Technique for measuring the residual strain in strained Si/SiGe MOSFET structures using Raman spectroscopy
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P. Dobrosz
,
S. H. Olsen
Abstract
A measurement technique for studying the strain in Si/SiGe layers has been developed based on Raman spectroscopy using a laser microprobe. The Si/SiGe layers were grown by ultra-low pressure chemical vapour deposition in a modified molecular beam epitaxy system. The structures consisted of a strained Si grown on relaxed Si1– xGex (x = 0.1, 0.15 . . . 0.35), where the Si channel thickness was varied between 5 and 10 nm. Raman spectroscopy using a 514 nm laser indicated a significant shift in the Si peak from the SiGe layer; the position of this peak is related to the strain in the layer and strongly depends on Ge content, decreasing with increasing Ge in the virtual substrate. However, the strained Si peak shows a considerable overlap with the Si in SiGe peak and is difficult to deconvolute by conventional peak fitting approaches. The residual strain in the thin heterostructure Si/SiGe layers was, therefore, investigated before and after selectively etching the Si. The strain in the channel increased with Ge content in the underlying SiGe as expected, confirming that the high-temperature device processing did not degrade the channel macrostrain.
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The authors would like to thank J. Zhang for material growth, Southampton University Microfabrication facility for MOSFET processing and H. Yuk for Si cap removal. P. Dobrosz acknowledges the financial support provided through the European Community’s Human Potential Programme under contract HPRN-CT-2002-00209.
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© 2004 Carl Hanser Verlag, München
Artikel in diesem Heft
- Frontmatter
- Editorial
- Challenges and interesting observations associated with feedback-controlled nanoindentation
- Nanoscratching on surfaces: the relationships between lateral force, normal force and normal displacement
- Nano-scratch testing on thin diamond-like carbon coatings for microactuators: friction, wear and elastic-plastic deformation
- Comparison of hardness and Young’s modulus by single indentation and multiple unloading indentation
- Nanomechanical characterization of Ti-base nanostructure-dendrite composite
- Surface topography and nanomechanical/tribological behaviour of ultrathin nitride films on silicon
- Viscosity of glass at high contact pressure during indentation experiments
- Dynamic indentation measurements on amorphous materials
- Technique for measuring the residual strain in strained Si/SiGe MOSFET structures using Raman spectroscopy
- Partial atomic volumes of early transition metals in A10 metal-based solid solutions
- Effects of an external electric field applied during the solution heat treatment of the Al-Mg-Si-Cu alloy AA6111
- Fatigue crack propagation in pseudoelastic TiNi smart microcomponents
- Microstructure evolution in immiscible alloys during rapid directional solidification
- The creep performance of a sand-cast Mg–2.8 Nd–0.8 Zn–0.5 Zr–0.3 Gd alloy at 241 to 262°C
- Punch-shear tests and size effects for evaluating the shear strength of machinable ceramics
- Study of Ti–Si in situ composite processing by multi-stage eutectic solidification
- Twin-roll cast Al–Mg –Si sheet for automotive applications
- Thermodynamics and surface properties of Fe–V and Fe–Ti liquid alloys
- Personal/ Personelles
- Press/ Presse
- Books/Bücher
- Conferences / Konferenzen
- Frontmatter
- Editorial
- Editorial
- Articles Basic
- Challenges and interesting observations associated with feedback-controlled nanoindentation
- Nanoscratching on surfaces: the relationships between lateral force, normal force and normal displacement
- Nano-scratch testing on thin diamond-like carbon coatings for microactuators: friction, wear and elastic-plastic deformation
- Comparison of hardness and Young’s modulus by single indentation and multiple unloading indentation
- Nanomechanical characterization of Ti-base nanostructure-dendrite composite
- Surface topography and nanomechanical/tribological behaviour of ultrathin nitride films on silicon
- Viscosity of glass at high contact pressure during indentation experiments
- Dynamic indentation measurements on amorphous materials
- Technique for measuring the residual strain in strained Si/SiGe MOSFET structures using Raman spectroscopy
