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Kinetics of nanoscale structure development during Mg-vapour reduction of tantalum oxide

  • R. Müller , M. Bobeth , H. Brumm , G. Gille , W. Pompe und J. Thomas
Veröffentlicht/Copyright: 23. Mai 2013
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Abstract

Electron microscopic observations revealed the development of a complex interpenetrating morphology of magnesia and tantalum after magnesium-vapour reduction of tantalum oxide powder. In the early reaction stage, a nanoscale lamellar and rod-like morphology is found. This rather regular structure decomposes and coarsens during further annealing. By leaching of magnesia, nanoporous tantalum with large inner surface area is obtained. A possible growth mechanism for the observed initial cellular structure is proposed. A theoretical analysis aims at finding the optimum process parameters in order to prepare and to stabilise especially fine magnesiatantalum structures as a base for producing highly nanoporous tantalum for capacitor applications.


* Correspondence address, Dr. Manfred Bobeth, Institut für Werkstoffwissenschaft, Technische Universität Dresden, D-01062 Dresden, Germany, Tel.: +49 351 463 31418, Fax: +49 351 463 31422, E-mail:

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Received: 2007-5-15
Accepted: 2007-8-22
Published Online: 2013-05-23
Published in Print: 2007-11-01

© 2007, Carl Hanser Verlag, München

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