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3D nanofabrication using controlled-acceleration-voltage electron beam lithography with nanoimprinting technology

  • Noriyuki Unno EMAIL logo and Jun Taniguchi
Published/Copyright: May 30, 2019
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Advanced Optical Technologies
From the journal Advanced Optical Technologies Volume 8 Issue 3-4

Abstract

Nanostructures have unique characteristics, such as large specific surface areas, that provide a wide range of engineering applications, such as electronics, optics, biotics, and thermal and fluid dynamics. They can be used to downsize many engineering products; therefore, new nanofabrication techniques are strongly needed to meet this demand. A simple fabrication process with high throughput is necessary for low-cost nanostructures. In recent years, three-dimensional (3D) nanostructures have attracted much attention because they dramatically opened up new fields for applications. However, conventional techniques for fabricating 3D nanostructures contain many complex processes, such as multiple patterning lithography, metal deposition, lift-off, etching, and chemical-mechanical polishing. This paper focuses on controlled-acceleration-voltage electron beam lithography (CAV-EBL), which can fabricate 3D nanostructures in one shot. The applications of 3D nanostructures are introduced, and the conventional 3D patterning technique is compared with CAV-EBL and various 3D patterning techniques using CAV-EBL with nanoimprinting technology. Finally, the outlook for next-generation devices that can be fabricated by CAV-EBL is presented.

Keywords: 3D patterning; electron beam lithography; nanoimprint; nanostructure; roll substrate

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Received: 2019-01-08
Accepted: 2019-04-25
Published Online: 2019-05-30
Published in Print: 2019-06-26

©2019 THOSS Media & De Gruyter, Berlin/Boston

Articles in the same Issue

  1. Cover and Frontmatter
  2. Community
  3. News
  4. Views
  5. Direct-write grayscale lithography
  6. Topical Issue
  7. Editorial
  8. Toward full three-dimensional (3D) high volume fabrication
  9. Letter
  10. Single-digit 6-nm multilevel patterns by electron beam grayscale lithography
  11. Research Articles
  12. Fabrication of 3D microstructures using grayscale lithography
  13. Particle size and polymer formation dependence of nanostructure in antireflective surfaces by injection molding process
  14. Development of a metrology technique suitable for in situ measurement and corrective manufacturing of freeform optics
  15. Fabrication of the large-area flexible transparent heaters using electric-field-driven jet deposition micro-scale 3D printing
  16. Manufacturing strategies for scalable high-precision 3D printing of structures from the micro to the macro range
  17. Beyond grayscale lithography: inherently three-dimensional patterning by Talbot effect
  18. Tutorial
  19. Femtosecond lasers: the ultimate tool for high-precision 3D manufacturing
  20. Review Article
  21. 3D nanofabrication using controlled-acceleration-voltage electron beam lithography with nanoimprinting technology
  22. Review Article
  23. Description of aspheric surfaces
  24. Research Article
  25. Accounting for laser beam characteristics in the design of freeform optics for laser material processing
  26. Review Article
  27. Fabrication of bio-inspired 3D nanoimprint mold using acceleration-voltage-modulation electron-beam lithography
https://doi.org/10.1515/aot-2019-0004
Keywords for this article
3D patterning; electron beam lithography; nanoimprint; nanostructure; roll substrate

Articles in the same Issue

  1. Cover and Frontmatter
  2. Community
  3. News
  4. Views
  5. Direct-write grayscale lithography
  6. Topical Issue
  7. Editorial
  8. Toward full three-dimensional (3D) high volume fabrication
  9. Letter
  10. Single-digit 6-nm multilevel patterns by electron beam grayscale lithography
  11. Research Articles
  12. Fabrication of 3D microstructures using grayscale lithography
  13. Particle size and polymer formation dependence of nanostructure in antireflective surfaces by injection molding process
  14. Development of a metrology technique suitable for in situ measurement and corrective manufacturing of freeform optics
  15. Fabrication of the large-area flexible transparent heaters using electric-field-driven jet deposition micro-scale 3D printing
  16. Manufacturing strategies for scalable high-precision 3D printing of structures from the micro to the macro range
  17. Beyond grayscale lithography: inherently three-dimensional patterning by Talbot effect
  18. Tutorial
  19. Femtosecond lasers: the ultimate tool for high-precision 3D manufacturing
  20. Review Article
  21. 3D nanofabrication using controlled-acceleration-voltage electron beam lithography with nanoimprinting technology
  22. Review Article
  23. Description of aspheric surfaces
  24. Research Article
  25. Accounting for laser beam characteristics in the design of freeform optics for laser material processing
  26. Review Article
  27. Fabrication of bio-inspired 3D nanoimprint mold using acceleration-voltage-modulation electron-beam lithography
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