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Gold-enhanced oxidation of silicon nanowires

  • Peter Werner , Claudia C. Büttner , Luise Schubert , Gerhard Gerth , Nikolai D. Zakarov und Ulrich Gösele
Veröffentlicht/Copyright: 23. Mai 2013
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Abstract

Silicon nanowires are frequently grown involving a liquid gold droplet at their tips. Here we show that under certain circumstances the thermal oxidation of a silicon nanowire is drastically enhanced by the presence of this gold droplet. Such a gold-enhanced oxidation was observed in a temperature range from 1000 °C down to 250 °C. As a consequence, instead of the slow radial oxidation expected and desired for thinning the nanowires, a fast axial oxidation may occur catalyzed by the gold tip. This leads to a shrinking of the length of the Si nanowire and its replacement by a longer nanowire consisting of silicon dioxide. During this gold-enhanced oxidation process the gold droplet migrates from the tip to the base of the nanowire. Our experiments demonstrate that gold droplets lead to an enhanced dissolution of silicon during oxidation in the case that these remain in intimate contact with the Si nanowires.


* Correspondence address, Dr. Peter Werner MPI of Microstructure Physics Weinberg 2, D-06120 Halle (Saale), Germany Tel.: +49 345 558 2629 E-mail:

References

[1] S.K.Ghandhi, in: VLSI fabrication principles, John Wiley & Sons, New York1994.Suche in Google Scholar

[2] A.Hiraki, E.Logguijo, J.W.Mayer: J. Appl. Phys.43 (1972) 3643.Suche in Google Scholar

[3] B.E.Deal, A.S.J.Grove: J. Appl. Phys.36 (1965) 3770.Suche in Google Scholar

[4] A.Hiraki: Surface Science Reports3 (1984) 357.10.1016/0167-5729(84)90003-7Suche in Google Scholar

[5] G.Mathieu, R.Contini, J.M.Layet, P.Mathiez, S.Giorgio: J. Vac. Sci. Technol.6 (1988) 2904.Suche in Google Scholar

[6] Y.Cui, W.Qingqiao, P.Hongkun, Ch.M.Lieber: Sciences293 (2001) 1289.Suche in Google Scholar

[7] A.DeHon: IEEE Trans. Nanotechnology2 (2003) 23.10.1109/TNANO.2003.808508Suche in Google Scholar

[8] Ch.M.Lieber, J.Wang: issue 2 of MRS Bulletin32 (2007).10.1557/mrs2007.41Suche in Google Scholar

[9] Y.Y.Wu, H.Yan, H.W.Messer, J.H.Song, P.Yang: Chemistry-A8 (2002) 1261.10.3724/SP.J.1105.2010.09365Suche in Google Scholar

[10] T.B.Massalski, H.Okamoto (Eds.): Binary Alloy Phase Diagrams, ASM International (1990) p. 428.Suche in Google Scholar

[11] R.S.Wagner, W.C.Ellis: Appl. Phys. Lett.4 (1964) 89.10.1063/1.2927305Suche in Google Scholar

[12] E.I.Givargizov: Highly Anisotropic Crystals, Reidel, Dordrecht1987.10.1007/978-94-009-3709-3Suche in Google Scholar

[13] A.M.Morales, C.M.Lieber: Science279 (1998) 208.10.1080/09500340.2012.690051Suche in Google Scholar

[14] P.Werner, N.D.Zakharov, G.Gerth, L.Schubert, U.Gösele: Int. J. Mat. Res.97 (2006) 1008.Suche in Google Scholar

[15] L.H.Canham: Appl. Phys. Lett.57 (1990) 1046.10.1063/1.103561Suche in Google Scholar

[16] V.Lehmann, U.Gösele: Appl. Phys. Lett.58 (1991) 856.Suche in Google Scholar

[17] Y.Cui, L.J.Lauhon, M.S.Gudiksen, J.Wang, C.M.Lieber: Appl. Phys. Lett.78 (2001) 2214.10.1063/1.2929371Suche in Google Scholar

[18] H.I.Liu, D.K.Biegelsen, N.M.Johnson, F.A.Ponce, R.F.W.Pease: Appl. Phys. Lett.64 (1993) 1383.10.1063/1.3486016Suche in Google Scholar

[19] J.Westwater, D.P.Gosain, S.Tomiya, Y.Hirano, S.Usui: Mat. Res. Symp. Proc. Vol.452 (1997) 237.Suche in Google Scholar

[20] L.Schubert, P.Werner, N.D.Zakharov, G.Gerth, F.Kolb, L.Long, U.Gösele, T.Tan: Appl. Phys. Lett.84 (2004) 24.10.1063/1.97640Suche in Google Scholar

[21] S.K.Ghandi: VLS fabrication principles, Wiley, New York 1994.Suche in Google Scholar

[22] C.C.Büttner, M.Zacharias: Appl. Phys. Lett89 (2006) 263106.Suche in Google Scholar

Received: 2007-5-3
Accepted: 2007-8-2
Published Online: 2013-05-23
Published in Print: 2007-11-01

© 2007, Carl Hanser Verlag, München

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  2. Contents
  3. Editorial
  4. Professor Dr. phil. Dr. techn. e. h. Hellmut F. Fischmeister
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