Surface topography and nanomechanical/tribological behaviour of ultrathin nitride films on silicon
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J. T. Wyrobek
Abstract
Surface topography and roughness characteristics were studied based on the analysis of three dimensional atomic force microscopy images of several multilayer ultrathin-film samples. TiN, CrN and NbN (200 nm thick) were deposited on single crystal n-type silicon without or with a 200 nm thick underlayer of silicon dioxide or silicon nitride. The nitride films were deposited by physical vapour deposition technique and the underlayer films by plasma-enhanced chemical vapour deposition. Nanomechanical studies and nanotribological tests were also conducted to investigate the properties of such films as possible candidates for protective layers on rubbing elements of micro-electromechanical systems. The effect of the underlayer on the surface properties and the mechanical/tribological behaviour was evaluated as well.
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One of the authors, K. Malyska, is very grateful to Mr Thomas Wyrobek, President of Hysitron Inc. (Minneapolis, Minnesota, U. S. A.) for providing training and usage of the test instruments. The partial financial support for this work from the Polish State Committee for Research under grant No. 7 T11B 051 20 is also acknowledged.
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© 2004 Carl Hanser Verlag, München
Articles in the same Issue
- Frontmatter
- Editorial
- Challenges and interesting observations associated with feedback-controlled nanoindentation
- Nanoscratching on surfaces: the relationships between lateral force, normal force and normal displacement
- Nano-scratch testing on thin diamond-like carbon coatings for microactuators: friction, wear and elastic-plastic deformation
- Comparison of hardness and Young’s modulus by single indentation and multiple unloading indentation
- Nanomechanical characterization of Ti-base nanostructure-dendrite composite
- Surface topography and nanomechanical/tribological behaviour of ultrathin nitride films on silicon
- Viscosity of glass at high contact pressure during indentation experiments
- Dynamic indentation measurements on amorphous materials
- Technique for measuring the residual strain in strained Si/SiGe MOSFET structures using Raman spectroscopy
- Partial atomic volumes of early transition metals in A10 metal-based solid solutions
- Effects of an external electric field applied during the solution heat treatment of the Al-Mg-Si-Cu alloy AA6111
- Fatigue crack propagation in pseudoelastic TiNi smart microcomponents
- Microstructure evolution in immiscible alloys during rapid directional solidification
- The creep performance of a sand-cast Mg–2.8 Nd–0.8 Zn–0.5 Zr–0.3 Gd alloy at 241 to 262°C
- Punch-shear tests and size effects for evaluating the shear strength of machinable ceramics
- Study of Ti–Si in situ composite processing by multi-stage eutectic solidification
- Twin-roll cast Al–Mg –Si sheet for automotive applications
- Thermodynamics and surface properties of Fe–V and Fe–Ti liquid alloys
- Personal/ Personelles
- Press/ Presse
- Books/Bücher
- Conferences / Konferenzen
- Frontmatter
- Editorial
- Editorial
- Articles Basic
- Challenges and interesting observations associated with feedback-controlled nanoindentation
- Nanoscratching on surfaces: the relationships between lateral force, normal force and normal displacement
- Nano-scratch testing on thin diamond-like carbon coatings for microactuators: friction, wear and elastic-plastic deformation
- Comparison of hardness and Young’s modulus by single indentation and multiple unloading indentation
- Nanomechanical characterization of Ti-base nanostructure-dendrite composite
- Surface topography and nanomechanical/tribological behaviour of ultrathin nitride films on silicon
- Viscosity of glass at high contact pressure during indentation experiments
- Dynamic indentation measurements on amorphous materials
- Technique for measuring the residual strain in strained Si/SiGe MOSFET structures using Raman spectroscopy
- Partial atomic volumes of early transition metals in A10 metal-based solid solutions
- Effects of an external electric field applied during the solution heat treatment of the Al-Mg-Si-Cu alloy AA6111
