Home Technology A fractal analysis for the microstructures of β-SiC films
Article
Licensed
Unlicensed Requires Authentication

A fractal analysis for the microstructures of β-SiC films

  • Bin Li , Zhiyong Chen and Erzhou Ren
Published/Copyright: August 7, 2019
Become an author with De Gruyter Brill
Submit Manuscript Author Information
International Journal of Materials Research
From the journal International Journal of Materials Research Volume 110 Issue 8

Abstract

Fractal theory is widely used to analyze the topography of surfaces; however, the relationship and characteristics of fractal dimension and microstructures of β-SiC films have not been reported. Using scanning electron microscopy and computer analysis, the microstructures of β-SiC films were evaluated; the films were prepared on AlN substrates by laser chemical vapor deposition using a diode laser and hydrido polycarbosilane as the precursor at different vacuum levels. The effect of vacuum level on the microstructure of β-SiC films was evaluated. The results show that the microstructures of β-SiC films exhibit the characteristics of fractals. Using the box counting method, the fractal dimensions of β-SiC films were calculated to be about 1.94–2.14, providing more fractal identification in evaluating the performance of films.

Keywords: Fractal; SiC film; Laser chemical vapor deposition; Thick films; Microstructure
∗Correspondence address, Bin Li, School of Mechanical Engineering, Luoyang Institute of Science and Technology, Wangcheng Avenue 90, Luoyang 471023, Henan Province, P.R. China, Tel: +86 15937911896, Fax: +86 37965928209, E-mail:

References

[1] B.B.Mandelbrot: The fractal geometry of nature, W.H. Freeman (1983). 10.1119/1.13295Search in Google Scholar

[2] P.Sahoo, T.Barman, J.P.Davim: Fractal analysis in machining, Springer Science & Business Media (2011). 10.1007/978-3-642-17922-8Search in Google Scholar

[3] D.Dallaeva, Ş.Ţălu, S.Stach, P.Škarvada, P.Tománek, L.Grmela: Appl. Surf. Sci.312 (2014) 81–86. 10.1016/j.apsusc.2014.05.086Search in Google Scholar

[4] P.Sahoo, S.K. RoyChowdhury: Wear253 (2002) 924–934. 10.1016/s0043-1648(02)00243-0Search in Google Scholar

[5] R.P.Yadav, M.Kumar, A.K.Mittal, A.C.Pandey: Chaos An Inter. J. Nonlinear Sci.25 (2015) 1759–1155. PMid:26328566; 10.1063/1.4928695Search in Google Scholar PubMed

[6] M.Hasegawa, J.Liu, K.Okuda, M.Nunobiki: Wear192 (1996) 40–45. 10.1016/0043-1648(95)06768-XSearch in Google Scholar

[7] I.A.El-Sonbaty, U.A.Khashaba, A.I.Selmy, A.I.Ali: J. Mater. Process. Technol.200 (2008) 271–278. 10.1016/j.jmatprotec.2007.09.006Search in Google Scholar

[8] X.Yin, K.Komvopoulos: Int. J. Solids. Struct.47 (2010) 912–921. 10.1016/j.ijsolstr.2009.12.003Search in Google Scholar

[9] P.Xu, B.Yu: Adv. Water Resour.31 (2008) 74–81. 10.1016/j.advwatres.2007.06.003Search in Google Scholar

[10] H.Zahouani, R.Vargiolu, J.L.Loubet: Math. Comput. Model.28 (4–8) (1998) 517–534. 10.1016/s0895-7177(98)00139-3Search in Google Scholar

[11] B.Li: Int. J. Refract. Met. Hard Mater.42 (2014) 221–227. 10.1016/j.ijrmhm.2013.09.009Search in Google Scholar

[12] Y.Yamamoto, T.Karasawa, Y.Murakami, S.Takemoto, D.Yonetsu, K.Noborio, S.Konishi: Fusion Eng. Des.89 (2014) 1392–1396. 10.1016/j.fusengdes.2014.01.039Search in Google Scholar

