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Piezoelectrical Properties of Plasma Layers Zn-Bi-O
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Daniel Dopierała
Veröffentlicht/Copyright:
30. November 2016
Abstract
The paper presents specific piezoelectric properties of thin layers of zinc oxide modified with bismuth (Zn-Bi-O). The purpose of the presented work was to find the relation between the technological parameters of receiving thin films (density power deposited on target, reactive gas pressure, distance from the substrate to the target) and the piezoelectric properties d33. The thin layers of Zn-Bi-O were obtained in a reactive process of magnetron sputtering of the metallic target Zn-Bi. As a result of the technological processes involved in research, a coefficient value d33 has been received in the ranges of 1-10 pC/N. The next step is to find the most suitable technological parameters in order to obtain optimum piezoelectric properties of the thin films Zn-Bi-O.
Received: 2006-1-30
Revised: 2006-2-20
Accepted: 2006-3-8
Published Online: 2016-11-30
Published in Print: 2006-7-1
© 2016 by Walter de Gruyter Berlin/Boston
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Artikel in diesem Heft
- Preface
- Power Supply Systems of Ozone Generators with Magnetic Frequency Multipliers
- Simultaneous Decomposition of Diesel Particulate Material and NOx Using Dielectric Barrier Discharge
- Phenol Oxidation in Aqueous Solution by Gas Phase Corona Discharge
- LIF Observation of Ground-State OH Radicals in DC Nozzle-to-Plane Positive Streamer Corona
- Measurement of Low Gas Concentration Using Photonic Bandgap Fiber
- A Study on a Diode-Bridge Type Differential Capacitance Detection Circuit
- Microwave Reactor for Nitrous Oxide Processing
- Volume-Surface Discharge as an Ion Source for Plasma Technologies
- Development of Agricultural Soil Sterilization Using Ozone Generated by High Frequency Dielectric Barrier Discharge
- Modeling of the Temperature Distribution in Arc Discharge Plasma Reactor
- Arc Plasma Reactor Power System with 5-Limb Transformer
- Discharge Plasma Characteristics in Pure Ar Gas at Multi-Atmospheric Pressure Using the Automatically Pre-Ionized Plasma Electrode
- A New Type of Reactor with a Combination of Surface Discharge and Advanced Oxidation Process in Air and its Applications
- Study of a Wide Area Carbon Nanotubes Preparation for an Environmental Application
- Research on Waste Water Purification by Ozone Treatment and Pulsed Discharge Treatment
- Energetic of the Oxidation of NOx by Ozone Using a Simple Molecular Model in a Computational Chemistry Scheme
- Analysis of Acoustic Signal in the MICRO Discharges Using Continuous Wavelet Transform
- Plasma-catalytic Conversion of Methane by DBD and Gliding Discharges
- Investigation of Hot Gas Mixture Free Jet
- Piezoelectrical Properties of Plasma Layers Zn-Bi-O
- Modification of Polymer Surfaces Using Atmospheric Pressure Barrier Discharges
- Influence of Silicon, Oxygen and Nitrogen Admixtures Upon the Properties of Plasma Deposited Amorphous Diamond-Like Carbon Coatings
- Thin Films Deposited from Trimethylmethoxysilane
Artikel in diesem Heft
- Preface
- Power Supply Systems of Ozone Generators with Magnetic Frequency Multipliers
- Simultaneous Decomposition of Diesel Particulate Material and NOx Using Dielectric Barrier Discharge
- Phenol Oxidation in Aqueous Solution by Gas Phase Corona Discharge
- LIF Observation of Ground-State OH Radicals in DC Nozzle-to-Plane Positive Streamer Corona
- Measurement of Low Gas Concentration Using Photonic Bandgap Fiber
- A Study on a Diode-Bridge Type Differential Capacitance Detection Circuit
- Microwave Reactor for Nitrous Oxide Processing
- Volume-Surface Discharge as an Ion Source for Plasma Technologies
- Development of Agricultural Soil Sterilization Using Ozone Generated by High Frequency Dielectric Barrier Discharge
- Modeling of the Temperature Distribution in Arc Discharge Plasma Reactor
- Arc Plasma Reactor Power System with 5-Limb Transformer
- Discharge Plasma Characteristics in Pure Ar Gas at Multi-Atmospheric Pressure Using the Automatically Pre-Ionized Plasma Electrode
- A New Type of Reactor with a Combination of Surface Discharge and Advanced Oxidation Process in Air and its Applications
- Study of a Wide Area Carbon Nanotubes Preparation for an Environmental Application
- Research on Waste Water Purification by Ozone Treatment and Pulsed Discharge Treatment
- Energetic of the Oxidation of NOx by Ozone Using a Simple Molecular Model in a Computational Chemistry Scheme
- Analysis of Acoustic Signal in the MICRO Discharges Using Continuous Wavelet Transform
- Plasma-catalytic Conversion of Methane by DBD and Gliding Discharges
- Investigation of Hot Gas Mixture Free Jet
- Piezoelectrical Properties of Plasma Layers Zn-Bi-O
- Modification of Polymer Surfaces Using Atmospheric Pressure Barrier Discharges
- Influence of Silicon, Oxygen and Nitrogen Admixtures Upon the Properties of Plasma Deposited Amorphous Diamond-Like Carbon Coatings
- Thin Films Deposited from Trimethylmethoxysilane
