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Nano-scratch testing on thin diamond-like carbon coatings for microactuators: friction, wear and elastic-plastic deformation

  • Rolf L. A. Küster EMAIL logo and Kirsten I. Schiffmann
Published/Copyright: February 1, 2022
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International Journal of Materials Research
From the journal International Journal of Materials Research Volume 95 Issue 5

Abstract

In micromechanical systems the mechanical and tribological requirements for the materials in use are getting rapidly higher. The aim is to find out the fundamental frictional and wear behavior of thin coatings by using the hitherto knowledge in mechanical characterization of coatings and selective experiments. Nanoindentation and linear oscillating microwear experiments have been performed on micro-actuator components and on thin diamond-like carbon coatings, using diamond tips and loads in the range of some millinewtons. The wear depth and friction coefficients were determined as a function of load and number of wear cycles. New methods of data analysis will be discussed, which allow a separation of the different contributions of wear due to material loss, and elastic and plastic deformation. The friction coefficient shows deviations from Amonton’s law because of the dependence of the contact area on the normal load.

Keywords: Nanoscratch; Nanowear; Nanoindentation; Elastic deformation; Plastic deformation; Nanofriction; MEMS; Microelectromechanical systems
Dr. Rolf Küster Frauenhofer-Institut für Schicht- und Oberflächentechnik Bienroder Weg 54E, D-38108 Braunschweig, Germany Tel.: +49 531 2155 643 Fax: +49 531 2155 900

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Received: 2003-11-02
Accepted: 2004-02-28
Published Online: 2022-02-01

© 2004 Carl Hanser Verlag, München

Articles in the same Issue

  1. Frontmatter
  2. Editorial
  3. Challenges and interesting observations associated with feedback-controlled nanoindentation
  4. Nanoscratching on surfaces: the relationships between lateral force, normal force and normal displacement
  5. Nano-scratch testing on thin diamond-like carbon coatings for microactuators: friction, wear and elastic-plastic deformation
  6. Comparison of hardness and Young’s modulus by single indentation and multiple unloading indentation
  7. Nanomechanical characterization of Ti-base nanostructure-dendrite composite
  8. Surface topography and nanomechanical/tribological behaviour of ultrathin nitride films on silicon
  9. Viscosity of glass at high contact pressure during indentation experiments
  10. Dynamic indentation measurements on amorphous materials
  11. Technique for measuring the residual strain in strained Si/SiGe MOSFET structures using Raman spectroscopy
  12. Partial atomic volumes of early transition metals in A10 metal-based solid solutions
  13. Effects of an external electric field applied during the solution heat treatment of the Al-Mg-Si-Cu alloy AA6111
  14. Fatigue crack propagation in pseudoelastic TiNi smart microcomponents
  15. Microstructure evolution in immiscible alloys during rapid directional solidification
  16. The creep performance of a sand-cast Mg–2.8 Nd–0.8 Zn–0.5 Zr–0.3 Gd alloy at 241 to 262°C
  17. Punch-shear tests and size effects for evaluating the shear strength of machinable ceramics
  18. Study of Ti–Si in situ composite processing by multi-stage eutectic solidification
  19. Twin-roll cast Al–Mg –Si sheet for automotive applications
  20. Thermodynamics and surface properties of Fe–V and Fe–Ti liquid alloys
  21. Personal/ Personelles
  22. Press/ Presse
  23. Books/Bücher
  24. Conferences / Konferenzen
  25. Frontmatter
  26. Editorial
  27. Editorial
  28. Articles Basic
  29. Challenges and interesting observations associated with feedback-controlled nanoindentation
  30. Nanoscratching on surfaces: the relationships between lateral force, normal force and normal displacement
  31. Nano-scratch testing on thin diamond-like carbon coatings for microactuators: friction, wear and elastic-plastic deformation
  32. Comparison of hardness and Young’s modulus by single indentation and multiple unloading indentation
  33. Nanomechanical characterization of Ti-base nanostructure-dendrite composite
  34. Surface topography and nanomechanical/tribological behaviour of ultrathin nitride films on silicon
  35. Viscosity of glass at high contact pressure during indentation experiments
  36. Dynamic indentation measurements on amorphous materials
  37. Technique for measuring the residual strain in strained Si/SiGe MOSFET structures using Raman spectroscopy
  38. Partial atomic volumes of early transition metals in A10 metal-based solid solutions
  39. Effects of an external electric field applied during the solution heat treatment of the Al-Mg-Si-Cu alloy AA6111
  40. Fatigue crack propagation in pseudoelastic TiNi smart microcomponents
  41. Microstructure evolution in immiscible alloys during rapid directional solidification
  42. The creep performance of a sand-cast Mg–2.8 Nd–0.8 Zn–0.5 Zr–0.3 Gd alloy at 241 to 262°C
  43. Articles Applied
  44. Punch-shear tests and size effects for evaluating the shear strength of machinable ceramics
  45. Study of Ti–Si in situ composite processing by multi-stage eutectic solidification
  46. Twin-roll cast Al–Mg –Si sheet for automotive applications
  47. Thermodynamics and surface properties of Fe–V and Fe–Ti liquid alloys
  48. Notifications/Mitteilungen
  49. Personal/ Personelles
  50. Books/Bücher
  51. Press/ Presse
  52. Conferences / Konferenzen
https://doi.org/10.1515/ijmr-2004-0066
Keywords for this article
Nanoscratch; Nanowear; Nanoindentation; Elastic deformation; Plastic deformation; Nanofriction; MEMS; Microelectromechanical systems