[13] V.V.Kozlovski, A.A.Lebedev, V.N.Lomasov, E.V.Bogdanova, N.V.Seredova: Semiconductors.48 (2014) 1006–1009. 10.1134/s1063782614080156Search in Google Scholar

[14] Ö.Danielsson, P.Sukkaew, L.Ojamae, O.Kordina, E.Janzen: Theor. Chem. Acc.132 (2013) 1–12. 10.1007/s00214-013-1398-9Search in Google Scholar

[15] M.Zielinski, M.Portail, T.Chassagne, S.Juillaguet, H.Peyre: J. Cryst. Growth310 (2008) 3174–3182. 10.1016/j.jcrysgro.2008.03.022Search in Google Scholar

[16] H.Suzuki, H.Araki, M.Tosa, T.Noda: J. Cryst. Growth294 (2006) 464–468. 10.1016/j.jcrysgro.2006.07.003Search in Google Scholar

[17] H.J.Hei, J.Ma, X.J.Li, S.W.Yu, B.Tang, Y.Y.Shen, W.Z.Tang: Surf. Coat. Technol.261 (2015) 272–277. 10.1016/j.surfcoat.2014.11.019Search in Google Scholar

[18] S.Rajasekhara, B.NeunerIII, C.Zorman, N.Jegenyes, G.Ferro, G.Shvets, P.Ferreira, D.Kovar: Appl. Phys. Lett.98 (2011) 191904. 10.1063/1.3585098Search in Google Scholar

[19] J.-Y.Seo, S.-Y.Yoon, K.Niihara, K.H.Kim: Thin Solid Films406 (2002) 138–144. 10.1016/s0040-6090(02)00061-5Search in Google Scholar

[20] K.Abe, Y.Nagasaka, T.Kida, T.Yamakami, R.Hayashibe, K.Kamimura: Thin Solid Films516 (2008) 637–640. 10.1016/j.tsf.2007.06.199Search in Google Scholar

[21] S.Zhang, Q.F.Xu, R.Tu, T.Goto, L.M.Zhang: J. Am. Ceram. Soc.98 (2015) 236–241. 10.1111/jace.13248Search in Google Scholar

[22] S.Zhang, Q.F.Xu, R.Tu, T.Goto, L.M.Zhang: J. Am. Ceram. Soc.97 (3) (2014) 952–958. 10.1111/jace.12706Search in Google Scholar

[23] M.Gao, A.Ito, T.Goto: Appl. Surf. Sci.340 (2015) 160–165. 10.1016/j.apsusc.2015.02.196Search in Google Scholar

[24] D.Severin, S.Dörsch: Wear249 (2001) 771–779. 10.1016/S0043-1648(01)00806-7Search in Google Scholar

[25] A.G.Kokkalis, O.K.Panagouli: Chaos, Solitons Fractals9 (1998) 1891–1899. 10.1016/s0960-0779(97)00138-0Search in Google Scholar

[26] M.Chen, Q.Pang, J.Wang, K.Cheng: Int. J. Mach. Tools Manuf.48 (2008) 905–913. 10.1016/j.ijmachtools.2007.11.002Search in Google Scholar

[27] J.Alcock, O. ToftS⊘rensen, S.Jensen, P.Kjeldsteen: Wear194 (1996) 228–237. 10.1016/0043-1648(95)06898-8Search in Google Scholar

[28] Kavyashree, R.K.Pandey, R.P.Yadav, M.Kumar, H.P.Bhasker, A.K.Mittal, A.C.Pandey, S.N.Pandey: Appl. Surf. Sci.466 (2019) 780–786. 10.1016/j.apsusc.2018.10.075Search in Google Scholar

[29] A.Lakhtakia: Colloid & Polymer Science268 (1990) 399–400. 10.1007/BF01411683Search in Google Scholar

[30] Y.Abdelaziz, S.Benkheira, T.Rikioui, A.Mekkaoui: Appl. Math. Model.34 (2010) 4031–4039. 10.1016/j.apm.2010.03.035Search in Google Scholar

