Startseite Silicon–carbon superhydrophobic nano-structure for next generation semiconductor industry
Artikel
Lizenziert
Nicht lizenziert Erfordert eine Authentifizierung

Silicon–carbon superhydrophobic nano-structure for next generation semiconductor industry

  • Girija Shankar Dixit ORCID logo EMAIL logo , Abanti Sahoo , Arjit Guha und Soumya Sanjeeb Mohapatra
Veröffentlicht/Copyright: 10. Oktober 2024
Veröffentlichen auch Sie bei De Gruyter Brill

Abstract

Superhydrophobic surfaces are important in waterproof applications that withstand harsh chemical exposure, ultraviolet radiation, and heat. Surface energy modification of the surface, such as silanization or (fluoro)polymer coatings, increases the hydrophobicity of the nanostructure. The present study follows a bilayer architecture that turns hydrophilic silicon into a superhydrophobic one. The first step creates a unique silicon–graphene hybrid structure on the silicon surface by coating graphene on the P-type silicon substrate. In the second step, low surface energy material (a combination of hexadecyltrimethoxysilane and hexamethyldisilazane) is coated by the dip coating process. This study investigates the durability of superhydrophobicity under severe mechanical, thermal, and chemical conditions. High-temperature tolerance and water jet tests are also performed. The present work also involves the study of coating regeneration. This approach can be applied to all shapes and sizes of silicon–graphene surfaces and is proven to be excellent in the semiconductor industry.


Corresponding author: Girija Shankar Dixit, Department of Electrical Engineering, NIT Rourkela, 769008, Odisha, India, E-mail:

  1. Research ethics: Not applicable.

  2. Informed consent: Not applicable.

  3. Author contributions: Girija Shankar Dixit was involved in writing the manuscript and experiment. Abanti Sahoo contributed to the technical discussion. Arijit Guha was involved in editing. Soumya Sanjeeb Mohapatra was involved in funding the research and guidance.

  4. Use of Large Language Models, AI and Machine Learning Tools: None declared.

  5. Conflict of interest: The authors declare that they have no competing interest.

  6. Research funding: This work was supported by Jindal steel & power limited under the Project Code C2/24/CH/106.

  7. Data availability: The raw data can be obtained on request from the corresponding author.

References

1. Lin, Y.; Chen, H.; Wang, G.; Liu, A. Recent Progress in Preparation and Anti-icing Applications of Superhydrophobic Coatings. Coatings 2018, 8 (6); https://doi.org/10.3390/coatings8060208.Suche in Google Scholar

2. Dong, J.; Yao, Z.; Yang, T.; Jiang, L.; Shen, C. Control of Superhydrophilic and Superhydrophobic Graphene Interface. Sci. Rep. 2013, 3; https://doi.org/10.1038/srep01733.Suche in Google Scholar

3. Huang, X.; Sun, M.; Shi, X.; Shao, J.; Jin, M.; Liu, W.; Zhang, R.; Huang, S.; Ye, Y. Chemical Vapor Deposition of Transparent Superhydrophobic Anti-icing Coatings with Tailored Polymer Nanoarray Architecture. Chem. Eng. J. 2023, 454 (P1); https://doi.org/10.1016/j.cej.2022.139981.Suche in Google Scholar

4. Zhang, W.; Wang, D.; Sun, Z.; Song, J.; Deng, X. Robust Superhydrophobicity: Mechanisms and Strategies. Chem. Soc. Rev. 2021, 50 (6), 4031–4061; https://doi.org/10.1039/d0cs00751j.Suche in Google Scholar PubMed

5. Ems, H.; Ndao, S. Microstructure-alone Induced Transition from Hydrophilic to Hydrophobic Wetting State on Silicon. Appl. Surf. Sci. 2015, 339 (1), 137–143; https://doi.org/10.1016/j.apsusc.2015.02.135.Suche in Google Scholar

6. Delpuech, N.; Dupre, N.; Moreau, P.; Bridel, J.; Gaubicher, J.; Lestriez, B.; Guyomard, D. Mechanism of Silicon Electrode Aging upon Cycling in Full Lithium-Ion Batteries. ChemSusChem 2016, 9 (8), 841–848; https://doi.org/10.1002/cssc.201501628.Suche in Google Scholar PubMed

7. Wang, J. N.; Zhang, Y. L.; Liu, Y.; Zheng, W.; Lee, L. P.; Sun, H. B. Recent Developments in Superhydrophobic Graphene and Graphene-Related Materials: From Preparation to Potential Applications. Nanoscale 2015, 7 (16), 7101–7114; https://doi.org/10.1039/c5nr00719d.Suche in Google Scholar PubMed

8. Parvate, S.; Dixit, P.; Chattopadhyay, S. Superhydrophobic Surfaces: Insights from Theory and Experiment. J. Phys. Chem. B 2020, 124 (8), 1323–1360; https://doi.org/10.1021/acs.jpcb.9b08567.Suche in Google Scholar PubMed

