Home Fabrication of bio-inspired 3D nanoimprint mold using acceleration-voltage-modulation electron-beam lithography
Article
Licensed
Unlicensed Requires Authentication

Fabrication of bio-inspired 3D nanoimprint mold using acceleration-voltage-modulation electron-beam lithography

  • Kohei Goto and Jun Taniguchi EMAIL logo
Published/Copyright: August 10, 2019
Become an author with De Gruyter Brill
Author Information
Advanced Optical Technologies
From the journal Advanced Optical Technologies Volume 8 Issue 3-4

Abstract

Methods for fabricating micro- and nanoscale three-dimensional (3D) structures such as electron-beam lithography (EBL) attracted attention in various fields. In EBL, an acceleration-voltage modulation method can be used to control the developing depth of the structure. In this study, we fabricated a rose petal structure using acceleration-voltage modulation. Using a rose petal mold, plastic- and silver-duplicated rose petals were prepared using nano-imprint lithography (NIL). We demonstrated that various complex 3D structures and materials can be duplicated using NIL by applying an acceleration-voltage modulation method.

Keywords: acceleration-voltage modulation; electron beam lithography; nanoimprint mold; three-dimensional structure

References

[1] K. Koch, B. Bhushan, Y. C. Jung and W. Barthlott, Soft Matter 5, 1386 (2009).10.1039/b818940dSearch in Google Scholar

[2] N. A. Patankar, Langmuir 20, 8209 (2004).10.1021/la048629tSearch in Google Scholar PubMed

[3] Y. M. Park, M. Gang, Y. H. Seo and B. H. Kim, Thin Solid Films 520, 362 (2011).10.1016/j.tsf.2011.07.013Search in Google Scholar

[4] A. Fernandez, A. Francone, L. Thamdrup, A. Johansson, B. Bilenberg, et al., ACS Appl. Mater. Interfaces 9, 7701 (2017).10.1021/acsami.6b13615Search in Google Scholar PubMed

[5] K. Y. Yeh, K. H. Cho, Y. H. Yeh, A. Promraksa, C. H. Huang, et al., Nanotechnology 25, 345303 (2014).10.1088/0957-4484/25/34/345303Search in Google Scholar PubMed

[6] B. Bhushan and M. Nosonovsky, Phil. Trans. R. Soc. A 368, 4713 (2010).10.1098/rsta.2010.0203Search in Google Scholar PubMed

[7] N. Unno and J. Taniguchi, J. Phys. Conf. Ser. 106, 012021 (2008).10.1088/1742-6596/106/1/012021Search in Google Scholar

[8] Y. Ishii and J. Taniguchi, Microelectron. Eng. 84, 912 (2007).10.1016/j.mee.2007.01.133Search in Google Scholar

[9] W. Barthlott and C. Neinhuis, Planta 202, 1 (1994).10.1007/s004250050096Search in Google Scholar

[10] H. J. Ensikat, P. D. Kuru, C. Neinhuis and W. Barthlott, Beilstein J. Nanotechnol. 2, 152 (2011).10.3762/bjnano.2.19Search in Google Scholar PubMed PubMed Central

[11] L. Feng, Y. Zhang, J. Xi, Y. Zhu, N. Wang, et al., Langmuir 24, 4114 (2008).10.1021/la703821hSearch in Google Scholar PubMed

[12] D. Brian and B. Bhushan, Philos. Trans. R. Soc. Lond. A Math., Phys. Eng. Sci. 368, 1929 (2010).Search in Google Scholar

[13] W. Li, J. C. Weaver and G. V. Lauder, J. Exp. Biol. 217, 4775 (2014).Search in Google Scholar

[14] O. Johannes and G. V. Lauder, J. Exp. Biol. 215, 785 (2012).10.1242/jeb.063040Search in Google Scholar PubMed

[15] B. Stuart and D. M. Bagnall, Appl. Phys. Lett. 93, 133108 (2008).10.1063/1.2993231Search in Google Scholar

[16] B. Edward, T. Stein, R. Pogreb, and D. Aurbach, J. Phys. Chem. C 113, 5568 (2009).10.1021/jp900594kSearch in Google Scholar

[17] S. Y. Chou, P. R. Krauss, W. Zhang, L. Guo and L. Zhuang, J. Vac. Sci. Technol. B 15, 2897 (1997).10.1116/1.589752Search in Google Scholar