- Partial atomic volumes of early transition metals in A10 metal-based solid solutions
- Effects of an external electric field applied during the solution heat treatment of the Al-Mg-Si-Cu alloy AA6111
- Fatigue crack propagation in pseudoelastic TiNi smart microcomponents
- Microstructure evolution in immiscible alloys during rapid directional solidification
- The creep performance of a sand-cast Mg–2.8 Nd–0.8 Zn–0.5 Zr–0.3 Gd alloy at 241 to 262°C
- Articles Applied
- Punch-shear tests and size effects for evaluating the shear strength of machinable ceramics
- Study of Ti–Si in situ composite processing by multi-stage eutectic solidification
- Twin-roll cast Al–Mg –Si sheet for automotive applications
- Thermodynamics and surface properties of Fe–V and Fe–Ti liquid alloys
- Notifications/Mitteilungen
- Personal/ Personelles
- Books/Bücher
- Press/ Presse
- Conferences / Konferenzen
Artikel in diesem Heft
- Frontmatter
- Editorial
- Challenges and interesting observations associated with feedback-controlled nanoindentation
- Nanoscratching on surfaces: the relationships between lateral force, normal force and normal displacement
- Nano-scratch testing on thin diamond-like carbon coatings for microactuators: friction, wear and elastic-plastic deformation
- Comparison of hardness and Young’s modulus by single indentation and multiple unloading indentation
- Nanomechanical characterization of Ti-base nanostructure-dendrite composite
- Surface topography and nanomechanical/tribological behaviour of ultrathin nitride films on silicon
- Viscosity of glass at high contact pressure during indentation experiments
- Dynamic indentation measurements on amorphous materials
- Technique for measuring the residual strain in strained Si/SiGe MOSFET structures using Raman spectroscopy
- Partial atomic volumes of early transition metals in A10 metal-based solid solutions
- Effects of an external electric field applied during the solution heat treatment of the Al-Mg-Si-Cu alloy AA6111
- Fatigue crack propagation in pseudoelastic TiNi smart microcomponents
- Microstructure evolution in immiscible alloys during rapid directional solidification
- The creep performance of a sand-cast Mg–2.8 Nd–0.8 Zn–0.5 Zr–0.3 Gd alloy at 241 to 262°C
- Punch-shear tests and size effects for evaluating the shear strength of machinable ceramics
- Study of Ti–Si in situ composite processing by multi-stage eutectic solidification
- Twin-roll cast Al–Mg –Si sheet for automotive applications
- Thermodynamics and surface properties of Fe–V and Fe–Ti liquid alloys
- Personal/ Personelles
- Press/ Presse
- Books/Bücher
- Conferences / Konferenzen
- Frontmatter
- Editorial
- Editorial
- Articles Basic
- Challenges and interesting observations associated with feedback-controlled nanoindentation
- Nanoscratching on surfaces: the relationships between lateral force, normal force and normal displacement
- Nano-scratch testing on thin diamond-like carbon coatings for microactuators: friction, wear and elastic-plastic deformation
- Comparison of hardness and Young’s modulus by single indentation and multiple unloading indentation
- Nanomechanical characterization of Ti-base nanostructure-dendrite composite
- Surface topography and nanomechanical/tribological behaviour of ultrathin nitride films on silicon
- Viscosity of glass at high contact pressure during indentation experiments
- Dynamic indentation measurements on amorphous materials
- Technique for measuring the residual strain in strained Si/SiGe MOSFET structures using Raman spectroscopy
- Partial atomic volumes of early transition metals in A10 metal-based solid solutions
- Effects of an external electric field applied during the solution heat treatment of the Al-Mg-Si-Cu alloy AA6111
- Fatigue crack propagation in pseudoelastic TiNi smart microcomponents
- Microstructure evolution in immiscible alloys during rapid directional solidification
- The creep performance of a sand-cast Mg–2.8 Nd–0.8 Zn–0.5 Zr–0.3 Gd alloy at 241 to 262°C
- Articles Applied
- Punch-shear tests and size effects for evaluating the shear strength of machinable ceramics
- Study of Ti–Si in situ composite processing by multi-stage eutectic solidification
- Twin-roll cast Al–Mg –Si sheet for automotive applications
- Thermodynamics and surface properties of Fe–V and Fe–Ti liquid alloys
- Notifications/Mitteilungen
- Personal/ Personelles
- Books/Bücher
- Press/ Presse
- Conferences / Konferenzen
