Silicon–carbon superhydrophobic nano-structure for next generation semiconductor industry

Girija Shankar Dixit; Abanti Sahoo; Arjit Guha; Soumya Sanjeeb Mohapatra

doi:10.1515/ijmr-2024-0066

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Silicon–carbon superhydrophobic nano-structure for next generation semiconductor industry

Girija Shankar Dixit , Abanti Sahoo , Arjit Guha and Soumya Sanjeeb Mohapatra

Published/Copyright: October 10, 2024

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From the journal International Journal of Materials Research Volume 115 Issue 11-12

Abstract

Superhydrophobic surfaces are important in waterproof applications that withstand harsh chemical exposure, ultraviolet radiation, and heat. Surface energy modification of the surface, such as silanization or (fluoro)polymer coatings, increases the hydrophobicity of the nanostructure. The present study follows a bilayer architecture that turns hydrophilic silicon into a superhydrophobic one. The first step creates a unique silicon–graphene hybrid structure on the silicon surface by coating graphene on the P-type silicon substrate. In the second step, low surface energy material (a combination of hexadecyltrimethoxysilane and hexamethyldisilazane) is coated by the dip coating process. This study investigates the durability of superhydrophobicity under severe mechanical, thermal, and chemical conditions. High-temperature tolerance and water jet tests are also performed. The present work also involves the study of coating regeneration. This approach can be applied to all shapes and sizes of silicon–graphene surfaces and is proven to be excellent in the semiconductor industry.

Keywords: Silicon; Graphene; Superhydrophobic; Coating

Corresponding author: Girija Shankar Dixit, Department of Electrical Engineering, NIT Rourkela, 769008, Odisha, India, E-mail: girijashankardixit@gmail.com

Research ethics: Not applicable.
Informed consent: Not applicable.
Author contributions: Girija Shankar Dixit was involved in writing the manuscript and experiment. Abanti Sahoo contributed to the technical discussion. Arijit Guha was involved in editing. Soumya Sanjeeb Mohapatra was involved in funding the research and guidance.
Use of Large Language Models, AI and Machine Learning Tools: None declared.
Conflict of interest: The authors declare that they have no competing interest.
Research funding: This work was supported by Jindal steel & power limited under the Project Code C2/24/CH/106.
Data availability: The raw data can be obtained on request from the corresponding author.

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Received: 2024-02-14

Accepted: 2024-06-14

Published Online: 2024-10-10

Published in Print: 2024-11-26

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Articles in the same Issue

https://doi.org/10.1515/ijmr-2024-0066

Keywords for this article

Silicon; Graphene; Superhydrophobic; Coating