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Development of a metrology technique suitable for in situ measurement and corrective manufacturing of freeform optics

  • Dali Ramu Burada

    Dali Ramu Burada is a research scholar at the Indian Institute of Technology (IIT) Delhi. He received his M.Tech. in applied optics from the IIT Delhi in 2012. He is working in the field of optical metrology since 2012. His area of interest is metrology of nonconventional optical surfaces such as freeform optics for imaging and nonimaging applications.

         , Kamal K. Pant

    Kamal K. Pant is a research scholar at the IIT Delhi. He received his M.Tech. in applied optics from the IIT Delhi in 2010. Currently, he is working as a scientist in IRDE Dehradun. His research interests are development of freeform optics and diffractive optics for imaging applications, subaperture stitching-based metrology of freeform optics, and SHS-based metrology.

         , Vinod Mishra

    Vinod Mishra is a technical officer at CSIR-CSIO Chandigarh. He finished his Master’s in mechanical engineering and pursuing Ph.D. at the IIT Delhi. His area of research is ultra-precision machining, surface finishing, optics fabrication, and metrology. He has more than 10 years of research and development experience in ultra-precision machining. He has more than 20 publications including various international and national journals and conference proceedings.

         , Mohamed Bichra

    Mohamed Bichra studied micro and medical technology with a particular focus on laser systems at the University of Applied Sciences Gelsenkirchen. In 2009, he graduated with an engineering degree from the same university. Between 2008 and 2012, he has worked as a development engineer at Limo Lissotschenko Mikrooptik GmbH in Dortmund and at Heinz Group in Elgersburg. Since 2012, he is a Ph.D. student and research assistant with Prof. Sinzinger at Technische Universität Ilmenau.

         , Gufran Sayeed Khan

    Gufran Sayeed Khan is an associate professor at the Instrument Design Development Centre, IIT Delhi. He received his Ph.D. in optical engineering from the International Max Planck Research School at University of Erlangen-Nuremberg, Germany. He was a NASA postdoctoral fellow at the Marshall Space Flight Centre, Huntsville, AL, USA. His research interest is in optical metrology with a particular focus on the development of diffractive, aspheric, and freeform optics for imaging and nonimaging application.

     ORCID logo EMAIL logo     , Stefan Sinzinger

    Stefan Sinzinger received his diploma in physics and Ph.D. from the Friedrich-Alexander Universität Erlangen Nürnberg, Institute for Applied Optics (Professor Dr. A.W. Lohmann) in 1989 and 1993, respectively. In 2002, he became a professor of optical engineering (Technische Optik) at the Technische Universität Ilmenau. He has more than 190 publications in international journals and conferences. He is a coauthor of the textbook Microoptics and editor of the textbook Optical Information Processing (author: A.W. Lohmann). His current research focuses on the design, integration, fabrication, and application of (micro)optical elements and hybrid optical (micro)systems.

         and Chandra Shakher

    Chandra Shakher is an Emeritus professor at the Instrument Design Development Centre, IIT Delhi. He received his Ph.D. from the IIT Madras in 1980. His research interest includes holography interferometry, speckle metrology, fiber optic current sensors, optical coherence tomography, and laser-based instrumentation. He has more than 100 publications in international journals and more than 75 in conference proceedings. He is the recipient of the ICO Galileo Galilei Award of 2014. He is a fellow SPIE, OSA, Indian National Academy of Engineering.
Published/Copyright: May 23, 2019
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Advanced Optical Technologies
From the journal Advanced Optical Technologies Volume 8 Issue 3-4

Abstract

The applications of freeform optical surfaces in modern optical systems are providing unique solutions over rotationally symmetric surfaces. These surfaces offer higher degrees of freedom to the designer to enhance the high-end performance of the optical system. The precise metrology of freeform optics is one of the major bottlenecks for its use in imaging applications. Modern optical fabrication methods (i.e. fast or slow tool servo configuration) are, in principle, capable to meet the challenges to generate complex freeform surfaces if supported by precise metrology feedback for error compensation. In the present work, we have developed a Shack-Hartmann sensor-based metrology technique that can be used for quantitative in situ measurement of freeform optics. The sensor head is used to measure freeform optics in the reflection mode by following the CNC tool path in the offline mode. The measurements are used as feedback for corrective machining. Quantitative analysis is also performed to estimate the error budget of the metrology system. Further, the proposed in situ metrology scheme is validated by measuring freeform surface using a coherence correlation interferometric optical profiler.

Keywords: freeform optics; in situ measurement; scanning Shack-Hartmann sensor; subaperture stitching; ultra-precision machining

About the authors

Dali Ramu Burada

Dali Ramu Burada is a research scholar at the Indian Institute of Technology (IIT) Delhi. He received his M.Tech. in applied optics from the IIT Delhi in 2012. He is working in the field of optical metrology since 2012. His area of interest is metrology of nonconventional optical surfaces such as freeform optics for imaging and nonimaging applications.

Kamal K. Pant

Kamal K. Pant is a research scholar at the IIT Delhi. He received his M.Tech. in applied optics from the IIT Delhi in 2010. Currently, he is working as a scientist in IRDE Dehradun. His research interests are development of freeform optics and diffractive optics for imaging applications, subaperture stitching-based metrology of freeform optics, and SHS-based metrology.

Vinod Mishra

Vinod Mishra is a technical officer at CSIR-CSIO Chandigarh. He finished his Master’s in mechanical engineering and pursuing Ph.D. at the IIT Delhi. His area of research is ultra-precision machining, surface finishing, optics fabrication, and metrology. He has more than 10 years of research and development experience in ultra-precision machining. He has more than 20 publications including various international and national journals and conference proceedings.

