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Monolithic photonic integration for visible and short near-infrared wavelengths: technologies and platforms for bio and life science applications

  • Marco A.G. Porcel

    Marco A.G. Porcel obtained his MSc in Telecom Engineering at the Polytechnic University of Valencia (UPV, Spain) in 2011. He continued with his PhD degree (defended on December 2017) on nonlinear control of light in integrated waveguides at the Laser Physics and Nonlinear Optics group (LPNO) part of the MESA+ Institute for Nanotechnology at the University of Twente (The Netherlands). In 2017, he joined VLC Photonics as the R&D Manager, working on the field of photonic integrated circuits.

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    , Iñigo Artundo

    Iñigo Artundo obtained his MSc in Telecom Engineering at the Universidad Publica de Navarra (Pamplona, Spain) in 2005 and received his PhD in Applied Physics and Photonics at the Vrije Universiteit Brussel (Brussels, Belgium) in 2009. He has been involved in several national and European research projects and networks of excellence focused on optical telecom and interconnects, micro-optics, and photonic integration. He has worked as a reviewer for several scientific journals, national and international funding agencies. He holds specializations in Business Financing, Commercial Management and Research, and Strategic Marketing. He is a member of IEEE, SPIE, and COIT. He currently is the CEO of VLC Photonics, working in the field of photonic integrated circuits.

    , J. David Domenech

    J. David Domenech received his BSc degree in Telecommunications and his MSc degree in Technologies, Systems and Networks of Communication from the Universidad Politecnica de Valencia (UPV) in 2006 and 2008, respectively. He obtained his PhD degree in Optics at the Telecommunications and Multimedia Applications Institute (iTEAM) from UPV, inside the Optical and Quantum Communications Group, focusing his research in the use of integrated ring resonators for microwave photonics applications. Since 2006, he has been working on the design of integrated optic circuits in indium phosphide/silicon nitride/SOI technologies within several European and national research projects. In 2012, he was awarded with the Intel PhD Honor Programme award. He is currently the CTO of VLC Photonics, working in the field of photonic integrated circuits.

    , Douwe Geuzebroek

    Douwe Geuzebroek is the VP of sales and marketing at LioniX International. He holds a masters degree in Electrical Engineering of the University of Twente and did a PhD research at the Integrated Optical MicroSystems group on the topic of ‘Flexible Optical Network Components Based on Densely Integrated Micro-ring Resonators’. Besides this, he finished an introduction program at the TSM Business School. In 2005, he joined LioniX b.v. as a design engineer and project leader focusing on micro-ring resonators and other integrated optical telecommunication devices and was actively involved in the start-up of XiO Photonics in 2009.

    , Rino Sunarto

    Rino Sunarto studied at the Saint Joseph College Malang and obtained his BEng on Electrical and Electronic Engineering in 2008 at the Saxion University of Applied Sciences. He was an ASIC design engineer at Bruco B. V. from 2008 to 2009, a junior design engineer at XiO Photonics from 2009 to 2011, and now works as a software engineer at PhoeniX Software.

    and Romano Hoofman

    Romano Hoofman received his MSc degree in Molecular Sciences from Wageningen University in the Netherlands in 1995 and his PhD degree in Radiation Chemistry from the Technological University of Delft, The Netherlands, in 2000. He started his career in the industry where he worked as a principal scientist at Philips Research and later on at NXP Semiconductors. He covered many different R&D topics, ranging from CMOS integration, photovoltaic technology, thin-film batteries, and sensors (which form together the building blocks for IoT sensor nodes). Currently, he is a program director at IMEC, where he is responsible for the project management of Europractice and related services.

Published/Copyright: March 24, 2018
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Abstract

This tutorial aims to provide a general overview on the state-of-the-art of photonic integrated circuits (PICs) in the visible and short near-infrared (NIR) wavelength ranges, mostly focusing in silicon nitride (SiN) substrates, and a guide to the necessary steps in the design toward the fabrication of such PICs. The focus is put on bio- and life sciences, given the adequacy and, thus, a large number of applications in this field.

About the authors

Marco A.G. Porcel

Marco A.G. Porcel obtained his MSc in Telecom Engineering at the Polytechnic University of Valencia (UPV, Spain) in 2011. He continued with his PhD degree (defended on December 2017) on nonlinear control of light in integrated waveguides at the Laser Physics and Nonlinear Optics group (LPNO) part of the MESA+ Institute for Nanotechnology at the University of Twente (The Netherlands). In 2017, he joined VLC Photonics as the R&D Manager, working on the field of photonic integrated circuits.

