Abstract
Silicone polymeric films were deposited on silicon substrate, and their adhesive and nanomechanical properties were studied. The surface characterization and tribological (wear) behaviour were investigated using atomic force microscopy. The surface Gibbs energy was estimated locally, using a special test rig where the contact angle of very small (with a diameter of about 100 μm) sessile drops was measured by processing of the image from a camera. The nanomechanical properties of the films were tested by using Hysitron’s test instruments. Such films seem to be interesting for application on contact surfaces of microgrippers used in assembly processes in micro electro mechanical systems and nanotechnologies.
References
[1] B. Bhushan (Ed.): Handbook of Nanotechnology, Springer Verlag, Berlin, 2004.10.1007/3-540-29838-XSuche in Google Scholar
[2] I. Sridhar, K.L. Johnson, N.A. Fleck: J. Phys. D: Appl. Phys. 30 (1997) 1710.10.1088/0022-3727/30/12/004Suche in Google Scholar
[3] E.S. Yoon, S.H. Yang; H.C. Han, H. Kong:Wear254 (2003) 974.10.1016/S0043-1648(03)00302-8Suche in Google Scholar
[4] M.B. Cohn, K.F. Bohringer, J.M. Noworolski, A. Singh, Ch.G. Keller, K.Y. Goldberg, R.T. Howe: Microassembly Technologies for MEMS, University of California, Berkeley, CA, 2003.Suche in Google Scholar
[5] H. van Brussel, J. Peirs D. Reynaerts, A. Delchambre, G. Reinhart, N. Roth, M. Weck, E. Zussman: Annals CIRP 49/2 (2000) 1.10.1016/S0007-8506(07)63450-7Suche in Google Scholar
[6] C. Pagano, E. Ferraris, M. Malosio, I. Fassi, in: H.N. Hansen, L. Alting (Eds.), Proc. CIRP Seminar on Micro and Nano Technology, 2003 Micro Engineering, University of Denmark, 2003, p. 81.Suche in Google Scholar
[7] P. Rosciszewski, M. Zielecka: Silicones: Properties and Application, WNT, Warszawa 2002 [in Polish].Suche in Google Scholar
[8] A.W. Neumann, J.K. Spelt (Eds.): Applied Surface Thermodynamics, Marcel Dekker, New York, 1996.Suche in Google Scholar
[9] M. Zenkiewicz: Adhesion and Modification of Surface Laser of High-molecular Compounds, WNT, Warszawa 2000 [in Polish].Suche in Google Scholar
© 2005 Carl Hanser Verlag, München
Artikel in diesem Heft
- Frontmatter
- Editorial
- nanomech 5
- Articles Basic
- Quantitative evaluation of nanoindents: Do we need more reliable mechanical parameters for the characterization of materials?
- Nanoindentation investigation of solid-solution strengthening in III-V semiconductor alloys
- Comparison between conventional Vickers hardness and indentation hardness obtained with different instruments
- On the pressure dependence of the indentation modulus
- A review on the reverse analysis for the extraction of mechanical properties using instrumented Vickers indentation
- Articles Applied
- Quasi-static and dynamic depth-sensing indentation measurements to characterize wear and mar resistance of coating–polymer systems
- Obtaining mechanical parameters for metallisation stress sensor design using nanoindentation
- Direct measurement of nanoindentation area function by metrological AFM
- A usable concept for the indentation of thin porous films
- Analysis of the ductile/brittle transition during a scratch test performed into polymeric film deposited on a PMMA substrate
- Nanomechanical and nanotribological properties of polymeric ultrathin films for nanoimprint lithography
- Adhesive and nanomechanical properties of polymeric films deposited on silicon
- Modelling of the nanoindentation process of ultrathin films
- Regular articles
- Experimental investigation and thermodynamic calculation in the Al–Be–Si ternary system
- Thermodynamic assessment of the Ca–Sn system
- Interfacial reaction between Cu and Ti2SnC during processing of Cu–Ti2SnC composite
- Effects of heat treatment on the lubricated sliding wear behaviour of zinc-based alloy containing nickel under varying test conditions
- Influence of Ce, K, and Na on spheroidization of eutectic carbides in low-tungsten white cast iron
- Notifications/Mitteilungen
- Personal/Personelles
- Press/Presse
Artikel in diesem Heft
- Frontmatter
- Editorial
- nanomech 5
- Articles Basic
- Quantitative evaluation of nanoindents: Do we need more reliable mechanical parameters for the characterization of materials?
- Nanoindentation investigation of solid-solution strengthening in III-V semiconductor alloys
- Comparison between conventional Vickers hardness and indentation hardness obtained with different instruments
- On the pressure dependence of the indentation modulus
- A review on the reverse analysis for the extraction of mechanical properties using instrumented Vickers indentation
- Articles Applied
- Quasi-static and dynamic depth-sensing indentation measurements to characterize wear and mar resistance of coating–polymer systems
- Obtaining mechanical parameters for metallisation stress sensor design using nanoindentation
- Direct measurement of nanoindentation area function by metrological AFM
- A usable concept for the indentation of thin porous films
- Analysis of the ductile/brittle transition during a scratch test performed into polymeric film deposited on a PMMA substrate
- Nanomechanical and nanotribological properties of polymeric ultrathin films for nanoimprint lithography
- Adhesive and nanomechanical properties of polymeric films deposited on silicon
- Modelling of the nanoindentation process of ultrathin films
- Regular articles
- Experimental investigation and thermodynamic calculation in the Al–Be–Si ternary system
- Thermodynamic assessment of the Ca–Sn system
- Interfacial reaction between Cu and Ti2SnC during processing of Cu–Ti2SnC composite
- Effects of heat treatment on the lubricated sliding wear behaviour of zinc-based alloy containing nickel under varying test conditions
- Influence of Ce, K, and Na on spheroidization of eutectic carbides in low-tungsten white cast iron
- Notifications/Mitteilungen
- Personal/Personelles
- Press/Presse