Mohamed Bichra

Mohamed Bichra studied micro and medical technology with a particular focus on laser systems at the University of Applied Sciences Gelsenkirchen. In 2009, he graduated with an engineering degree from the same university. Between 2008 and 2012, he has worked as a development engineer at Limo Lissotschenko Mikrooptik GmbH in Dortmund and at Heinz Group in Elgersburg. Since 2012, he is a Ph.D. student and research assistant with Prof. Sinzinger at Technische Universität Ilmenau.

Gufran Sayeed Khan

Gufran Sayeed Khan is an associate professor at the Instrument Design Development Centre, IIT Delhi. He received his Ph.D. in optical engineering from the International Max Planck Research School at University of Erlangen-Nuremberg, Germany. He was a NASA postdoctoral fellow at the Marshall Space Flight Centre, Huntsville, AL, USA. His research interest is in optical metrology with a particular focus on the development of diffractive, aspheric, and freeform optics for imaging and nonimaging application.

Stefan Sinzinger

Stefan Sinzinger received his diploma in physics and Ph.D. from the Friedrich-Alexander Universität Erlangen Nürnberg, Institute for Applied Optics (Professor Dr. A.W. Lohmann) in 1989 and 1993, respectively. In 2002, he became a professor of optical engineering (Technische Optik) at the Technische Universität Ilmenau. He has more than 190 publications in international journals and conferences. He is a coauthor of the textbook Microoptics and editor of the textbook Optical Information Processing (author: A.W. Lohmann). His current research focuses on the design, integration, fabrication, and application of (micro)optical elements and hybrid optical (micro)systems.

Chandra Shakher

Chandra Shakher is an Emeritus professor at the Instrument Design Development Centre, IIT Delhi. He received his Ph.D. from the IIT Madras in 1980. His research interest includes holography interferometry, speckle metrology, fiber optic current sensors, optical coherence tomography, and laser-based instrumentation. He has more than 100 publications in international journals and more than 75 in conference proceedings. He is the recipient of the ICO Galileo Galilei Award of 2014. He is a fellow SPIE, OSA, Indian National Academy of Engineering.

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Received: 2018-10-01
Accepted: 2019-04-23
Published Online: 2019-05-23
Published in Print: 2019-06-26

©2019 THOSS Media & De Gruyter, Berlin/Boston

Articles in the same Issue

  1. Cover and Frontmatter
  2. Community
  3. News
  4. Views
  5. Direct-write grayscale lithography
  6. Topical Issue
  7. Editorial
  8. Toward full three-dimensional (3D) high volume fabrication
  9. Letter
  10. Single-digit 6-nm multilevel patterns by electron beam grayscale lithography
  11. Research Articles
  12. Fabrication of 3D microstructures using grayscale lithography
  13. Particle size and polymer formation dependence of nanostructure in antireflective surfaces by injection molding process
  14. Development of a metrology technique suitable for in situ measurement and corrective manufacturing of freeform optics
  15. Fabrication of the large-area flexible transparent heaters using electric-field-driven jet deposition micro-scale 3D printing
  16. Manufacturing strategies for scalable high-precision 3D printing of structures from the micro to the macro range
  17. Beyond grayscale lithography: inherently three-dimensional patterning by Talbot effect
  18. Tutorial
  19. Femtosecond lasers: the ultimate tool for high-precision 3D manufacturing
  20. Review Article
  21. 3D nanofabrication using controlled-acceleration-voltage electron beam lithography with nanoimprinting technology
  22. Review Article
  23. Description of aspheric surfaces
  24. Research Article
  25. Accounting for laser beam characteristics in the design of freeform optics for laser material processing
  26. Review Article
  27. Fabrication of bio-inspired 3D nanoimprint mold using acceleration-voltage-modulation electron-beam lithography
https://doi.org/10.1515/aot-2018-0072
Keywords for this article
freeform optics; in situ measurement; scanning Shack-Hartmann sensor; subaperture stitching; ultra-precision machining

Articles in the same Issue

  1. Cover and Frontmatter
  2. Community
  3. News
  4. Views
  5. Direct-write grayscale lithography
  6. Topical Issue
  7. Editorial
  8. Toward full three-dimensional (3D) high volume fabrication
  9. Letter
  10. Single-digit 6-nm multilevel patterns by electron beam grayscale lithography
  11. Research Articles
  12. Fabrication of 3D microstructures using grayscale lithography
  13. Particle size and polymer formation dependence of nanostructure in antireflective surfaces by injection molding process
  14. Development of a metrology technique suitable for in situ measurement and corrective manufacturing of freeform optics
  15. Fabrication of the large-area flexible transparent heaters using electric-field-driven jet deposition micro-scale 3D printing
  16. Manufacturing strategies for scalable high-precision 3D printing of structures from the micro to the macro range
  17. Beyond grayscale lithography: inherently three-dimensional patterning by Talbot effect
  18. Tutorial
  19. Femtosecond lasers: the ultimate tool for high-precision 3D manufacturing
  20. Review Article
  21. 3D nanofabrication using controlled-acceleration-voltage electron beam lithography with nanoimprinting technology
  22. Review Article
  23. Description of aspheric surfaces
  24. Research Article
  25. Accounting for laser beam characteristics in the design of freeform optics for laser material processing
  26. Review Article
  27. Fabrication of bio-inspired 3D nanoimprint mold using acceleration-voltage-modulation electron-beam lithography
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