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Cross-sectional high-resolution transmission electron microscopy at Mo/Si multilayer stacks

  • Thomas Höche
Published/Copyright: February 12, 2022
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International Journal of Materials Research
From the journal International Journal of Materials Research Volume 97 Issue 7

Abstract

Using a Mo/Si multilayer stack, capabilities and limits of high-resolution transmission electron microscopy with respect to thin film analysis are pointed out. Image processing is shown to provide non-subjective criteria for the determination of layer thicknesses. In comparison to measurements by X-ray reflectometry, an integrating method capable of determining multilayer periodicities, preparation and observation artefacts in transmission electron microscopy is discussed. Special emphasis is placed on cleavage as a powerful method for TEM sample preparation, its advantages and disadvantages.

Keywords: Mo/Si multilayers; High-resolution transmission electron microscopy; Image processing

Dedicated to Professor Dr. Knut Urban on the occasion of his 65th birthday

Dr. Thomas Höche Leibniz-Institut für Oberflächenmodifizierung e.V. Permoser Straße 15, D-04318 Leipzig, Germany Tel.: +49 341 235 3310 Fax: +49 341 235 2313

Funding statement: This study was initiated by A. Köhler (now with: von Ardenne Anlagentechnik GmbH). I wish to cordially thank J. W. Gerlach (IOM Leipzig) for administering reflectometry measurements, fruitful discussions, and helpful suggestions. The assistance of R. Scholz (Max Planck Institute for Microstructure Physics in Halle) in sample cleaving proved particularly valuable and is gratefully acknowledged. G. Otto (IOT GmbH), B. Ocker (Singulus Technologies AG), and M. Scherer (Leybold Optics) provided the multilayer sample and access to the high-resolution TEM facilities at the Max Planck Institute for Microstructure Physics in Halle was bestowed by U. M. Gösele

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Received: 2006-01-12
Accepted: 2006-04-06
Published Online: 2022-02-12

© 2006 Carl Hanser Verlag, München

Articles in the same Issue

  1. Frontmatter
  2. Editorial
  3. Professor Dr. Knut Urban 65 Years
  4. Basic
  5. Ordering processes and atomic defects in FeCo
  6. Atomic resolution electron tomography: a dream?
  7. Electron tomography of microelectronic device interconnects
  8. Aberration correction in electron microscopy
  9. Off-axis electron holography: Materials analysis at atomic resolution
  10. Determination of phases of complex scattering amplitudes and two-particle structure factors by investigating diffractograms of thin amorphous foils
  11. Prospects of the multislice method for CBED pattern calculation
  12. Electron energy-loss spectrometry for metals:some thoughts beyond microanalysis
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  16. Short-range order of liquid Ti72.3Fe27.7 investigated by a combination of neutron scattering and X-ray diffraction
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  18. Dislocation imaging in fcc colloidal single crystals
  19. Applied
  20. Omega phase transformation – morphologies and mechanisms
  21. Mixed (Sr1 − xCax)33Bi24Al48O141 fullerenoids: the defect structure analysed by (S)TEM techniques
  22. Wetting of aluminium-based complex metallic alloys
  23. Annealing-induced phase transitions in a Zr–Ti–Nb–Cu–Ni–Al bulk metallic glass matrix composite containing quasicrystalline precipitates
  24. Special planar defects in the structural complex metallic alloys of Al–Pd–Mn and Al–Ni–Rh
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  27. Growth, interface structure, and magnetic properties of Fe/GaAs and Fe3Si/GaAs hybrid systems
  28. An investigation of improved titanium/titanium nitride barriers for submicron aluminum-filled contacts by energy-filtered transmission electron microscopy
  29. Radiation damage during HRTEM studies in pure Al and Al alloys
  30. Cross-sectional high-resolution transmission electron microscopy at Mo/Si multilayer stacks
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  33. Notifications
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https://doi.org/10.1515/ijmr-2006-0164
Keywords for this article
Mo/Si multilayers; High-resolution transmission electron microscopy; Image processing

Articles in the same Issue

  1. Frontmatter
  2. Editorial
  3. Professor Dr. Knut Urban 65 Years
  4. Basic
  5. Ordering processes and atomic defects in FeCo
  6. Atomic resolution electron tomography: a dream?
  7. Electron tomography of microelectronic device interconnects
  8. Aberration correction in electron microscopy
  9. Off-axis electron holography: Materials analysis at atomic resolution
  10. Determination of phases of complex scattering amplitudes and two-particle structure factors by investigating diffractograms of thin amorphous foils
  11. Prospects of the multislice method for CBED pattern calculation
  12. Electron energy-loss spectrometry for metals:some thoughts beyond microanalysis
  13. Quantitative assessment of nanoparticle size distributions from HRTEM images
  14. Quantitative microstructural and spectroscopic investigation of inversion domain boundaries in sintered zinc oxide ceramics doped with iron oxide
  15. Structural domains in antiferromagnetic LaFeO3 thin films
  16. Short-range order of liquid Ti72.3Fe27.7 investigated by a combination of neutron scattering and X-ray diffraction
  17. Extended interfacial structure between two asymmetrical facets of a Σ = 9 grain boundary in copper
  18. Dislocation imaging in fcc colloidal single crystals
  19. Applied
  20. Omega phase transformation – morphologies and mechanisms
  21. Mixed (Sr1 − xCax)33Bi24Al48O141 fullerenoids: the defect structure analysed by (S)TEM techniques
  22. Wetting of aluminium-based complex metallic alloys
  23. Annealing-induced phase transitions in a Zr–Ti–Nb–Cu–Ni–Al bulk metallic glass matrix composite containing quasicrystalline precipitates
  24. Special planar defects in the structural complex metallic alloys of Al–Pd–Mn and Al–Ni–Rh
  25. On the formation of Si nanowires by molecular beam epitaxy
  26. Self-induced oscillations in Si and other semiconductors
  27. Growth, interface structure, and magnetic properties of Fe/GaAs and Fe3Si/GaAs hybrid systems
  28. An investigation of improved titanium/titanium nitride barriers for submicron aluminum-filled contacts by energy-filtered transmission electron microscopy
  29. Radiation damage during HRTEM studies in pure Al and Al alloys
  30. Cross-sectional high-resolution transmission electron microscopy at Mo/Si multilayer stacks
  31. Structural properties of the fiber –matrix interface in carbon-fiber/carbon-matrix composites and interfaces between carbon layers and planar substrates
  32. Microstructure and properties of surface-treated Timetal 834
  33. Notifications
  34. Personal
  35. Conferences
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