Pendeo-epitaxial Growth and Characterization of Thin Films of Gallium Nitride and Related Materials on SiC(0001) and Si(111) Substrates
-
Robert F. Davis
,
Thomas Gehrke
Abstract
Monocrystalline GaN and AlxGa1–xN films have been grown via the pendeo-epitaxy (PE) [1] technique with and without Si3N4 masks on GaN/AlN/6H–SiC(0001) and GaN(0001)/AlN(0001)/3C–SiC(111)/Si(111) substrates using organometallic vapor phase deposition. Scanning and transmission electron microscopies were used to evaluate the external microstructures and the distribution of dislocations, respectively. The dislocation densities in the PE grown films were reduced at least five orders of magnitude relative to the initial GaN seed layers. Tilting to 0.2° in the portion of the coalesced GaN epilayers grown over the silicon nitride masks was observed via X-ray diffraction. Neither tilting nor low angle boundaries were observed within areas of coalescence in the material grown on substrates without the masks.
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© 2001 Carl Hanser Verlag, München
Artikel in diesem Heft
- Frontmatter
- Erratum
- Erratum
- Editorial
- In memoriam
- Aufsätze/Articles
- Low-temperature Processing of (Pb, La)(Zr, Ti) O3 Thick Films on Alumina Substrates
- Processing and Structure of Grain Boundaries in Strontium Titanate
- Stabilisation of MnZn Ferrites by the Re-oxidation of their Grain Boundaries
- Far-infrared Reflectivity Properties of BaTiO3 Ceramics
- Investigations on the Liquid Phase in Barium Titanate Ceramics with CuO Additives
- Chemical Engineering of Superconductive Rare-earth-Barium Cuprates: Melt Solidified Ceramics and Single Crystals
- Orthorhombic Titanium Aluminides: Phases, Phase Transformations and Microstructure Evolution
- Aspects of Sintering Additives for Processing and Microstructure Development of HIP-SSiC
- Investigation of Interlayer Phenomena in Ti/Pt Electrodes for Ferroelectric Thin Film Devices
- The Designing of Properties of Hydroxyapatite/Poly-l-lactide Composite Biomaterials by Hot Pressing
- Hydrolysis Assisted Solidification Process and its Use in Ceramic Wet Forming
- A Model for the Formation of Interdendritic Cavities from Pores Pre-existing in the Melt
- Pendeo-epitaxial Growth and Characterization of Thin Films of Gallium Nitride and Related Materials on SiC(0001) and Si(111) Substrates
- The Effect of Hydrogen Absorption and Desorption on Ta-doped SmFe Nitrides
- The Ternary System Fe–Nd–C
- Mechanical Properties of the Industrial HK40 Reforming Tubes Produced by an Improved Centrifugal Processing
- Texture of Hot Rolled and Annealed Binary Ti –Mn Alloys
- Finite-Element-Simulation des Faserverhalten metallischer Verbundwerkstoffe bei LCF-Beanspruchung
- Mitteilungen/Notifications
- Personal
- Book Reviews
- Tagungen/Conferences
Artikel in diesem Heft
- Frontmatter
- Erratum
- Erratum
- Editorial
- In memoriam
- Aufsätze/Articles
- Low-temperature Processing of (Pb, La)(Zr, Ti) O3 Thick Films on Alumina Substrates
- Processing and Structure of Grain Boundaries in Strontium Titanate
- Stabilisation of MnZn Ferrites by the Re-oxidation of their Grain Boundaries
- Far-infrared Reflectivity Properties of BaTiO3 Ceramics
- Investigations on the Liquid Phase in Barium Titanate Ceramics with CuO Additives
- Chemical Engineering of Superconductive Rare-earth-Barium Cuprates: Melt Solidified Ceramics and Single Crystals
- Orthorhombic Titanium Aluminides: Phases, Phase Transformations and Microstructure Evolution
- Aspects of Sintering Additives for Processing and Microstructure Development of HIP-SSiC
- Investigation of Interlayer Phenomena in Ti/Pt Electrodes for Ferroelectric Thin Film Devices
- The Designing of Properties of Hydroxyapatite/Poly-l-lactide Composite Biomaterials by Hot Pressing
- Hydrolysis Assisted Solidification Process and its Use in Ceramic Wet Forming
- A Model for the Formation of Interdendritic Cavities from Pores Pre-existing in the Melt
- Pendeo-epitaxial Growth and Characterization of Thin Films of Gallium Nitride and Related Materials on SiC(0001) and Si(111) Substrates
- The Effect of Hydrogen Absorption and Desorption on Ta-doped SmFe Nitrides
- The Ternary System Fe–Nd–C
- Mechanical Properties of the Industrial HK40 Reforming Tubes Produced by an Improved Centrifugal Processing
- Texture of Hot Rolled and Annealed Binary Ti –Mn Alloys
- Finite-Element-Simulation des Faserverhalten metallischer Verbundwerkstoffe bei LCF-Beanspruchung
- Mitteilungen/Notifications
- Personal
- Book Reviews
- Tagungen/Conferences
