Aberration correction in electron microscopy
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Harald Rose
Abstract
Spherical and chromatic aberrations limit the resolution of conventional electron microscopes. Both defects are unavoidable in the case of static rotationally symmetric electromagnetic fields (Scherzer theorem). To compensate for these aberrations, multipole correctors or electron mirrors are required .The correction of the resolution-limiting aberrations is demonstrated for the hexapole corrector, the quadrupole-octopole corrector, and the tetrode mirror. Electron mirrors require a magnetic beam separator, which must be free of second-order aberrations. The multipole correctors are highly symmetric telescopic systems compensating for the defects of the round lenses. The hexapole corrector has the simplest structure yet eliminates only third-order spherical aberration and coma, whereas the mirror and the quadrupole-octopole (QO) corrector are able to correct the chromatic aberration as well. The QO corrector eliminates chromatic aberration by means of crossed electric and magnetic quadrupoles and the third-order spherical aberration by octopoles. At present, aberration-corrected electron microscopes obtain a resolution limit of about 1 Å.
Dedicated to Professor Dr. Knut Urban on the occasion of his 65th birthday
Funding statement: I want to thank P. Hartel, H. Mueller, and S. Uhlemann, CEOS-GmbH, for placing Figs. 2, 4, and 8 at my disposal and W. Wan, LBNL, for helpful discussions and assistance. Support by U.S. DOE Contract No. DE-AC03-76SF00098 is gratefully acknowledged
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© 2006 Carl Hanser Verlag, München
Articles in the same Issue
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Articles in the same Issue
- Frontmatter
- Editorial
- Professor Dr. Knut Urban 65 Years
- Basic
- Ordering processes and atomic defects in FeCo
- Atomic resolution electron tomography: a dream?
- Electron tomography of microelectronic device interconnects
- Aberration correction in electron microscopy
- Off-axis electron holography: Materials analysis at atomic resolution
- Determination of phases of complex scattering amplitudes and two-particle structure factors by investigating diffractograms of thin amorphous foils
- Prospects of the multislice method for CBED pattern calculation
- Electron energy-loss spectrometry for metals:some thoughts beyond microanalysis
- Quantitative assessment of nanoparticle size distributions from HRTEM images
- Quantitative microstructural and spectroscopic investigation of inversion domain boundaries in sintered zinc oxide ceramics doped with iron oxide
- Structural domains in antiferromagnetic LaFeO3 thin films
- Short-range order of liquid Ti72.3Fe27.7 investigated by a combination of neutron scattering and X-ray diffraction
- Extended interfacial structure between two asymmetrical facets of a Σ = 9 grain boundary in copper
- Dislocation imaging in fcc colloidal single crystals
- Applied
- Omega phase transformation – morphologies and mechanisms
- Mixed (Sr1 − xCax)33Bi24Al48O141 fullerenoids: the defect structure analysed by (S)TEM techniques
- Wetting of aluminium-based complex metallic alloys
- Annealing-induced phase transitions in a Zr–Ti–Nb–Cu–Ni–Al bulk metallic glass matrix composite containing quasicrystalline precipitates
- Special planar defects in the structural complex metallic alloys of Al–Pd–Mn and Al–Ni–Rh
- On the formation of Si nanowires by molecular beam epitaxy
- Self-induced oscillations in Si and other semiconductors
- Growth, interface structure, and magnetic properties of Fe/GaAs and Fe3Si/GaAs hybrid systems
- An investigation of improved titanium/titanium nitride barriers for submicron aluminum-filled contacts by energy-filtered transmission electron microscopy
- Radiation damage during HRTEM studies in pure Al and Al alloys
- Cross-sectional high-resolution transmission electron microscopy at Mo/Si multilayer stacks
- Structural properties of the fiber –matrix interface in carbon-fiber/carbon-matrix composites and interfaces between carbon layers and planar substrates
- Microstructure and properties of surface-treated Timetal 834
- Notifications
- Personal
- Conferences
