Home Solid-state reaction in Ni/Si multilayered films, characterized by magneto-optical and optical spectroscopies
Article
Licensed
Unlicensed Requires Authentication

Solid-state reaction in Ni/Si multilayered films, characterized by magneto-optical and optical spectroscopies

  • Young Pak Lee EMAIL logo , Jin Bae Kim , Young Joon Yoo and Yuri V. Kudryavtsev
Published/Copyright: January 7, 2022
Become an author with De Gruyter Brill

Abstract

Solid-state reactions, induced by ion-beam mixing (IBM) and thermal annealing, in Ni/Si multilayered films (MLF) with an overall stoichiometry of Ni2Si, NiSi and NiSi2, and with a constant Ni sublayer thickness (nominally, 3.0 nm), were studied by optical and magneto-optical spectroscopies as well as X-ray diffraction (XRD). The layer mixing was performed with Ar+ ions of an energy of 80 keV and a dose of 1.5 × 1016 Ar+/cm2. It was shown that the IBM leads to structural changes in the Ni/Si MLF, which cannot be easily detected by XRD but are recognized by optical tools. An annealing at 1073 K of the Ni/Si MLF with an overall stoichiometry of NiSi and NiSi2 induces formation of predominantly the η-NiSi and the NiSi2 phases, respectively. IBM of all the investigated Ni/Si MLF leads to the formation of regions with a short-range order of the crystalline NiSi silicide, and of Ni2Si (and/or Ni3Si) additionally for the Ni/Si MLF with an overall stoichiometry of Ni2Si.


Prof. Young Pak Lee q-Psi and Dept. of Physics, Hanyang University B108, HIT 17 Haengdang-Dong, Sungdong-Ku, Seoul, 133-791 Korea Tel.: +82 2 2281 5572 Fax: +82 2 2281 5573

References

[1] M.A. Hollander, B.J. Thijsse, E.J. Mittemeijer: Phys. Rev. B 42 (1990) 5481.10.1103/PhysRevB.42.5481Search in Google Scholar

[2] J.F. Liu, J.Y. Feng, J. Zhu: Appl. Phys. Lett. 80 (2002) 270.10.1063/1.1434311Search in Google Scholar

[3] D. Mangelinck, P. Gas, A. Grab, B. Pichaud, O. Thomas: J. Appl. Phys. 79 (1996) 4078.10.1063/1.361770Search in Google Scholar

[4] Y.P. Lee, K.W. Kim, Y.V. Kudryavtsev, V.V. Nemoshkalenko, B. Szymański: Eur. Phys. J. B 26 (2002) 41.Search in Google Scholar

[5] R.M.A. Azzam, N.M. Bashara: Ellipsometry and Polarized Light, North-Holland, Amsterdam (1977).Search in Google Scholar

[6] C.J. Tsai, K.H. Yu: Thin Solid Films 350 (1999) 91.10.1016/S0040-6090(99)00286-2Search in Google Scholar

[7] B. Bokhonov, M. Korchagin: J. Alloys Comp. 319 (2001) 187.10.1016/S0925-8388(01)00902-1Search in Google Scholar

[8] V.S. Babu, A.S. Pavlovic, M.S. Seehra: J. Appl. Phys. 79 (1996) 5230.10.1063/1.361856Search in Google Scholar

[9] H. Ehrenreich, H.P. Philipp, D.J. Olechna: Phys. Rev. 131 (1963) 2469.10.1103/PhysRev.131.2469Search in Google Scholar

[10] M. Shiga, G.P. Pells: J. Phys. C 2 (1969) 1847.10.1088/0022-3719/2/10/319Search in Google Scholar

[11] U. Schmid, J. Humlicek, F. Lukeš, M. Cardona, U. Presting, H. Kibbel, E. Kaspar, K. Eberl, W. Wegscheider, G. Abstreiter: Phys. Rev. B 45 (1992) 6793.10.1103/PhysRevB.45.6793Search in Google Scholar

[12] L.A. Clevenger, C.V. Thompson: J. Appl. Phys. 67 (1990) 1325.10.1063/1.345685Search in Google Scholar

Received: 2004-05-25
Accepted: 2005-04-09
Published Online: 2022-01-07

© 2006 Carl Hanser Verlag, München

Articles in the same Issue

  1. Contents
  2. Phase separation in Si–(B)–C–N polymer-derived ceramics
  3. Solidification curves for commercial Mg alloys obtained from heat-transfer modeled DTA experiments
  4. Thermodynamic assessment of the Mg–Nd system
  5. Solid-state reaction in Ni/Si multilayered films, characterized by magneto-optical and optical spectroscopies
  6. Phase diagram of the Co–Cu–Ti system at 850 °C
  7. Effects of an electric field applied during the solution heat treatment of the Al–Mg –Si–Cu alloy AA6111 on the subsequent natural aging kinetics and tensile properties
  8. Fabrication and electrical sliding wear of graphitic Cu–Cr–Zr matrix composites
  9. Further results on creep behaviour of sand-cast Mg–2.8Nd–0.8Zn–0.5Zr–0.3Gd alloy at 0.56 to 0.61Tm under stresses 40 to 90 MPa
  10. On the creep resistance in cast Ni-base superalloys
  11. Formation, stability, and presence of magnesium nitride in magnesium recycling processes
  12. From waste to high strength alloy – recycling of magnesium chips
  13. Sigma phase formation and its effect on mechanical properties in the corrosion-resistant superalloy K44
  14. Personal/Personelles
  15. Press / Presse
  16. Contents
  17. Articles Basic
  18. Phase separation in Si–(B)–C–N polymer-derived ceramics
  19. Solidification curves for commercial Mg alloys obtained from heat-transfer modeled DTA experiments
  20. Thermodynamic assessment of the Mg–Nd system
  21. Solid-state reaction in Ni/Si multilayered films, characterized by magneto-optical and optical spectroscopies
  22. Phase diagram of the Co–Cu–Ti system at 850 °C
  23. Effects of an electric field applied during the solution heat treatment of the Al–Mg –Si–Cu alloy AA6111 on the subsequent natural aging kinetics and tensile properties
  24. Articles Applied
  25. Fabrication and electrical sliding wear of graphitic Cu–Cr–Zr matrix composites
  26. Further results on creep behaviour of sand-cast Mg–2.8Nd–0.8Zn–0.5Zr–0.3Gd alloy at 0.56 to 0.61Tm under stresses 40 to 90 MPa
  27. On the creep resistance in cast Ni-base superalloys
  28. Formation, stability, and presence of magnesium nitride in magnesium recycling processes
  29. From waste to high strength alloy – recycling of magnesium chips
  30. Sigma phase formation and its effect on mechanical properties in the corrosion-resistant superalloy K44
  31. Notifications/Mitteilungen
  32. Personal/Personelles
  33. Press / Presse
Downloaded on 16.11.2025 from https://www.degruyterbrill.com/document/doi/10.3139/ijmr-2006-0023/html
Scroll to top button