9. Ahmad, D.; van den Boogaert, I.; Miller, J.; Presswell, R.; Jouhara, H. Hydrophilic and Hydrophobic Materials and Their Applications. Energy Sourc., Part A Recover Util Environ. Eff. 2018, 40 (22), 2686–2725; https://doi.org/10.1080/15567036.2018.1511642.Suche in Google Scholar

10. Ng, W. H.; Lu, Y.; Liu, H.; Carmalt, C. J; Parkin, I. P.; Kenyon, A. J Controlling and Modelling the Wetting Properties of III-V Semiconductor Surfaces Using Re-entrant Nanostructures. Sci. Rep. 2018, 8 (1), 1–8; https://doi.org/10.1038/s41598-018-21864-2.Suche in Google Scholar PubMed PubMed Central

11. Wang, Y.; Yang, Y. Superhydrophobic Surfaces-Based Redox-Induced Electricity from Water Droplets for Self-Powered Wearable Electronics. Nano. Energy 2019, 56 (December 2018), 547–554; https://doi.org/10.1016/j.nanoen.2018.11.089.Suche in Google Scholar

12. Hsiao, M.; Chen, K. Y.; Chen, C. Y. Tailoring the Robust Superhydrophobic Silicon Textures with Stable Photodetection Properties. Sci. Rep. 2019, 9 (1), 1–9; https://doi.org/10.1038/s41598-018-37853-4.Suche in Google Scholar PubMed PubMed Central

13. Khaskhoussi, A.; Calabrese, L.; Patané, S.; Proverbio, E. Effect of Chemical Surface Texturing on the Superhydrophobic Behavior of Micro–nano-roughened AA6082 Surfaces. Mater. (Basel) 2021, 14 (23), 1–18; https://doi.org/10.3390/ma14237161.Suche in Google Scholar PubMed PubMed Central

14. Manoharan, K.; Bhattacharya, S. Superhydrophobic Surfaces Review: Functional Application, Fabrication Techniques and Limitations. J. Micromanuf. 2019, 2 (1), 59–78; https://doi.org/10.1177/2516598419836345.Suche in Google Scholar

15. Barati, D. G.; Aliofkhazraei, M.; Khorsand, S.; Sokhanvar, S.; Kaboli, A. Science and Engineering of Superhydrophobic Surfaces: Review of Corrosion Resistance, Chemical and Mechanical Stability. Arab. J. Chem. 2020, 13 (1), 1763–1802; https://doi.org/10.1016/j.arabjc.2018.01.013.Suche in Google Scholar

16. Zhang, Y.; Zhang, Z.; Yang, J; Yue, Y.; Zhang, H. A Review of Recent Advances in Superhydrophobic Surfaces and Their Applications in Drag Reduction and Heat Transfer. Nanomaterials 2022, 12 (1); https://doi.org/10.3390/nano12010044.Suche in Google Scholar PubMed PubMed Central

17. Das, A.; Dhar, M.; Manna, U. Small Molecules Derived Tailored-Superhydrophobicity on Fibrous and Porous Substrates–With Superior Tolerance. Chem. Eng. J. 2022, 430 (P1); https://doi.org/10.1016/j.cej.2021.132597.Suche in Google Scholar

18. Zemajtis, F.; Hasan, A. B. M. R.; Yetik, O.; Trtik, P.; Pillai, K. M.; Sobolev, K. From Superhydrophilicity to Superhydrophobicity: High-Resolution Neutron Imaging and Modeling of Water Imbibition Thourough Porous Surfaces Treated with Engineered Nano-Coatings. Sci. Rep. 2023, 13 (1), 1–16; https://doi.org/10.1038/s41598-023-38324-1.Suche in Google Scholar PubMed PubMed Central

19. Li, X. M.; Reinhoudt, D.; Crego-Calama, M. What Do We Need for a Superhydrophobic Surface? A Review on the Recent Progress in the Preparation of Superhydrophobic Surfaces. Chem. Soc. Rev. 2007, 36 (8), 1350–1368; https://doi.org/10.1039/b602486f.Suche in Google Scholar PubMed

20. Zhong, M.; Xu, D.; Yu, X.; Huang, K.; Liu, X.; Qu, Y.; Xu, Y.; Yang, D. Interface Coupling in Graphene/fluorographene Heterostructure for High-Performance Graphene/silicon Solar Cells. Nano. Energy 2016, 28, 12–18; https://doi.org/10.1016/j.nanoen.2016.08.031.Suche in Google Scholar

21. Chen, C.-C.; Aykol, M.; Chang, C.-C.; Levi, A. F. J; Cronin, S. B. Graphene-Silicon Schottky Diodes. Nano. Lett. 2011, 11 (11), 5097; https://doi.org/10.1021/nl203288r.Suche in Google Scholar

