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Modelling of the nanoindentation process of ultrathin films

  • J. Zimmerman , T. Majewski and Z. Rymuza EMAIL logo
Published/Copyright: February 4, 2022
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International Journal of Materials Research
From the journal International Journal of Materials Research Volume 96 Issue 11

Abstract

A model of the nanoindentation process was elaborated using the finite-element method. The ADINA software was used in the computation of the load – displacement curve. The distribution of stresses in the TiN film on a smooth substrate (Si) was found. The influence of mechanical material properties of the film and substrate on the process of indentation and the stress distribution was considered. The effect of yield stress, tip’s radius and hardening modulus was discussed. The results were compared with the results of experimental nanoindentation tests performed for ultrathin films.

Keywords: Nanoindentation; Finite-element method; MEMS material; Elastic-plastic deformation
Prof. Zygmunt Rymuza Institute of Micromechanics and Photonics ul. Sw. A. Boboli 8, 02-525 Warsaw, Poland Tel.: +48 22 660 8540 Fax: +48 22 660 8601

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Received: 2004-10-26
Accepted: 2005-04-29
Published Online: 2022-02-04

© 2005 Carl Hanser Verlag, München

Articles in the same Issue

  1. Frontmatter
  2. Editorial
  3. nanomech 5
  4. Articles Basic
  5. Quantitative evaluation of nanoindents: Do we need more reliable mechanical parameters for the characterization of materials?
  6. Nanoindentation investigation of solid-solution strengthening in III-V semiconductor alloys
  7. Comparison between conventional Vickers hardness and indentation hardness obtained with different instruments
  8. On the pressure dependence of the indentation modulus
  9. A review on the reverse analysis for the extraction of mechanical properties using instrumented Vickers indentation
  10. Articles Applied
  11. Quasi-static and dynamic depth-sensing indentation measurements to characterize wear and mar resistance of coating–polymer systems
  12. Obtaining mechanical parameters for metallisation stress sensor design using nanoindentation
  13. Direct measurement of nanoindentation area function by metrological AFM
  14. A usable concept for the indentation of thin porous films
  15. Analysis of the ductile/brittle transition during a scratch test performed into polymeric film deposited on a PMMA substrate
  16. Nanomechanical and nanotribological properties of polymeric ultrathin films for nanoimprint lithography
  17. Adhesive and nanomechanical properties of polymeric films deposited on silicon
  18. Modelling of the nanoindentation process of ultrathin films
  19. Regular articles
  20. Experimental investigation and thermodynamic calculation in the Al–Be–Si ternary system
  21. Thermodynamic assessment of the Ca–Sn system
  22. Interfacial reaction between Cu and Ti2SnC during processing of Cu–Ti2SnC composite
  23. Effects of heat treatment on the lubricated sliding wear behaviour of zinc-based alloy containing nickel under varying test conditions
  24. Influence of Ce, K, and Na on spheroidization of eutectic carbides in low-tungsten white cast iron
  25. Notifications/Mitteilungen
  26. Personal/Personelles
  27. Press/Presse
https://doi.org/10.1515/ijmr-2005-0226
Keywords for this article
Nanoindentation; Finite-element method; MEMS material; Elastic-plastic deformation

Articles in the same Issue

  1. Frontmatter
  2. Editorial
  3. nanomech 5
  4. Articles Basic
  5. Quantitative evaluation of nanoindents: Do we need more reliable mechanical parameters for the characterization of materials?
  6. Nanoindentation investigation of solid-solution strengthening in III-V semiconductor alloys
  7. Comparison between conventional Vickers hardness and indentation hardness obtained with different instruments
  8. On the pressure dependence of the indentation modulus
  9. A review on the reverse analysis for the extraction of mechanical properties using instrumented Vickers indentation
  10. Articles Applied
  11. Quasi-static and dynamic depth-sensing indentation measurements to characterize wear and mar resistance of coating–polymer systems
  12. Obtaining mechanical parameters for metallisation stress sensor design using nanoindentation
  13. Direct measurement of nanoindentation area function by metrological AFM
  14. A usable concept for the indentation of thin porous films
  15. Analysis of the ductile/brittle transition during a scratch test performed into polymeric film deposited on a PMMA substrate
  16. Nanomechanical and nanotribological properties of polymeric ultrathin films for nanoimprint lithography
  17. Adhesive and nanomechanical properties of polymeric films deposited on silicon
  18. Modelling of the nanoindentation process of ultrathin films
  19. Regular articles
  20. Experimental investigation and thermodynamic calculation in the Al–Be–Si ternary system
  21. Thermodynamic assessment of the Ca–Sn system
  22. Interfacial reaction between Cu and Ti2SnC during processing of Cu–Ti2SnC composite
  23. Effects of heat treatment on the lubricated sliding wear behaviour of zinc-based alloy containing nickel under varying test conditions
  24. Influence of Ce, K, and Na on spheroidization of eutectic carbides in low-tungsten white cast iron
  25. Notifications/Mitteilungen
  26. Personal/Personelles
  27. Press/Presse
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