Improved dielectric performance of barium strontium titanate multilayered capacitor by means of pulsed laser deposition and slow injection sol–gel methods
-
Ruthramurthy Balachandran
Abstract
A Pt/BST/NiFe/Cu multilayered capacitor was fabricated incorporating a polycrystalline Ba0.5Sr0.5TiO3 (BST) film deposited using the pulsed laser deposition technique. Qualitative X-ray diffraction analysis confirmed a perovskite structure for the deposited BST dielectric films which were fired at various temperatures. No intermediate phase was discernable with a post-annealing temperature of 750 °C and highly crystallized thin film was obtained at a post-annealing temperature of 800 °C. The fabricated capacitor with a BST film thickness of 665 nm exhibited respectable electrical performance with a dielectric constant, k of 657, and a dielectric loss, tan δ = 0.0137 at room temperature at an applied frequency of 1 MHz. The recorded charge storage density and leakage current density were 4.6 μC cm−2 and 33 nA cm−2, respectively, with ± 5 V bias.
References
[1] I.Mitsuaki, A.Kazuhide, K.Mitsuo, T.Shiro, F.Noburu: Appl. Phys. Lett.70 (1997) 1405. 10.1063/1.118590Search in Google Scholar
[2] A. KunHo, B.Sunggi, K. SangSub: J. Appl. Phys.92 (2002) 2651. 10.1063/1.1495526Search in Google Scholar
[3] D.Wu, A.Li, H.Ling, X.Yin, C.Ge, M.Wang, N.Ming: Appl. Surf. Sci.165 (2000) 309. 10.1016/S0169-4332(00)00310-XSearch in Google Scholar
[4] L.H.Parker, A.F.Tasch: IEEE Circuits and Devices Mag.6 (1990) 17. 10.1109/101.47582Search in Google Scholar
[5] C.S.Hwang, B.T.Lee, C.S.Kang, J.W.Kim, K.H.Lee, H.-J.Cho, H.Hideki, W.D.Kim, S.I.Lee, Y.B.Roh, M.Y.Lee: J. Appl. Phys.83 (7) (1998) 3703. 10.1063/1.366595Search in Google Scholar
[6] W.Y.Hsu, J.D.Luttmer, R.Tsu, S.Summerfelt, M.Bedekar, T.Tokumoto, J.Nulman: Appl. Phys. Lett.70 (1997) 3053. 10.1063/1.118746Search in Google Scholar
[7] J.Miao, W.R.Chen, B.Chen, H.Yang, W.Peng, J.-P.Zhong, H.Wu, J.Yuan, B.Xu, X.-G.Qiu, L.-X.Cao, B.-R.Zhao: Chin. Phys. Lett.21 (6) (2004) 1139. 10.1088/0256-307X/21/6/045Search in Google Scholar
[8] J.T.Dawley, P.G.Clem: Appl. Phys. Lett.81(16) (2002) 3028–3030. 10.1063/1.1516630Search in Google Scholar
[9] Z.Qin, H.Gerhard, X.George, X.Edward: Energenius Inc. (2004).Search in Google Scholar
[10] M.Lorenz, H.Hochmuth, M.Schallner, R.Heidinger, D.Spemann, M.Grundmann: Solid-State Electron.47 (2003) 2199–2203. 10.1016/S0038-1101(03)00194-1Search in Google Scholar
[11] U.Soichi, X.Jiangeng, P.R.Barry, R.F.Stephen: Appl. Phys. Lett.84 (21) (2004) 4218–4220. 10.1063/1.1755833Search in Google Scholar
[12] T.A.Bernacki, I.P.Koutsaroff, C.Divita: Passive Compon. Ind. Mag. (Sept./Oct.) (2004) 11–13.Search in Google Scholar
[13] H.-S.Kim, M.-H.Lim, H.-G.Kim, I.-D.Kim: Electrochem. Solid State Lett.7 (2004) J1–J3. 10.1149/1.1625591Search in Google Scholar
[14] S.Anuranjan, C.Valentin, M.H.Joshua, K.S.Rajiv: Appl. Phys. Lett.75 (1999) 3002. 10.1063/1.125215Search in Google Scholar
[15] A.Kumar, S.G.Manavalan: Surf. Coat. Technol.198 (2005) 406. 10.1016/j.surfcoat.2004.10.044Search in Google Scholar
