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Thermal relaxation of residual stresses in TiN films deposited by arc ion plating

Dedicated to Professor Eckard Macherauch on the occasion of the 80th anniversary of his birth
  • Tatsuya Matsue , Takao Hanabusa and Yasukazu Ikeuchi
Published/Copyright: May 31, 2013
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International Journal of Materials Research
From the journal International Journal of Materials Research Volume 97 Issue 12

Abstract

The present study investigates crystal orientations and residual stresses in TiN films deposited by arc ion plating. TiN films approximately 2.0 μm thick were deposited on a steel substrate. With a bias voltage of 0 V, the TiN film exhibited strong {110} texture, whereas the dominant orientation of the film deposited at −100V was {111}. TiN films had very high compressive residual stresses: −8.6 GPa in the {110} textured film and −10.0 GPa in the {111} textured film. These residual stresses decreased with increasing annealing temperature and the reduction rate was greater for the {111} than for the {100} film. The behavior of residual stresses in the {111} and {110} textured layers of {111}/{110} textured double-layer film was identical to that for single-layer films.

Keywords: TiN film; Residual stress; Texture; X-ray diffraction
* Correspondence address, Tatsuya Matsue, Department of Materials Engineering, Niihama College of Technology, 7-1, Yakumo, Niihama 792-8580, Japan, Tel.: +81897377800. E-mail:

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Received: 2006-4-20
Accepted: 2006-8-3
Published Online: 2013-05-31
Published in Print: 2006-12-01

© 2006, Carl Hanser Verlag, München

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https://doi.org/10.3139/146.101397
Keywords for this article
TiN film; Residual stress; Texture; X-ray diffraction

Articles in the same Issue

  1. Contents
  2. Contents
  3. Basic
  4. Microcracks in superalloys: From local in-situ measurements to lifetime prediction
  5. Residual stress development due to thermal cycling of the particle-reinforced alloy EN AW-6061– experiment and simulation
  6. Analysis of defect configurations with positron lifetime measurements by pulsed low energy beams
  7. The nature of the TRIP-effect in metastable austenitic steels
  8. Investigation and modelling of theplasticity-induced martensite formation in metastable austenites
  9. Thermal relaxation of residual stresses in TiN films deposited by arc ion plating
  10. On the Hall–Petch relation between flow stress and grain size
  11. Polymer-derived Si–C–N ceramics reinforced by single-wall carbon nanotubes
  12. Applied
  13. Strengthening of silicon nitride ceramics by shot peening
  14. Assessment of creep behaviour of the die-cast cylinder-head alloy AlSi6Cu4-T6
  15. New aspects of bending rotation fatigue in ultra-fine-grained pseudo-elastic NiTi wires
  16. Anwendung des lokalen Dauerfestigkeitskonzepts zur Bewertung der Wirksamkeit von Schweißnahtnachbehandlungsmaßnahmen
  17. Investigation of the thermoelastic response of long-fibre reinforced thermoplasticsby comparison with different non-contactstrain measurement techniques
  18. Effect of surface roughening on increasingthe spectral selectivity of cermet solarselective absorbers
  19. Experimental observations on thecorrelation between microstructure andfracture of multiphase steels
  20. Pressure solidification – a novel moulding technique for plastic parts with superior dimensional stability
  21. DGM News
  22. DGM News
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