Articles in the same Issue

  1. Frontmatter
  2. Editorial
  3. Challenges and interesting observations associated with feedback-controlled nanoindentation
  4. Nanoscratching on surfaces: the relationships between lateral force, normal force and normal displacement
  5. Nano-scratch testing on thin diamond-like carbon coatings for microactuators: friction, wear and elastic-plastic deformation
  6. Comparison of hardness and Young’s modulus by single indentation and multiple unloading indentation
  7. Nanomechanical characterization of Ti-base nanostructure-dendrite composite
  8. Surface topography and nanomechanical/tribological behaviour of ultrathin nitride films on silicon
  9. Viscosity of glass at high contact pressure during indentation experiments
  10. Dynamic indentation measurements on amorphous materials
  11. Technique for measuring the residual strain in strained Si/SiGe MOSFET structures using Raman spectroscopy
  12. Partial atomic volumes of early transition metals in A10 metal-based solid solutions
  13. Effects of an external electric field applied during the solution heat treatment of the Al-Mg-Si-Cu alloy AA6111
  14. Fatigue crack propagation in pseudoelastic TiNi smart microcomponents
  15. Microstructure evolution in immiscible alloys during rapid directional solidification
  16. The creep performance of a sand-cast Mg–2.8 Nd–0.8 Zn–0.5 Zr–0.3 Gd alloy at 241 to 262°C
  17. Punch-shear tests and size effects for evaluating the shear strength of machinable ceramics
  18. Study of Ti–Si in situ composite processing by multi-stage eutectic solidification
  19. Twin-roll cast Al–Mg –Si sheet for automotive applications
  20. Thermodynamics and surface properties of Fe–V and Fe–Ti liquid alloys
  21. Personal/ Personelles
  22. Press/ Presse
  23. Books/Bücher
  24. Conferences / Konferenzen
  25. Frontmatter
  26. Editorial
  27. Editorial
  28. Articles Basic
  29. Challenges and interesting observations associated with feedback-controlled nanoindentation
  30. Nanoscratching on surfaces: the relationships between lateral force, normal force and normal displacement
  31. Nano-scratch testing on thin diamond-like carbon coatings for microactuators: friction, wear and elastic-plastic deformation
  32. Comparison of hardness and Young’s modulus by single indentation and multiple unloading indentation
  33. Nanomechanical characterization of Ti-base nanostructure-dendrite composite
  34. Surface topography and nanomechanical/tribological behaviour of ultrathin nitride films on silicon
  35. Viscosity of glass at high contact pressure during indentation experiments
  36. Dynamic indentation measurements on amorphous materials
  37. Technique for measuring the residual strain in strained Si/SiGe MOSFET structures using Raman spectroscopy
  38. Partial atomic volumes of early transition metals in A10 metal-based solid solutions
  39. Effects of an external electric field applied during the solution heat treatment of the Al-Mg-Si-Cu alloy AA6111
  40. Fatigue crack propagation in pseudoelastic TiNi smart microcomponents
  41. Microstructure evolution in immiscible alloys during rapid directional solidification
  42. The creep performance of a sand-cast Mg–2.8 Nd–0.8 Zn–0.5 Zr–0.3 Gd alloy at 241 to 262°C
  43. Articles Applied
  44. Punch-shear tests and size effects for evaluating the shear strength of machinable ceramics
  45. Study of Ti–Si in situ composite processing by multi-stage eutectic solidification
  46. Twin-roll cast Al–Mg –Si sheet for automotive applications
  47. Thermodynamics and surface properties of Fe–V and Fe–Ti liquid alloys
  48. Notifications/Mitteilungen
  49. Personal/ Personelles
  50. Books/Bücher
  51. Press/ Presse
  52. Conferences / Konferenzen
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