[16] S.Saha, S.B.Krupanidhi: Mat. Sci. Eng. B57 (1999) 135. 10.1016/S0921-5107(98)00303-1Search in Google Scholar
[17] A.Ioachim, M.I.Toacsan, L.Nedelcu, M.G.Banciu, C.A.Dutu, M.Buda, F.Sava, M.Popescu, N.Sscarisoreanu, M.Dinescu: Rom. J. Inf. Sci. Technol.10 (2007) 347–354.Search in Google Scholar
[18] M.-C.Chiu, C.-F.Cheng, W.-T.Wu, F.-S.Shieu: J. Electrochem. Soc.152 (2005) F66–F70. 10.1149/1.1906024Search in Google Scholar
[19] C.S.Hwang, S.O.Park, C.H.-J.Cho, C.S.Kang, H.-K.Kang, S.I.Lee, M.Y.Lee: Appl. Phys. Lett.67 (1995) 2819. 10.1063/1.114341Search in Google Scholar
[20] S.C.Roy, M.C.Bhatnagar, G.L.Sharma, R.Manchanda, V.R.Balakrishnan: Ceram. Int.30 (2004) 2283. 10.1016/j.ceramint.2004.01.008Search in Google Scholar
[21] K.Hochul, P.Sungho, K.Kyekyoon, Y.S.Man, C.Hyungsoo: Electrochem. Solid-State Lett.7 (2004) F77–F80. 10.1149/1.1809551Search in Google Scholar
[22] N.V.Giridharan, R.Jayavel, P.Ramasamy: Cryst. Res. Technol.36 (2001) 65–72. 10.1002/1521-4079(200101)36:1<65::AID-CRAT65>3.0.CO;2-4Search in Google Scholar
[23] Y.Takeshima, K.Tanaka, Y.Sakabe: Jpn. J. Appl. Phys.39 (2000) 5389. 10.1143/JJAP.39.5389Search in Google Scholar
[24] S.Hwang: Mat. Sci. Eng. B56 (1998) 178. 10.1016/S0921-5107(98)00233-5Search in Google Scholar
[25] S.Ezhilvalavan, T.Y.Tseng: Mater. Chem. Phys.65 (2000) 227. 10.1016/S0254-0584(00)00253-4Search in Google Scholar
[26] A.I.Kingon, S.K.Streiffer: Ferroelectric Films and Devices, 4 (1) (1999) 39–44.Search in Google Scholar
[27] J.F.Scott: Ann. Rev. Mater. Sci.28 (1) (1998) 79–100. 10.1146/annurev.matsci.28.1.79Search in Google Scholar
[28] D.E.Kotecki, J.E.Baniecki, H.Shen, R.B.Laibowitz, K.L.Saenger, J.J.Lian, T.M.Shaw, S.D.Athavale, C.JrCabral, P.R.Duncombe, M.Gutsche, G.Kunkel, Y.-J.Park, Y.-Y.Wang, R.Wise: IBM J. Res. Develop.43(3) (1999) 367–382. 10.1147/rd.433.0367Search in Google Scholar
[29] A.Kumar, S.G.Manavalan, V.Gurumurthy, S.Jeedigunta, T.Weller: Mat. Sci. Eng. B139 (2007) 177. 10.1016/j.mseb.2007.02.005Search in Google Scholar
[30] O.Auciello, S.Saha, D.Y.Kaufman, S.K.Streiffer, W.Fan, B.Kabius, J.Im, P.Baumann: J. Electroceram.12 (2004) 119. 10.1023/B:JECR.0000034006.59246.5eSearch in Google Scholar
[31] R.Balachandran, H.K.Yow, B.H.Ong, K.B.Tan, K.Anuar, W.Z.Teoh, M. AhmadFauzi, S.Sreekantan, V.Swaminathan: J. Mater. Sci.46 (2011) 1806. 10.1007/s10853-010-5004-4Search in Google Scholar
[32] R.Balachandran, H.K.Yow, B.H.Ong, K.B.Tan, K.Anuar, H.Y.Wong: Int. J. Electrochem. Sci.6 (2011) 3564.Search in Google Scholar
[33] M.Nayak, S.Y.Lee, T.-Y.Tseng: Mater. Chem. Phys.77 (2003) 34–42. 10.1016/S0254-0584(01)00566-1Search in Google Scholar
[34] X.Zhu, W.Peng, J.Miao, D.Zheng: Mater. Lett.58 (2004) 2045. 10.1016/S0167-577X(03)00567-6Search in Google Scholar
© 2014, Carl Hanser Verlag, München
Articles in the same Issue
- Contents
- Contents
- Review
- Research trends in microwave dielectrics and factors affecting their properties: A review
- Original Contributions
- Efficiency and work performance of TiNi alloy undergoing B2 ↔ R martensitic transformation
