Design and manufacture of super-multilayer optical filters based on PARMS technology
-
Shaobo Lü
,
Ruisheng Wang
Abstract
Three multilayer interference optical filters, including a UV band-pass, a VIS dual-band-pass and a notch filter, were designed by using Ta2O5, Nb2O5, Al2O3 and SiO2 as high- and low-index materials. During the design of the coating process, a hybrid optical monitoring and RATE-controlled layer thickness control scheme was adopted. The coating process was simulated by using the optical monitoring system (OMS) Simulator, and the simulation result indicated that the layer thickness can be controlled within an error of less than ±0.1%. The three filters were manufactured on a plasma-assisted reactive magnetic sputtering (PARMS) coating machine. The measurements indicate that for the UV band-pass filter, the peak transmittance is higher than 95% and the blocking density is better than OD6 in the 300–1100 nm region, whereas for the dual-band-pass filter, the center wavelength positioning accuracy of the two passbands are less than ±2 nm, the peak transmittance is higher than 95% and blocking density is better than OD6 in the 300–950 nm region. Finally, for the notch filter, the minimum transmittance rates are >90% and >94% in the visible and near infrared, respectively, and the blocking density is better than OD5.5 at 808 nm.
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Articles in the same Issue
- Cover and Frontmatter
- Editorial
- Reviewer recognition and editor’s note
- Community
- News
- Topical Issue: Optical Coatings
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- Review Article
- Simulation of the optical coating deposition
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Articles in the same Issue
- Cover and Frontmatter
- Editorial
- Reviewer recognition and editor’s note
- Community
- News
- Topical Issue: Optical Coatings
- Editorial
- Special issue on optical coatings
- Review Article
- Simulation of the optical coating deposition
- Research Articles
- ALD anti-reflection coatings at 1ω, 2ω, 3ω, and 4ω for high-power ns-laser application
- Determination of refractive index and thickness of YbF3 thin films deposited at different bias voltages of APS ion source from spectrophotometric methods
- Effects of fixture rotation on coating uniformity for high-performance optical filter fabrication
- Design and manufacture of super-multilayer optical filters based on PARMS technology
- Tutorial
- Monolithic photonic integration for visible and short near-infrared wavelengths: technologies and platforms for bio and life science applications
- Review Articles
- Optimization of freeform surfaces using intelligent deformation techniques for LED applications
- On-chip photonic microsystem for optical signal processing based on silicon and silicon nitride platforms
- Letter
- On-chip Mach-Zehnder interferometer for OCT systems
- Research Article
- Broadband and scalable optical coupling for silicon photonics using polymer waveguides