22. Jeevahan, J; Chandrasekaran, M.; Britto Joseph, G.; Durairaj, R. B.; Mageshwaran, G. Superhydrophobic Surfaces: a Review on Fundamentals, Applications, and Challenges. J. Coatings Technol. Res. 2018, 15 (2), 231–250; https://doi.org/10.1007/s11998-017-0011-x.Suche in Google Scholar

23. Vrancken, N.; Sergeant, S.; Vereecke, G.; Doumen, G.; Holsteyns, F.; Terryn, H.; De Gendt, S.; Xu, X. Superhydrophobic Breakdown of Nanostructured Surfaces Characterized In Situ Using ATR-FTIR. Langmuir 2017, 33 (15), 3601–3609; https://doi.org/10.1021/acs.langmuir.6b04471.Suche in Google Scholar PubMed

24. Lifton, V.; Simon, S.; Frahm, R. E. Reserve Battery Architecture Based on Superhydrophobic Nanostructured Surfaces. Bell Syst. Tech. J. 2005, 10 (3), 81–85; https://doi.org/10.1002/bltj.20105.Suche in Google Scholar

25. Akinwande, D.; Huyghebaert, C.; Wang, C. H.; Serna, M. I.; Goossens, S.; Li, L. J.; Wong, H. S. P.; Koppens, F. H. L. Graphene and Two-Dimensional Materials for Silicon Technology. Nature 2019, 573 (7775), 507–518; https://doi.org/10.1038/s41586-019-1573-9.Suche in Google Scholar PubMed

26. Naffeti, M.; Zaïbi, M.; García-Arias, A. V.; Chtourou, R.; Postigo, P. Efficient Diode Performance with Improved Effective Carrier Lifetime and Absorption Using Bismuth Nanoparticles Passivated Silicon Nanowires. Nanomaterials 2022, 12 (21); https://doi.org/10.3390/nano12213729.Suche in Google Scholar PubMed PubMed Central

Received: 2024-02-14
Accepted: 2024-06-14
Published Online: 2024-10-10
Published in Print: 2024-11-26

© 2024 Walter de Gruyter GmbH, Berlin/Boston

Artikel in diesem Heft

  1. Frontmatter
  2. Editorial
  3. 5th International Conference on Processing and Characterization of Materials 2023 (ICPCM 2023)
  4. Original Papers
  5. Experimental studies on coal mine over-burden incorporated concrete as a sustainable substitute for fine aggregate in concrete construction
  6. A complex impedance spectroscopy study on PVDF/PANI/CoFe2O4 composites
  7. Optimizing electrical properties and efficiency of copper-doped CdS and CdTe solar cells through advanced ETL and HTL integration: a comprehensive experimental and numerical study
  8. Synthesis and characterization of hydroxyapatite from Ariidea fish bone as reinforcement material for (chios mastic gum: papyrus vaccine pollen) bio composite bony scaffold
  9. Optimization of the process parameter of lean-grade self-reducing pellets by surface response modelling
  10. From raw materials to functional material: synthesis and piezoelectric characterization of PIN–PT binary relaxor material
  11. Effect of ball milling on bulk MoS2 and the development of Al–MoS2 nanocomposites by powder metallurgy route
  12. Effect of beeswax on the physico-mechanical properties of poly (butylene adipate terephthalate)/poly lactic acid blend films
  13. Effect of Y2O3, TiO2, ZrO2 dispersion on oxidation resistance of W–Ni–Nb–Mo alloys
  14. Multifunctional characterisation of pressureless sintered Al2O3 –CaTiO3 nanocomposite
  15. Silicon–carbon superhydrophobic nano-structure for next generation semiconductor industry
  16. Interrelation between mechanical and electromagnetic radiation emission parameters with variable notch-width ratios under tensile fracture in silicon steel
  17. Effect of tool rotation and welding speed on microstructural and mechanical properties of dissimilar AA6061-T6 and AA5083-H12 joint in friction stir welding
  18. Effect of bentonite and molasses binder content on physical and mechanical properties of green and fired mill scale pellets
  19. FA-GGBFS based geopolymer concrete incorporating CMRW and SS as fine and coarse aggregates
  20. Characteristic study of intra woven green fibers for structural application
  21. An experimental investigation by electrochemical impedance spectroscopy for the study of mechanism of copper electrodeposition from an acidic bath
  22. Bažant-Le-Kirane Paradox of fatigue failure in engineering materials
  23. Thermal modeling and analysis of laser transmission welding of polypropylene: process mechanics and parameters
  24. The influence of welding modes on metallic structures processed through WAAM
  25. Ultrasonic metal welding of Al/Cu joints with Ni coating: parametric effects on joint performance and microstructural modifications
  26. News
  27. DGM – Deutsche Gesellschaft für Materialkunde
Heruntergeladen am 17.11.2025 von https://www.degruyterbrill.com/document/doi/10.1515/ijmr-2024-0066/pdf?lang=de
Button zum nach oben scrollen