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Influence of Silicon, Oxygen and Nitrogen Admixtures Upon the Properties of Plasma Deposited Amorphous Diamond-Like Carbon Coatings
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Vilma Buršíková
,
Lenka Zajíčková
Published/Copyright:
November 30, 2016
Abstract
Amorphous diamond-like carbon films (DLC) with various silicon, oxygen and nitrogen content were deposited by plasma enhanced chemical vapor deposition (PECVD) technique. The films were prepared from the mixture of methane and hexamethyldisiloxane (HMDSO) in r.f. capacitively coupled discharges (13.56 MHz). The reactive plasma was investigated by optical emission spectroscopy and capacitive coupled planar probe. A combination of RBS, ERDA, FTIR and XPS methods was used to study the films’ chemical composition and structure. The mechanical properties were studied using a depth sensing indentation technique. The films were mainly composed of C-C, C-H and C-Si bonds. The optimum deposition conditions for the preparation of DLC films, with enhanced thermo-mechanical stability, were determined.
Received: 2005-12-30
Revised: 2006-2-10
Accepted: 2006-2-15
Published Online: 2016-11-30
Published in Print: 2006-7-1
© 2016 by Walter de Gruyter Berlin/Boston
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Articles in the same Issue
- Preface
- Power Supply Systems of Ozone Generators with Magnetic Frequency Multipliers
- Simultaneous Decomposition of Diesel Particulate Material and NOx Using Dielectric Barrier Discharge
- Phenol Oxidation in Aqueous Solution by Gas Phase Corona Discharge
- LIF Observation of Ground-State OH Radicals in DC Nozzle-to-Plane Positive Streamer Corona
- Measurement of Low Gas Concentration Using Photonic Bandgap Fiber
- A Study on a Diode-Bridge Type Differential Capacitance Detection Circuit
- Microwave Reactor for Nitrous Oxide Processing
- Volume-Surface Discharge as an Ion Source for Plasma Technologies
- Development of Agricultural Soil Sterilization Using Ozone Generated by High Frequency Dielectric Barrier Discharge
- Modeling of the Temperature Distribution in Arc Discharge Plasma Reactor
- Arc Plasma Reactor Power System with 5-Limb Transformer
- Discharge Plasma Characteristics in Pure Ar Gas at Multi-Atmospheric Pressure Using the Automatically Pre-Ionized Plasma Electrode
- A New Type of Reactor with a Combination of Surface Discharge and Advanced Oxidation Process in Air and its Applications
- Study of a Wide Area Carbon Nanotubes Preparation for an Environmental Application
- Research on Waste Water Purification by Ozone Treatment and Pulsed Discharge Treatment
- Energetic of the Oxidation of NOx by Ozone Using a Simple Molecular Model in a Computational Chemistry Scheme
- Analysis of Acoustic Signal in the MICRO Discharges Using Continuous Wavelet Transform
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- Influence of Silicon, Oxygen and Nitrogen Admixtures Upon the Properties of Plasma Deposited Amorphous Diamond-Like Carbon Coatings
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