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Determination of refractive index and thickness of YbF3 thin films deposited at different bias voltages of APS ion source from spectrophotometric methods

  • Yinhua Zhang , Shengming Xiong , Wei Huang EMAIL logo and Kepeng Zhang
Published/Copyright: March 14, 2018
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Advanced Optical Technologies
From the journal Advanced Optical Technologies Volume 7 Issue 1-2

Abstract

Ytterbium fluoride (YbF3) single thin films were prepared on sapphire and monocrystalline silicon substrates through conventional thermal evaporation and ion beam-assisted deposition (IAD), at bias voltages ranging from 50 to 160 V of the Leybold advanced plasma source (APS). By using the Cauchy dispersion model, the refractive index and thickness of the YbF3 thin films were obtained by fitting the 400–2500 nm transmittance of the monolayer YbF3 thin films on the sapphire substrate. At the same time, the refractive index and thickness of the YbF3 thin films on the monocrystalline silicon substrates were also measured using the VASE ellipsometer at wavelength from 400 to 2200 nm. The results showed that the refractive index deviation of the YbF3 thin films between the fitted values by the transmittance spectra and the measured values by the VASE ellipsometer was <0.02 and the relative deviation of the thickness was <1%. Furthermore, the refractive index of the YbF3 thin films increased with increasing APS bias voltage. The conventional YbF3 thin films and the IAD thin films deposited at low bias voltage revealed a negative inhomogeneity, and a higher bias voltage is beneficial for improving the homogeneity of YbF3 thin films.

Keywords: bias voltage; refractive index; transmittance spectra; YbF3 thin film
OCIS codes: (310.0310) thin films; (310.6860) thin films; optical properties

References

[1] S. Xiong and Y. Zhang, Appl. Optics 36, 4958–4961 (1997).10.1364/AO.36.004958Search in Google Scholar

[2] S. Xiong and Y. Zhang, SPIE 3549, 241–245 (1998).10.1117/12.344128Search in Google Scholar

[3] R. Anton, H. Hagedorn, A. Schnellbtügel and G. Lensch, SPIE 2114, 288–296 (1994).Search in Google Scholar

[4] W. Liu, H. Tu, M. Gao, X. Su, S. Zhang, et al., J. Alloy. Compd. 581, 526–529 (2013).10.1016/j.jallcom.2013.07.130Search in Google Scholar

[5] M. Kennedy, D. Ristau and H. S. Niederwald, Thin Solid Films 333, 191–195 (1998).10.1016/S0040-6090(98)00847-5Search in Google Scholar

[6] Y. Wang, Y. Zhang, W. Chen, W. Shen, X. Liu, et al., Appl. Optics 47, C319–C323 (2008).10.1364/AO.47.00C319Search in Google Scholar PubMed

[7] A. V. Tikhonravov, M. K. Trubetskov and T. V. Amotchkina, Appl. Optics 47, 5103–5109 (2008).10.1364/AO.47.005103Search in Google Scholar PubMed

[8] M. Nenkov and T. Pencheva, J. Opt. Soc. Am. A 14, 686–692 (1997).10.1364/JOSAA.14.000686Search in Google Scholar

[9] D. P. Arndt, R. M. A. Azzam, J. M. Bennett, J. P. Borgogno, C. K. Carniglia, et al., Appl. Optics 23, 3571–3596 (1984).10.1364/AO.23.003571Search in Google Scholar

[10] J. A. Dobrowolski, F. C. Ho and A. Waldorf, Appl. Optics 22, 3191–3200 (1983).10.1364/AO.22.003191Search in Google Scholar PubMed

[11] M. Nenkov and T. Pencheva, J. Opt. Soc. Am. A 15, 1852–1857 (1998).10.1364/JOSAA.15.001852Search in Google Scholar

[12] Y. Zheng and K. Kikuchi, Appl. Optics 36, 6325–6328 (1997).10.1364/AO.36.006325Search in Google Scholar PubMed

