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Deposition of fine copper film on samples placed internally and externally to the cathodic cage

  • Fernanda M. Fernandes , Edglay A. RochaFilho , Ivan A. Souza , Igor O. Nascimento , Rômulo R. M. de Sousa , Edalmy O. Almeida , Michelle C. Feitor and Thércio H. C. Costa
Published/Copyright: February 25, 2019
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International Journal of Materials Research
From the journal International Journal of Materials Research Volume 110 Issue 3

Abstract

The cathodic cage plasma nitriding technique is used for thin film deposition. As such, the hollow cathode effect on cage holes is directly related to deposition efficiency. The objective of this work is to study the influence of the cathode length-to-diameter ratio in the deposition of fine copper films on samples placed internally and externally to the cathodic cage, in an argon atmosphere, for 3 h at 420 °C. Compositional, transmittance and morphological characterization of films show copper deposition in all treatments. However, it was observed that substrate temperatures during film deposition influence its morphology. As such, the formation of continuous film on internal samples is observed, whereas external samples show uniformally dispersed nanoparticles as well as the absence of dense film on substrates. As far as the length-to-diameter ratio is concerned, the 1.5 ratio presented the highest deposition efficiency.

Keywords: Cathodic cage; Thin films; Copper nanoparticles; Hollow cathode
∗Correspondence address, Ph.D. Thércio Henrique de Carvalho Costa in Materials Science and Engineering, Mechanical engineering department, Federal University of Rio Grande do Norte, Natal-RN, Brazil, Avenue Senador Salgado Filho – Lagoa Nova, Natal/RN – 59078-970, Brazil, Tel: +55 84 33422233, E-mail: , Orcid: 0000-0001-7429-4273, Web: http://lattes.cnpq.br/3647710047561421

References

[1] M.Naeem, M.Shafiq, M.Zaka-ul-Islam, J.C.Díaz-Guillén, C.M.Lopez-Badillo, N.Ullah, M.Zakaullah: Mater. Lett.189 (2017) 213–216. 10.1016/J.MATLET.2016.12.016Search in Google Scholar

[2] R.F.R.Depner, R.A.Depner, V.Lucca, M.Lovato: Veterinária e Zootecnia22 (2015) 532–543. 10.1590/1806-9061-2016-0277Search in Google Scholar

[3] H.Nagai, S.Mita, I.Takano, T.Honda, M.Sato: Mater. Lett.141 (2015) 235–237. 10.1016/j.matlet.2014.11.056Search in Google Scholar

[4] D.J.dos Santos, N.M.Ito, M.C.L.de Oliveira, L.B.Tavares, M.C.Salvadori, R.A.Antunes: Thin Solid Films.649 (2018) 136–141. 10.1016/j.tsf.2018.01.048Search in Google Scholar

[5] M.Naeem, M.Zaka-ul-Islam, M.Shafiq, M.I.Bashir, J.C.Díaz-Guillén, M.Zakaullah: Surf. Coatings Technol.309 (2017) 738–748. 10.1016/j.surfcoat.2016.10.093Search in Google Scholar

[6] M.I.Bashir, M.Shafiq, M.Naeem, M.Zaka-ul-Islam, J.C.Díaz-Guillén, C.M.Lopez-Badillo, M.Zakaullah: Surf. Coatings Technol.327 (2017) 59–65. 10.1016/j.surfcoat.2017.08.015Search in Google Scholar

[7] A.N.Allenstein, C.M.Lepienski, A.J.A.Buschinelli, S.F.Brunatto: Appl. Surf. Sci.277 (2013) 15–24. 10.1016/j.apsusc.2013.03.055Search in Google Scholar

[8] J.Kaminski, J.Witkowska, T.Plocinski, M.Tarnowski, T.Wierzchon: Int. J. Mater. Res.109 (2018) 443–450. 10.3139/146.111616Search in Google Scholar

[9] A.Nishimoto, K.Nagatsuka, R.Narita, H.Nii, K.Akamatsu: Surf. Coatings Technol.205 (2010) S365–S368. 10.1520/STP153220120023Search in Google Scholar

[10] C.Alves, F.O.de Araújo, K.J.B.Ribeiro, J.A.P.da Costa, R.R.M.Sousa, R.S.de Sousa: Surf. Coatings Technol.201 (2006) 2450–2454. 10.1016/j.surfcoat.2006.04.014Search in Google Scholar

[11] K.J.B.Ribeiro, R.R.M.de Sousa, F.O.de Araújo, R.A.de Brito, J.C.P.Barbosa, C.Alves: Mater. Sci. Eng. A479 (2008) 142–147. 10.1016/J.MSEA.2007.06.033Search in Google Scholar

[12] S. CorujeiraGallo, H.Dong: Vacuum84 (2009) 321–325. 10.1016/J.VACUUM.2009.07.002Search in Google Scholar

[13] M.Naeem, M.Shafiq, M.Zaka-ul-Islam, A.Ashiq, J.C.Díaz-Guillén, M.Shanhzad, M.Zakaullah: Mater. Des.108 (2016) 745–753. 10.1016/J.MATDES.2016.07.044Search in Google Scholar

