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Volume-Surface Discharge as an Ion Source for Plasma Technologies

  • Marina V. Sokolova EMAIL logo und Sergey A. Krivov
Veröffentlicht/Copyright: 30. November 2016
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Abstract

In this paper experimental characteristics of discharge in a three-electrode system are presented. This system consists of a stripped electrode placed on upper side of a dielectric plate, while its reverse side has a metallic layer, and a metallic plane electrode placed at a distance ≅ 1 cm above the strips (parallel to them). With a high ac voltage (frequency 14 kHz) applied to the metallic layer, the stripped electrode is being grounded, surface discharge appears at the edges of the strips. If a high dc voltage is applied additionally to the plane electrode a direct current appears in the circuit including the gas gap and the stripped electrode. With dc voltage > 9 kV visible waves of glow discharge appear in the gas forming a volume-surface discharge. At certain conditions discrete channels can be seen inside the glow. Influence of different factors on current and structure of such a volume-surface discharge is analyzed.

Received: 2005-11-15
Revised: 2006-1-16
Accepted: 2006-1-30
Published Online: 2016-11-30
Published in Print: 2006-7-1

© 2016 by Walter de Gruyter Berlin/Boston

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Heruntergeladen am 20.9.2025 von https://www.degruyterbrill.com/document/doi/10.1515/jaots-2006-0209/html
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