Annealing studies of high Ge composition Si/SiGe multilayers
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Mojmír Meduňa
Abstract
For the design flexibility of SiGe based quantum cascade lasers high Ge composition Si/SiGe (x = 80%) superlattices are important. We present an X-ray small angle scattering and high-resolution X-ray diffraction study on strain compensated Si/Si1–xGex multiple quantum well structures with Ge compositions (x up to 80%), grown on Si0.5Ge0.5 pseudo-substrates. To test the temperature stability of such layers occurring in processing steps, in-situ annealing X-ray reflectivity measurements were performed for temperatures up to 810 °C. From the analysis of the reflectivity data, we obtain the layer thicknesses and the interface roughness of the superlattices during annealing. Using a one dimensional diffusion equation, the Ge diffusion coefficient for these conditions was obtained. Furthermore, the strain status and Ge composition in the superlattice structure and in the SiGe buffer before and after annealing were determined from the symmetrical and asymmetrical reciprocal space maps.
© 2004 Oldenbourg Wissenschaftsverlag GmbH
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Artikel in diesem Heft
- Editorial: Structure Analysis of Thin Films and Nanostructures
- High resolution X-ray diffraction of MOVPE-grown ZnO/GaN/sapphire layers
- Exact determination of Indium incorporation in (InxGa1–xN/GaN)-multiple quantum well structures by X-ray diffraction and -reflectivity and its impact on optical properties
- Annealing studies of high Ge composition Si/SiGe multilayers
- Lateral periodicity of elastic domains in MnAs/GaAs(001) epitaxial layers studied by high resolution X-ray diffraction
- X-ray reflectivity study of the influence of temperature fluctuations on the density profile of thin liquid films
- Polymeric structures at interfaces: An X-ray scattering study
- X-ray and VIS light scattering from light-induced polymer gratings
- Imaging plates – a new life for electron diffraction structure analysis
- On the superstructure of KTiO2(OH)
- Molecular and crystal structure of Ac-(Z)-ΔAbu-NMe2 and Ac-DL-Abu-NMe2 as compared to those of related molecules
- J-aggregate structures in crystals of three bisazomethine dyes
- Books Received
