A usable concept for the indentation of thin porous films
-
René Puschmann
,
Norbert Schwarzer
Abstract
The paper deals with the application of Pharr’s concept of the effectively shaped indenter as well as an extension of that concept – referred to as extrapolation method – on the determination of the yield strength of porous thin films. As an example, a 1066 nm thick porous SiO2 xerogel film having a porosity of about 50% and an average pore size in the range 3 – 4 nm was investigated. Three different spherical indenters with radii of 1.4, 3.11 and 110 lm were used in this investigation. Depending on the indenter radius and the applied load the physical nature of the sample deformation was different making the one or the other of the two methods more suitable for analysis. We found that the data received with the large indenter could be well analysed using Pharr’s concept, while for the two smaller indenters the extrapolation method had to be used. The yield strength values obtained with the two methods were in remarkable agreement (109 vs. 99 MPa).
References
[1] A.E. Braun: Semicond. Int., May 1. (2003) http://www.reed-electronics.com/ semiconductor/article/CA293962.Suche in Google Scholar
[2] T. Chudoba, N. Schwarzer, F. Richter: Surf. Coat. Technol. 154 (2002) 140.10.1016/S0257-8972(02)00016-6Suche in Google Scholar
[3] J.S. Field, M.V. Swain: J. Mater. Res. 8 (1993) 297.10.1557/JMR.1993.0297Suche in Google Scholar
[4] A.J. Bushby, M.V. Swain, in: R.C. Brandt: Plastic Deformation of Ceramics, Plenum Press, New York, 1995, p. 161.10.1007/978-1-4899-1441-5_14Suche in Google Scholar
[5] N. Schwarzer: ASME J. Tribol. 122 (2000) 672.10.1115/1.1310330Suche in Google Scholar
[6] ELASTICA: Free software demonstration package for the evaluation of mechanical contact stresses and displacements, available in the internet at http://www.esae.de (contact: p.heuer@esae.de) or http://www.asmec.de.Suche in Google Scholar
[7] N. Schwarzer, F. Richter, G. Hecht: Surf. Coat. Technol. 114 (1999) 292.10.1016/S0257-8972(99)00057-2Suche in Google Scholar
[8] T. Chudoba, N. Schwarzer, F. Richter: Thin Solid Films355–356 (1999) 284.10.1016/S0040-6090(99)00445-9Suche in Google Scholar
[9] T. Chudoba, N. Schwarzer, F. Richter: Surf. Coat. Technol. 127 (2000) 9.10.1016/S0257-8972(00)00552-1Suche in Google Scholar
[10] G.M. Pharr, A. Bolshakov: J. Mater. Res. 17 (2002) 2660.10.1557/JMR.2002.0386Suche in Google Scholar
[11] N. Schwarzer: J. Phys. D: Appl. Phys. 37 (2004) 2761.10.1088/0022-3727/37/19/023Suche in Google Scholar
[12] FunnyIndenter: Free software demonstration package for the evaluation of the elastic field of arbitrary combinations of indenters of the shape given due to the function z(r) = A–B*r2–C*r4 –D*r6–E*r8 with r2 = x2 + y2, available in the internet at http://www.esae.de (contact: p.heuer@esae.de).Suche in Google Scholar
[13] N. Schwarzer, G.M. Pharr: Thin Solid Films 469 –470 (2004) 194.10.1016/j.tsf.2004.08.170Suche in Google Scholar
[14] T. Gessner, S.E. Schulz, T. Winkler: European Patent No. 1113988.Suche in Google Scholar
[15] T. Chudoba, M. Griepentrog, D. Schneider F. Richter: J. Mater. Res. 10 (2004) 301.10.1557/jmr.2004.19.1.301Suche in Google Scholar
[16] http://eande.lbl.gov/ECS/aerogels/saprops.htm.Suche in Google Scholar
[17] W.C. Oliver, G.M. Pharr: J. Mater. Res. 7 (1992) 1564.10.1557/JMR.1992.1564Suche in Google Scholar
- *
However, this limit is essentially not an effect of the indentation depth as such but rather of the inelastic deformation caused by it. Therefore, the material properties, indenter radii and loading procedure play a decisive role, and in other cases values other than 1/3 of the film thickness may be valid. This problem needs further investigation
© 2005 Carl Hanser Verlag, München
Artikel in diesem Heft
- Frontmatter
- Editorial
- nanomech 5
- Articles Basic
- Quantitative evaluation of nanoindents: Do we need more reliable mechanical parameters for the characterization of materials?