- Fatigue crack propagation in pseudoelastic TiNi smart microcomponents
- Microstructure evolution in immiscible alloys during rapid directional solidification
- The creep performance of a sand-cast Mg–2.8 Nd–0.8 Zn–0.5 Zr–0.3 Gd alloy at 241 to 262°C
- Articles Applied
- Punch-shear tests and size effects for evaluating the shear strength of machinable ceramics
- Study of Ti–Si in situ composite processing by multi-stage eutectic solidification
- Twin-roll cast Al–Mg –Si sheet for automotive applications
- Thermodynamics and surface properties of Fe–V and Fe–Ti liquid alloys
- Notifications/Mitteilungen
- Personal/ Personelles
- Books/Bücher
- Press/ Presse
- Conferences / Konferenzen
Articles in the same Issue
- Frontmatter
- Editorial
- Challenges and interesting observations associated with feedback-controlled nanoindentation
- Nanoscratching on surfaces: the relationships between lateral force, normal force and normal displacement
- Nano-scratch testing on thin diamond-like carbon coatings for microactuators: friction, wear and elastic-plastic deformation
- Comparison of hardness and Young’s modulus by single indentation and multiple unloading indentation
- Nanomechanical characterization of Ti-base nanostructure-dendrite composite
- Surface topography and nanomechanical/tribological behaviour of ultrathin nitride films on silicon
- Viscosity of glass at high contact pressure during indentation experiments
- Dynamic indentation measurements on amorphous materials
- Technique for measuring the residual strain in strained Si/SiGe MOSFET structures using Raman spectroscopy
- Partial atomic volumes of early transition metals in A10 metal-based solid solutions
- Effects of an external electric field applied during the solution heat treatment of the Al-Mg-Si-Cu alloy AA6111
- Fatigue crack propagation in pseudoelastic TiNi smart microcomponents
- Microstructure evolution in immiscible alloys during rapid directional solidification
- The creep performance of a sand-cast Mg–2.8 Nd–0.8 Zn–0.5 Zr–0.3 Gd alloy at 241 to 262°C
- Punch-shear tests and size effects for evaluating the shear strength of machinable ceramics
- Study of Ti–Si in situ composite processing by multi-stage eutectic solidification
- Twin-roll cast Al–Mg –Si sheet for automotive applications
- Thermodynamics and surface properties of Fe–V and Fe–Ti liquid alloys
- Personal/ Personelles
- Press/ Presse
- Books/Bücher
- Conferences / Konferenzen
- Frontmatter
- Editorial
- Editorial
- Articles Basic
- Challenges and interesting observations associated with feedback-controlled nanoindentation
- Nanoscratching on surfaces: the relationships between lateral force, normal force and normal displacement
- Nano-scratch testing on thin diamond-like carbon coatings for microactuators: friction, wear and elastic-plastic deformation
- Comparison of hardness and Young’s modulus by single indentation and multiple unloading indentation
- Nanomechanical characterization of Ti-base nanostructure-dendrite composite
- Surface topography and nanomechanical/tribological behaviour of ultrathin nitride films on silicon
- Viscosity of glass at high contact pressure during indentation experiments
- Dynamic indentation measurements on amorphous materials
- Technique for measuring the residual strain in strained Si/SiGe MOSFET structures using Raman spectroscopy
- Partial atomic volumes of early transition metals in A10 metal-based solid solutions
- Effects of an external electric field applied during the solution heat treatment of the Al-Mg-Si-Cu alloy AA6111
- Fatigue crack propagation in pseudoelastic TiNi smart microcomponents
- Microstructure evolution in immiscible alloys during rapid directional solidification
- The creep performance of a sand-cast Mg–2.8 Nd–0.8 Zn–0.5 Zr–0.3 Gd alloy at 241 to 262°C
- Articles Applied
- Punch-shear tests and size effects for evaluating the shear strength of machinable ceramics
- Study of Ti–Si in situ composite processing by multi-stage eutectic solidification
- Twin-roll cast Al–Mg –Si sheet for automotive applications
- Thermodynamics and surface properties of Fe–V and Fe–Ti liquid alloys
- Notifications/Mitteilungen
- Personal/ Personelles
- Books/Bücher
- Press/ Presse
- Conferences / Konferenzen
