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Investigation of low k interfacial layer characteristics of LaAlO3 thin films grown on Si (100)

  • Dong-Sheng Wang
Published/Copyright: June 1, 2014
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International Journal of Materials Research
From the journal International Journal of Materials Research Volume 105 Issue 6

Abstract

Amorphous LaAlO3 thin films were deposited on bare Si substrates using RF-magnetron sputtering at room temperature. A post-annealing process was performed in O2 atmosphere at 650 °C for 30 min. The annealed films have a high-quality amorphous structure with faceted surface and uniform thickness. Smaller roughness of about 0.197 nm was observed. By analyzing the interfacial structure of the films, we confirmed that O2 annealing causes the formation of a low k (∼ 6.57) La and Al silicate phase with high-quality interface and surface. Unlike most previous studies, our results show the possibility of the formation of a relatively low k interfacial layer for LaAlO3 thin films during the thermal processing required by complementary metal oxide semiconductor applications.

Keywords: LaAlO3 thin film; Amorphous; Annealing; Interfacial layer characteristics
*Correspondence address, Dr. Dong-Sheng Wang, Department of Applied Physics, Nanjing University of Aeronautics and Astronautics, Yudao Street 29, Nanjing 210016, People's Republic of China, Tel.: +86-25-52075693, Fax: +86-25-52113807, E-mail:

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Received: 2013-10-20
Accepted: 2014-01-13
Published Online: 2014-06-01
Published in Print: 2014-06-12

© 2014, Carl Hanser Verlag, München

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https://doi.org/10.3139/146.111064
Keywords for this article
LaAlO3 thin film; Amorphous; Annealing; Interfacial layer characteristics

Articles in the same Issue

  1. Contents
  2. Contents
  3. Original Contributions
  4. Thermodynamic modeling of the In–Pt–Sb system
  5. Classical controlled rolling of low C steels microalloyed with Ti and Mo
  6. Development of carbide intermetallic layer by electric discharge alloying on AISI-D2 tool steel and its wear resistance
  7. Comparison of fatigue crack growth rate of selective laser sintered RapidSteel via computational fracture mechanics
  8. Wear resistance and fracture mechanics of WC–Co composites
  9. Thermal expansion behavior of CNT/Ag nanocomposite
  10. Thermophysical properties of solid phase rhodium measured by the pulse calorimetry technique over a wide temperature range
  11. Influence of Co3O4 addition on the ionic conductivity and microstructural properties of yttria-stabilized zirconia (8YSZ)
  12. High-activity of Pd catalyst supported on antimony tin oxide for hydrogen peroxide electroreduction
  13. Investigation of low k interfacial layer characteristics of LaAlO3 thin films grown on Si (100)
  14. In-situ catalytic growth of MgAl2O4 spinel whiskers in MgO–C refractories
  15. Short Communications
  16. Preparation and characterization of boron nitride/carbon fiber composite with high specific surface area
  17. Crevice corrosion resistance of high alloyed materials in 3.5 % NaCl solution
  18. Effect of grain size on the microstructure and mechanical properties of Mg-4Y-3Nd-0.5Zr alloy
  19. People
  20. Professor Ulrich Martin on his 65th birthday
  21. DGM News
  22. DGM News
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