[13] S. Y. Kim, Appl. Optics 35, 6703–6707 (1996).10.1364/AO.35.006703Search in Google Scholar

[14] Y. Jen, C. Peng and H. Chang, Opt. Express 15, 4445–4451 (2007).10.1364/OE.15.004445Search in Google Scholar

[15] Y. J. Jen, C. H. Hsieh and T. S. Lo, Opt. Commun. 244, 269–277 (2005).10.1016/j.optcom.2004.09.054Search in Google Scholar

[16] I. H. Malitson and M. J. Dodge, J. Opt. Soc. Am. 62, 1405A (1972).Search in Google Scholar

[17] M. J. Dodge, Handbook of Laser Science and Technology, Vol. IV, Optical Materials: Part 2 (CRC Press, Boca Raton, FL, 1986).Search in Google Scholar

[18] H. A. Macleod, Thin-Film Optical Filters, 4th ed. (CRC Press, Boca Raton, FL, 2010).10.1201/9781420073034Search in Google Scholar

[19] F. A. Jenkins and H. E. White, Fundamentals of Optics, 4th ed. (McGraw-Hill, Inc., New York, 1981).Search in Google Scholar

[20] D. Mergel, D. Buschendorf, S. Eggert, R. Grammes and B. Samset, Thin Solid Films 371, 218–224 (2000).10.1016/S0040-6090(00)01015-4Search in Google Scholar

[21] I. H. Malitson, J. Opt. Soc. Am. 52, 1377–1379 (1962).10.1364/JOSA.52.001377Search in Google Scholar

[22] J. D. Targove, J. P. Lehan, L. J. Lingg, H. Angus Macleod, J. A. Leavitt, et al., Appl. Optics 26, 3733–3737 (1987).10.1364/AO.26.003733Search in Google Scholar PubMed

[23] J. P. Borgogno, B. Lazarides and E. Pelletier, Appl. Optics 21, 4020–4029 (1982).10.1364/AO.21.004020Search in Google Scholar PubMed

[24] B. Bovard, F. J. Van Milligen, M. J. Messerly, S. G. Saxe and H. A. Macleod, Appl. Optics 24, 1803–1807 (1985).10.1364/AO.24.001803Search in Google Scholar

Received: 2017-11-6
Accepted: 2018-2-14
Published Online: 2018-3-14
Published in Print: 2018-4-25

©2018 THOSS Media & De Gruyter, Berlin/Boston

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https://doi.org/10.1515/aot-2017-0072
Keywords for this article
bias voltage; refractive index; transmittance spectra; YbF3 thin film

Articles in the same Issue

  1. Cover and Frontmatter
  2. Editorial
  3. Reviewer recognition and editor’s note
  4. Community
  5. News
  6. Topical Issue: Optical Coatings
  7. Editorial
  8. Special issue on optical coatings
  9. Review Article
  10. Simulation of the optical coating deposition
  11. Research Articles
  12. ALD anti-reflection coatings at 1ω, 2ω, 3ω, and 4ω for high-power ns-laser application
  13. Determination of refractive index and thickness of YbF3 thin films deposited at different bias voltages of APS ion source from spectrophotometric methods
  14. Effects of fixture rotation on coating uniformity for high-performance optical filter fabrication
  15. Design and manufacture of super-multilayer optical filters based on PARMS technology
  16. Tutorial
  17. Monolithic photonic integration for visible and short near-infrared wavelengths: technologies and platforms for bio and life science applications
  18. Review Articles
  19. Optimization of freeform surfaces using intelligent deformation techniques for LED applications
  20. On-chip photonic microsystem for optical signal processing based on silicon and silicon nitride platforms
  21. Letter
  22. On-chip Mach-Zehnder interferometer for OCT systems
  23. Research Article
  24. Broadband and scalable optical coupling for silicon photonics using polymer waveguides
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