Effects of fixture rotation on coating uniformity for high-performance optical filter fabrication
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Binyamin Rubin
Binyamin Rubin obtained his PhD in Aerospace Engineering from Technion – Israel Institute of Technology and MSc and BSc from Moscow Institute of Physics and Technology. He has 10 years of experience developing ion thrusters for space propulsion and 6 years of experience developing ion beam deposition equipment for optical coatings.
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Jason George
Jason George obtained his BS in Chemistry from the University of Florida and his MS in Mechanical Engineering from Colorado State University. Jason has over 17 years of optical coating and vacuum technology experience and has worked for Veeco for 16 years in various roles and responsibilities.
Riju Singhal obtained his PhD in Materials Science and Engineering from Drexel University in 2012, and a B-Tech in Chemical Engineering from the Indian Institute of Technology, Kanpur in 2007. He has 5 years of experience in coating technologies including chemical vapor deposition and ion beam sputtering. He has been working with Veeco Instruments for the past 2.5 years in a technical product marketing role for the development of ion beam deposition equipment for optical coatings.
Abstract
Coating uniformity is critical in fabricating high-performance optical filters by various vacuum deposition methods. Simple and planetary rotation systems with shadow masks are used to achieve the required uniformity [J. B. Oliver and D. Talbot, Appl. Optics 45, 13, 3097 (2006); O. Lyngnes, K. Kraus, A. Ode and T. Erguder, in ‘Method for Designing Coating Thickness Uniformity Shadow Masks for Deposition Systems with a Planetary Fixture’, 2014 Technical Conference Proceedings, Optical Coatings, August 13, 2014, DOI: http://dx.doi.org/10.14332/svc14.proc.1817.]. In this work, we discuss the effect of rotation pattern and speed on thickness uniformity in an ion beam sputter deposition system. Numerical modeling is used to determine statistical distribution of random thickness errors in coating layers. The relationship between thickness tolerance and production yield are simulated theoretically and demonstrated experimentally. Production yields for different optical filters produced in an ion beam deposition system with planetary rotation are presented. Single-wavelength and broadband optical monitoring systems were used for endpoint monitoring during filter deposition. Limitations of thickness tolerances that can be achieved in systems with planetary rotation are shown. Paths for improving production yield in an ion beam deposition system are described.
About the authors
Binyamin Rubin obtained his PhD in Aerospace Engineering from Technion – Israel Institute of Technology and MSc and BSc from Moscow Institute of Physics and Technology. He has 10 years of experience developing ion thrusters for space propulsion and 6 years of experience developing ion beam deposition equipment for optical coatings.
Jason George obtained his BS in Chemistry from the University of Florida and his MS in Mechanical Engineering from Colorado State University. Jason has over 17 years of optical coating and vacuum technology experience and has worked for Veeco for 16 years in various roles and responsibilities.
Riju Singhal obtained his PhD in Materials Science and Engineering from Drexel University in 2012, and a B-Tech in Chemical Engineering from the Indian Institute of Technology, Kanpur in 2007. He has 5 years of experience in coating technologies including chemical vapor deposition and ion beam sputtering. He has been working with Veeco Instruments for the past 2.5 years in a technical product marketing role for the development of ion beam deposition equipment for optical coatings.
Acknowledgments
We would like to thank Hector Castillo (Veeco Instruments, Inc.) for the help with the fabrication of the large-area single rotational axis fixture OGP measurements of the grids were not used in this work.
Author contributions: Binyamin Rubin performed all the simulations and experiments. Riju Singhal and Binyamin Rubin drafted the manuscript. Jason George supervised the entire work.
Competing interest: The authors declare no competing interest.
References
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©2018 THOSS Media & De Gruyter, Berlin/Boston
Artikel in diesem Heft
- Cover and Frontmatter
- Editorial
- Reviewer recognition and editor’s note
- Community
- News
- Topical Issue: Optical Coatings
- Editorial
- Special issue on optical coatings
- Review Article
- Simulation of the optical coating deposition
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Artikel in diesem Heft
- Cover and Frontmatter
- Editorial
- Reviewer recognition and editor’s note
- Community
- News
- Topical Issue: Optical Coatings
- Editorial
- Special issue on optical coatings
- Review Article
- Simulation of the optical coating deposition
- Research Articles
- ALD anti-reflection coatings at 1ω, 2ω, 3ω, and 4ω for high-power ns-laser application
- Determination of refractive index and thickness of YbF3 thin films deposited at different bias voltages of APS ion source from spectrophotometric methods
- Effects of fixture rotation on coating uniformity for high-performance optical filter fabrication
- Design and manufacture of super-multilayer optical filters based on PARMS technology
- Tutorial
- Monolithic photonic integration for visible and short near-infrared wavelengths: technologies and platforms for bio and life science applications
- Review Articles
- Optimization of freeform surfaces using intelligent deformation techniques for LED applications
- On-chip photonic microsystem for optical signal processing based on silicon and silicon nitride platforms
- Letter
- On-chip Mach-Zehnder interferometer for OCT systems
- Research Article
- Broadband and scalable optical coupling for silicon photonics using polymer waveguides