- Nanoindentation investigation of solid-solution strengthening in III-V semiconductor alloys
- Comparison between conventional Vickers hardness and indentation hardness obtained with different instruments
- On the pressure dependence of the indentation modulus
- A review on the reverse analysis for the extraction of mechanical properties using instrumented Vickers indentation
- Articles Applied
- Quasi-static and dynamic depth-sensing indentation measurements to characterize wear and mar resistance of coating–polymer systems
- Obtaining mechanical parameters for metallisation stress sensor design using nanoindentation
- Direct measurement of nanoindentation area function by metrological AFM
- A usable concept for the indentation of thin porous films
- Analysis of the ductile/brittle transition during a scratch test performed into polymeric film deposited on a PMMA substrate
- Nanomechanical and nanotribological properties of polymeric ultrathin films for nanoimprint lithography
- Adhesive and nanomechanical properties of polymeric films deposited on silicon
- Modelling of the nanoindentation process of ultrathin films
- Regular articles
- Experimental investigation and thermodynamic calculation in the Al–Be–Si ternary system
- Thermodynamic assessment of the Ca–Sn system
- Interfacial reaction between Cu and Ti2SnC during processing of Cu–Ti2SnC composite
- Effects of heat treatment on the lubricated sliding wear behaviour of zinc-based alloy containing nickel under varying test conditions
- Influence of Ce, K, and Na on spheroidization of eutectic carbides in low-tungsten white cast iron
- Notifications/Mitteilungen
- Personal/Personelles
- Press/Presse
Artikel in diesem Heft
- Frontmatter
- Editorial
- nanomech 5
- Articles Basic
- Quantitative evaluation of nanoindents: Do we need more reliable mechanical parameters for the characterization of materials?
- Nanoindentation investigation of solid-solution strengthening in III-V semiconductor alloys
- Comparison between conventional Vickers hardness and indentation hardness obtained with different instruments
- On the pressure dependence of the indentation modulus
- A review on the reverse analysis for the extraction of mechanical properties using instrumented Vickers indentation
- Articles Applied
- Quasi-static and dynamic depth-sensing indentation measurements to characterize wear and mar resistance of coating–polymer systems
- Obtaining mechanical parameters for metallisation stress sensor design using nanoindentation
- Direct measurement of nanoindentation area function by metrological AFM
- A usable concept for the indentation of thin porous films
- Analysis of the ductile/brittle transition during a scratch test performed into polymeric film deposited on a PMMA substrate
- Nanomechanical and nanotribological properties of polymeric ultrathin films for nanoimprint lithography
- Adhesive and nanomechanical properties of polymeric films deposited on silicon
- Modelling of the nanoindentation process of ultrathin films
- Regular articles
- Experimental investigation and thermodynamic calculation in the Al–Be–Si ternary system
- Thermodynamic assessment of the Ca–Sn system
- Interfacial reaction between Cu and Ti2SnC during processing of Cu–Ti2SnC composite
- Effects of heat treatment on the lubricated sliding wear behaviour of zinc-based alloy containing nickel under varying test conditions
- Influence of Ce, K, and Na on spheroidization of eutectic carbides in low-tungsten white cast iron
- Notifications/Mitteilungen
- Personal/Personelles
- Press/Presse