[14] R.R.M.de Sousa, P.S.Sato, B.C.Viana, C.Alves, A.Nishimoto, P.A.P.Nascente: J. Vac. Sci. Technol. A Vacuum, Surfaces, Film.33 (4) (2015) 41502. 10.1116/1.4919770Search in Google Scholar

[15] M.Zaka-ul-Islam, M.Naeem, M.Shafiq, Sitara, A.J.Al-Rajab, M.Zakaullah: Mater. Res. Express4 (7) (2017) 75304. 10.1016/J.SURFCOAT.2016.10.093Search in Google Scholar

[16] M.Yazıcı, O.Çomaklı, T.Yetim, A.F.Yetim, A.Çelik: Surf. Coatings Technol.261 (2015), 181–188. 10.1016/J.SURFCOAT.2016.10.093Search in Google Scholar

[17] R.Mohammadzadeh, A.Akbari, M.Drouet: Surf. Coatings Technol.258 (2014), 566–573. 10.1016/J.SURFCOAT.2014.08.036Search in Google Scholar

[18] F. de M.Fernandes, T.H. de C.Costa, R.R.M.de Sousa, M.C.Feitor, E. de A.R.Filho, I.A.de Souza: in An. Do Congr. Anu. Da ABM (Editora Blucher, São Paulo, 2017) 2748–2756. 10.5151/1516-392X-30765Search in Google Scholar

[19] F. de M.Fernandes, I.O.Nascimento, R.R.M.de Sousa, I.A.de Souza, B.F.Dantas, J.C.A.Queiroz, T.H. de C.Costa: Tecnol. em Metal. Mater. e Mineração15 (2018) 296. 10.4322/2176-1523.1261Search in Google Scholar

[20] R.R.M.de Sousa, Y.J.L.Moura, P.A.O.de Sousa, J.Q.Medeiros Neto, T.H. de C.Costa, C. AlvesJunior: Mater. Res.17 (2014) 708–713. 10.1590/S1516-14392014005000027Search in Google Scholar

[21] R.R.M.Sousa, F.O.Araújo, K.J.B.Ribeiro, M.W.D.Mendes, J.A.P.Costa, C. AlvesJunior: Mater. Sci. Eng. A465 (2007) 223–227. 10.1016/j.msea.2007.03.007Search in Google Scholar

[22] E.K.Tentardini: doctor thesis, Obtenção e caracterização de filmes finos de (Ti,Al) do tipo multicamadas para aplicação em matrizes, UFRGS, BR (2004).Search in Google Scholar

[23] S.S.da Silva, C. de L.R.Bottoni, L.C.Gontijo, S.O.Ferreira, S.S.da Silva, C. de L.R.Bottoni, L.C.Gontijo, S.O.Ferreira: Matéria (Rio Janeiro)22 (2017). 10.1590/s1517-707620170003.0191Search in Google Scholar

[24] A.Hojabri, F.Hajakbari, N.Soltanpoor, M.S.Hedayati: J. Theor. Appl. Phys.8 (2014) 132. 10.1007/s40094-014-0132-xSearch in Google Scholar

Received: 2018-05-09
Accepted: 2018-08-18
Published Online: 2019-02-25
Published in Print: 2019-03-13

© 2019, Carl Hanser Verlag, München

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https://doi.org/10.3139/146.111737
Keywords for this article
Cathodic cage; Thin films; Copper nanoparticles; Hollow cathode

Articles in the same Issue

  1. Contents
  2. Contents
  3. Original Contributions
  4. Static recrystallization characteristics and kinetics of high-silicon steels for direct quenching and partitioning
  5. Kinetics of intermetallic compound layers during initial period of reaction between mild steel and molten aluminum
  6. Effects of Cr and Zn on the interfacial microstructures of borides in Fe–Cr–B cast steels during hot-dipping in Al–Zn alloys
  7. Hot deformation behaviour of and processing map for an Ni-based austenitic stainless steel
  8. Design, microstructural characterization and heat treatment of novel Cu0.5FeNiVAlx high-entropy alloys
  9. Effects of temperature field and SiC nanoparticles on microstructure and mechanical properties of n-SiCp/Mg-9 %Al composites fabricated by ultrasonication-assisted semi-solid hot pressing of powder
  10. Investigation of the microstructure and mechanical properties of NbB2 particle reinforced aluminum matrix composites
  11. Effect of Al2O3/SiO2 ratio on viscosity and structure of CaO–Al2O3–SiO2–CaF2–MgO slag
  12. Microstructure and oxidation of Ni–Fe2O3 composite coating on AISI 304 stainless steel
  13. Synthesis and performance of Al3+-doped cathode materials 0.6Li[Li1/3Mn2/3]O2 · 0.4Li[Ni1/3Mn1/3Co(1/3-y)Aly]O2 by high temperature solid-state method
  14. Growth and photo-electrochemical properties of rutile TiO2 nanowire arrays prepared by the hydrothermal method
  15. Deposition of fine copper film on samples placed internally and externally to the cathodic cage
  16. DGM News
  17. DGM News
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