[18] S. Y. Chou, P. R. Krauss and P. J. Renstron, Appl. Phys. Lett. 67, 3114 (1995).10.1063/1.114851Search in Google Scholar

[19] S. Y. Chou, P. R. Krauss and P. J. Renstron, J. Vac. Sci. Technol. B 14, 4129 (1996).10.1116/1.588605Search in Google Scholar

[20] A. Gangnaik, Y. M. Geargiev, B. McCathy, N. Petkov, V. Djara, et al., Microelectronic. Eng. 141, 126 (2014).10.1016/j.mee.2014.06.013Search in Google Scholar

[21] K. D. Schock, F. E. Prins, S.Strahle, and D. P. Kem, J. Vac. Sci. Technol. B 15, 2323 (1997).10.1116/1.589638Search in Google Scholar

Received: 2019-02-01
Accepted: 2019-03-15
Published Online: 2019-08-10
Published in Print: 2019-06-26

©2019 THOSS Media & De Gruyter, Berlin/Boston

Articles in the same Issue

  1. Cover and Frontmatter
  2. Community
  3. News
  4. Views
  5. Direct-write grayscale lithography
  6. Topical Issue
  7. Editorial
  8. Toward full three-dimensional (3D) high volume fabrication
  9. Letter
  10. Single-digit 6-nm multilevel patterns by electron beam grayscale lithography
  11. Research Articles
  12. Fabrication of 3D microstructures using grayscale lithography
  13. Particle size and polymer formation dependence of nanostructure in antireflective surfaces by injection molding process
  14. Development of a metrology technique suitable for in situ measurement and corrective manufacturing of freeform optics
  15. Fabrication of the large-area flexible transparent heaters using electric-field-driven jet deposition micro-scale 3D printing
  16. Manufacturing strategies for scalable high-precision 3D printing of structures from the micro to the macro range
  17. Beyond grayscale lithography: inherently three-dimensional patterning by Talbot effect
  18. Tutorial
  19. Femtosecond lasers: the ultimate tool for high-precision 3D manufacturing
  20. Review Article
  21. 3D nanofabrication using controlled-acceleration-voltage electron beam lithography with nanoimprinting technology
  22. Review Article
  23. Description of aspheric surfaces
  24. Research Article
  25. Accounting for laser beam characteristics in the design of freeform optics for laser material processing
  26. Review Article
  27. Fabrication of bio-inspired 3D nanoimprint mold using acceleration-voltage-modulation electron-beam lithography
https://doi.org/10.1515/aot-2019-0017
Keywords for this article
acceleration-voltage modulation; electron beam lithography; nanoimprint mold; three-dimensional structure

Articles in the same Issue

  1. Cover and Frontmatter
  2. Community
  3. News
  4. Views
  5. Direct-write grayscale lithography
  6. Topical Issue
  7. Editorial
  8. Toward full three-dimensional (3D) high volume fabrication
  9. Letter
  10. Single-digit 6-nm multilevel patterns by electron beam grayscale lithography
  11. Research Articles
  12. Fabrication of 3D microstructures using grayscale lithography
  13. Particle size and polymer formation dependence of nanostructure in antireflective surfaces by injection molding process
  14. Development of a metrology technique suitable for in situ measurement and corrective manufacturing of freeform optics
  15. Fabrication of the large-area flexible transparent heaters using electric-field-driven jet deposition micro-scale 3D printing
  16. Manufacturing strategies for scalable high-precision 3D printing of structures from the micro to the macro range
  17. Beyond grayscale lithography: inherently three-dimensional patterning by Talbot effect
  18. Tutorial
  19. Femtosecond lasers: the ultimate tool for high-precision 3D manufacturing
  20. Review Article
  21. 3D nanofabrication using controlled-acceleration-voltage electron beam lithography with nanoimprinting technology
  22. Review Article
  23. Description of aspheric surfaces
  24. Research Article
  25. Accounting for laser beam characteristics in the design of freeform optics for laser material processing
  26. Review Article
  27. Fabrication of bio-inspired 3D nanoimprint mold using acceleration-voltage-modulation electron-beam lithography
Sign up now to receive a 20% welcome discount
Institutional Access
How does access work?
Have an idea on how to improve our website?
Please write us.
© 2025 De Gruyter Brill
Downloaded on 7.9.2025 from https://www.degruyterbrill.com/document/doi/10.1515/aot-2019-0017/html
Scroll to top button