- Fabrication of Gasar made from Cu-24 wt.% Mn alloy
- Effect of intermediate frequency electromagnetic field on the solidification structure and mechanical properties of direct chill cast Al-8 wt.%Si alloy
- Effect of Ni-based conversion coating and Ni–P electroless plating on the bonding process of pure Al and AZ31 alloy
- Effect of ball milling time on the synthesis of nanocrystalline merwinite via mechanical activation and heat treatment
- Structural and magnetic properties of Fe–Al2O3 soft magnetic composites prepared using the sol–gel method
- Improved dielectric performance of barium strontium titanate multilayered capacitor by means of pulsed laser deposition and slow injection sol–gel methods
- Effect of heat treatment on the slurry erosion resistance of high strength steel DP980
- Development of biomimetic gelatin–chitosan/hydroxyapatite nanocomposite via double diffusion method for biomedical applications
- Short Communications
- Effects of rolling rate on microstructure and mechanical properties of Mg sheets
- Effect of post-weld heat treatment on dissimilar friction stir welded AA6063 and A319 aluminium alloys
- Dielectric and magnetic properties of Ba0.8Sr0.2TiO3 – Y3Fe5O12 – YFeO3 composites
- Microwave-assisted modulated synthesis of zirconium-based metal–organic framework (Zr-MOF) for hydrogen storage applications
- DGM News
- DGM News
Articles in the same Issue
- Contents
- Contents
- Review
- Research trends in microwave dielectrics and factors affecting their properties: A review
- Original Contributions
- Efficiency and work performance of TiNi alloy undergoing B2 ↔ R martensitic transformation
- Fabrication of Gasar made from Cu-24 wt.% Mn alloy
- Effect of intermediate frequency electromagnetic field on the solidification structure and mechanical properties of direct chill cast Al-8 wt.%Si alloy
- Effect of Ni-based conversion coating and Ni–P electroless plating on the bonding process of pure Al and AZ31 alloy
- Effect of ball milling time on the synthesis of nanocrystalline merwinite via mechanical activation and heat treatment
- Structural and magnetic properties of Fe–Al2O3 soft magnetic composites prepared using the sol–gel method
- Improved dielectric performance of barium strontium titanate multilayered capacitor by means of pulsed laser deposition and slow injection sol–gel methods
- Effect of heat treatment on the slurry erosion resistance of high strength steel DP980
- Development of biomimetic gelatin–chitosan/hydroxyapatite nanocomposite via double diffusion method for biomedical applications
- Short Communications
- Effects of rolling rate on microstructure and mechanical properties of Mg sheets
- Effect of post-weld heat treatment on dissimilar friction stir welded AA6063 and A319 aluminium alloys
- Dielectric and magnetic properties of Ba0.8Sr0.2TiO3 – Y3Fe5O12 – YFeO3 composites
- Microwave-assisted modulated synthesis of zirconium-based metal–organic framework (Zr-MOF) for hydrogen storage applications
- DGM News
- DGM News