Mg–Ni–Gd ternary systems
  5. Thermodynamics of dilute binary solid solutions using the cluster variation method
  6. Thermal stability of coherent Pd/TiAl interfaces studied from first-principles calculations and experiments
  7. Electropulsing-induced phase transformations and their effects on the single point diamond turning of a tempered alloy AZ91
  8. Study of the mechanism of ductile-regime grinding of SiCp/Al composites using finite element simulation
  9. Investigations on laser welding of magnesium alloys
  10. Investigation of the surface of a laser-treated cast iron cylinder bore
  11. Solidification behaviour of an AA5754 Al alloy ingot cast with high impurity content
  12. Study of the structural evolution of crystalline zinc oxide films prepared by PLD
  13. Effects of sintering temperature on pore characterization and strength of porous cordierite–mullite ceramics by a pore-forming in-situ technique
  14. Sol–gel synthesis of Eu3+, Tb3+ co-doped Y2O3 scintillating nanopowders
  15. Morphological study of SiC coating developed on 2D carbon composites using MTS precursor in a hot-wall vertical reactor
  16. Self-assembling behavior and corrosion inhibition properties of TDPA films on differently structured surfaces of 2024 and 1060 aluminum alloys
  17. Photocatalytic activity of MnWO4 powder in highly effective hydrogen generation from H2O and H2O2
  18. Rheology and microstructure of polymer-modified asphalt nanocomposites
  19. Short Communications
  20. Microstructure and phase composition in a die cast Mg–Nd alloy containing Zn and Zr
  21. DGM News
  22. DGM News
https://doi.org/10.3139/146.110759
Schlagwörter für diesen Artikel
Organometallic CVD; Silicon carbide; Coating; Microstructure; Methyl tichlorosilane

Artikel in diesem Heft

  1. Contents
  2. Contents
  3. Original Contributions
  4. Phase equilibria in the Gd–Ni binary and Mg–Ni–Gd ternary systems
  5. Thermodynamics of dilute binary solid solutions using the cluster variation method
  6. Thermal stability of coherent Pd/TiAl interfaces studied from first-principles calculations and experiments
  7. Electropulsing-induced phase transformations and their effects on the single point diamond turning of a tempered alloy AZ91
  8. Study of the mechanism of ductile-regime grinding of SiCp/Al composites using finite element simulation
  9. Investigations on laser welding of magnesium alloys
  10. Investigation of the surface of a laser-treated cast iron cylinder bore
  11. Solidification behaviour of an AA5754 Al alloy ingot cast with high impurity content
  12. Study of the structural evolution of crystalline zinc oxide films prepared by PLD
  13. Effects of sintering temperature on pore characterization and strength of porous cordierite–mullite ceramics by a pore-forming in-situ technique
  14. Sol–gel synthesis of Eu3+, Tb3+ co-doped Y2O3 scintillating nanopowders
  15. Morphological study of SiC coating developed on 2D carbon composites using MTS precursor in a hot-wall vertical reactor
  16. Self-assembling behavior and corrosion inhibition properties of TDPA films on differently structured surfaces of 2024 and 1060 aluminum alloys
  17. Photocatalytic activity of MnWO4 powder in highly effective hydrogen generation from H2O and H2O2
  18. Rheology and microstructure of polymer-modified asphalt nanocomposites
  19. Short Communications
  20. Microstructure and phase composition in a die cast Mg–Nd alloy containing Zn and Zr
  21. DGM News
  22. DGM News
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