Obtaining mechanical parameters for metallisation stress sensor design using nanoindentation
-
S. Soare
,
A. Oila
Abstract
Sputtered aluminium layers from 250 to 2000 nm thick on (100) silicon have been indented to various depths and the nanoindentation load – displacement curves recorded. The loading curves were then simulated by finite element analysis and the results compared to identify the yield properties of the coating. Modelling data for thicker samples closely follows experimental data, but for thinner coatings there is a considerable gradient in properties through the film thickness.
References
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© 2005 Carl Hanser Verlag, München
Artikel in diesem Heft
- Frontmatter
- Editorial
- nanomech 5
- Articles Basic
- Quantitative evaluation of nanoindents: Do we need more reliable mechanical parameters for the characterization of materials?
- Nanoindentation investigation of solid-solution strengthening in III-V semiconductor alloys
- Comparison between conventional Vickers hardness and indentation hardness obtained with different instruments
- On the pressure dependence of the indentation modulus
- A review on the reverse analysis for the extraction of mechanical properties using instrumented Vickers indentation
- Articles Applied
- Quasi-static and dynamic depth-sensing indentation measurements to characterize wear and mar resistance of coating–polymer systems
- Obtaining mechanical parameters for metallisation stress sensor design using nanoindentation
- Direct measurement of nanoindentation area function by metrological AFM
- A usable concept for the indentation of thin porous films
- Analysis of the ductile/brittle transition during a scratch test performed into polymeric film deposited on a PMMA substrate
- Nanomechanical and nanotribological properties of polymeric ultrathin films for nanoimprint lithography
- Adhesive and nanomechanical properties of polymeric films deposited on silicon
- Modelling of the nanoindentation process of ultrathin films
- Regular articles
- Experimental investigation and thermodynamic calculation in the Al–Be–Si ternary system
- Thermodynamic assessment of the Ca–Sn system
- Interfacial reaction between Cu and Ti2SnC during processing of Cu–Ti2SnC composite
- Effects of heat treatment on the lubricated sliding wear behaviour of zinc-based alloy containing nickel under varying test conditions
- Influence of Ce, K, and Na on spheroidization of eutectic carbides in low-tungsten white cast iron
- Notifications/Mitteilungen
- Personal/Personelles
- Press/Presse
Artikel in diesem Heft
- Frontmatter
- Editorial
- nanomech 5
- Articles Basic
- Quantitative evaluation of nanoindents: Do we need more reliable mechanical parameters for the characterization of materials?
- Nanoindentation investigation of solid-solution strengthening in III-V semiconductor alloys
- Comparison between conventional Vickers hardness and indentation hardness obtained with different instruments
- On the pressure dependence of the indentation modulus
- A review on the reverse analysis for the extraction of mechanical properties using instrumented Vickers indentation
- Articles Applied
- Quasi-static and dynamic depth-sensing indentation measurements to characterize wear and mar resistance of coating–polymer systems
- Obtaining mechanical parameters for metallisation stress sensor design using nanoindentation
- Direct measurement of nanoindentation area function by metrological AFM
- A usable concept for the indentation of thin porous films
- Analysis of the ductile/brittle transition during a scratch test performed into polymeric film deposited on a PMMA substrate
- Nanomechanical and nanotribological properties of polymeric ultrathin films for nanoimprint lithography
- Adhesive and nanomechanical properties of polymeric films deposited on silicon
- Modelling of the nanoindentation process of ultrathin films
- Regular articles
- Experimental investigation and thermodynamic calculation in the Al–Be–Si ternary system
- Thermodynamic assessment of the Ca–Sn system
- Interfacial reaction between Cu and Ti2SnC during processing of Cu–Ti2SnC composite
- Effects of heat treatment on the lubricated sliding wear behaviour of zinc-based alloy containing nickel under varying test conditions
- Influence of Ce, K, and Na on spheroidization of eutectic carbides in low-tungsten white cast iron
- Notifications/Mitteilungen
- Personal/Personelles
- Press/Presse