[31] C.X.Liu, Y.Q.Yang, X.Luo: Comp. Mater. Sci.50 (2011) 2338–2346. 10.1016/j.commatsci.2011.03.008Search in Google Scholar

[32] I.V.Kityk, A.Kassiba, K.Tuesu, C.Charpentier, Y.Ling, M.Makowska-Janusik: Mater. Sci. Eng.B 77 (2000) 147–158. 10.1016/s0921-5107(00)00466-9Search in Google Scholar

[33] T.Nychyporuk, V.Lysenko, D.Barbier: Phys. Rev.B 71 (2005) 115402. 10.1103/PhysRevB.71.115402Search in Google Scholar

Received: 2019-01-09
Accepted: 2019-03-25
Published Online: 2019-08-07
Published in Print: 2019-08-12

© 2019, Carl Hanser Verlag, München

Articles in the same Issue

  1. Contents
  2. Contents
  3. Original Contributions
  4. Dendritic solidification of highly undercooled dilute alloys
  5. Dendritic structure formation of magnesium alloys for the manipulation of corrosion properties: Part 2 – corrosion
  6. Thermodynamic properties of cerium molybdate
  7. A new approach to reduce springback in sheet metal bending using digital image correlation
  8. Effects of minor La and Ce additions on microstructure and mechanical properties of A201 alloy
  9. Strengthening and toughening of laminated TiAl composite sheets by titanium alloy layers and carbide particles
  10. A fractal analysis for the microstructures of β-SiC films
  11. Synthesis of La2(Zr0.7Ce0.3)2O7 nanopowder using a simple chemical precipitation method and heat treatment at high temperature
  12. Optimized microstructure with alumina micropowder and its effects on properties of phosphate-bonded castables
  13. Co-deposition and electrokinetic behavior of TiO2–WO3 nanoparticles under non-uniform AC field
  14. 3D nanoflower-structured TiO2 photoanode for efficient photoelectrochemical water splitting
  15. Short Communications
  16. Investigation of Al2O3/TiB2 ceramic cutting tool materials with the addition of core–shell structured Ni–B coated CaF2
  17. DGM News
  18. DGM News
https://doi.org/10.3139/146.111802
Keywords for this article
Fractal; SiC film; Laser chemical vapor deposition; Thick films; Microstructure

Articles in the same Issue

  1. Contents
  2. Contents
  3. Original Contributions
  4. Dendritic solidification of highly undercooled dilute alloys
  5. Dendritic structure formation of magnesium alloys for the manipulation of corrosion properties: Part 2 – corrosion
  6. Thermodynamic properties of cerium molybdate
  7. A new approach to reduce springback in sheet metal bending using digital image correlation
  8. Effects of minor La and Ce additions on microstructure and mechanical properties of A201 alloy
  9. Strengthening and toughening of laminated TiAl composite sheets by titanium alloy layers and carbide particles
  10. A fractal analysis for the microstructures of β-SiC films
  11. Synthesis of La2(Zr0.7Ce0.3)2O7 nanopowder using a simple chemical precipitation method and heat treatment at high temperature
  12. Optimized microstructure with alumina micropowder and its effects on properties of phosphate-bonded castables
  13. Co-deposition and electrokinetic behavior of TiO2–WO3 nanoparticles under non-uniform AC field
  14. 3D nanoflower-structured TiO2 photoanode for efficient photoelectrochemical water splitting
  15. Short Communications
  16. Investigation of Al2O3/TiB2 ceramic cutting tool materials with the addition of core–shell structured Ni–B coated CaF2
  17. DGM News
  18. DGM News
Sign up now to receive a 20% welcome discount
Institutional Access
How does access work?
Have an idea on how to improve our website?
Please write us.
© 2026 De Gruyter Brill
Downloaded on 12.1.2026 from https://www.degruyterbrill.com/document/doi/10.3139/146.111802/html
Scroll to top button