Iñigo Artundo

Iñigo Artundo obtained his MSc in Telecom Engineering at the Universidad Publica de Navarra (Pamplona, Spain) in 2005 and received his PhD in Applied Physics and Photonics at the Vrije Universiteit Brussel (Brussels, Belgium) in 2009. He has been involved in several national and European research projects and networks of excellence focused on optical telecom and interconnects, micro-optics, and photonic integration. He has worked as a reviewer for several scientific journals, national and international funding agencies. He holds specializations in Business Financing, Commercial Management and Research, and Strategic Marketing. He is a member of IEEE, SPIE, and COIT. He currently is the CEO of VLC Photonics, working in the field of photonic integrated circuits.

J. David Domenech

J. David Domenech received his BSc degree in Telecommunications and his MSc degree in Technologies, Systems and Networks of Communication from the Universidad Politecnica de Valencia (UPV) in 2006 and 2008, respectively. He obtained his PhD degree in Optics at the Telecommunications and Multimedia Applications Institute (iTEAM) from UPV, inside the Optical and Quantum Communications Group, focusing his research in the use of integrated ring resonators for microwave photonics applications. Since 2006, he has been working on the design of integrated optic circuits in indium phosphide/silicon nitride/SOI technologies within several European and national research projects. In 2012, he was awarded with the Intel PhD Honor Programme award. He is currently the CTO of VLC Photonics, working in the field of photonic integrated circuits.

Douwe Geuzebroek

Douwe Geuzebroek is the VP of sales and marketing at LioniX International. He holds a masters degree in Electrical Engineering of the University of Twente and did a PhD research at the Integrated Optical MicroSystems group on the topic of ‘Flexible Optical Network Components Based on Densely Integrated Micro-ring Resonators’. Besides this, he finished an introduction program at the TSM Business School. In 2005, he joined LioniX b.v. as a design engineer and project leader focusing on micro-ring resonators and other integrated optical telecommunication devices and was actively involved in the start-up of XiO Photonics in 2009.

Rino Sunarto

Rino Sunarto studied at the Saint Joseph College Malang and obtained his BEng on Electrical and Electronic Engineering in 2008 at the Saxion University of Applied Sciences. He was an ASIC design engineer at Bruco B. V. from 2008 to 2009, a junior design engineer at XiO Photonics from 2009 to 2011, and now works as a software engineer at PhoeniX Software.

Romano Hoofman

Romano Hoofman received his MSc degree in Molecular Sciences from Wageningen University in the Netherlands in 1995 and his PhD degree in Radiation Chemistry from the Technological University of Delft, The Netherlands, in 2000. He started his career in the industry where he worked as a principal scientist at Philips Research and later on at NXP Semiconductors. He covered many different R&D topics, ranging from CMOS integration, photovoltaic technology, thin-film batteries, and sensors (which form together the building blocks for IoT sensor nodes). Currently, he is a program director at IMEC, where he is responsible for the project management of Europractice and related services.

Acknowledgment

This work was supported by the European Union’s Horizon 2020 research and innovations program, under the grant agreement no. 688519 (PIX4life).

References

[1] K. Yamada, J. Liu, T. Baba, L. Vivien, D.-X. Xu, et al., Photonic Integration and Photonics-Electronics Convergence on Silicon Platform (Frontiers Media SA, Lausanne, Switzerland, 2015).10.3389/978-2-88919-693-7Search in Google Scholar

[2] R. Soref, IEEE J. Sel. Top. Quantum Electron. 12, 1678–1687 (2006).10.1109/JSTQE.2006.883151Search in Google Scholar

[3] A. E.-J. Lim, J. Song, F. Qing, C. Li, X. Tu, et al., IEEE J. Sel. Top. Quantum Electron. 20, 405–416 (2014).10.1109/JSTQE.2013.2293274Search in Google Scholar

[4] P. Muñoz, G. Mico, L. A. Bru, D. Pastor, D. Pérez, et al., Sensors 17, 2088 (2017).10.3390/s17092088Search in Google Scholar

[5] R. G. Heideman, R. P. H. Kooyman, and J. Greve, Sens. Actuat. B: Chem. 10, 209–217 (1993).10.1016/0925-4005(93)87008-DSearch in Google Scholar

[6] E. F. Schipper, A. M. Brugman, L. M. Lechuga, L. M. Lechuga, R. P. H. Kooyman, et al., Sens. Actuat. B: Chem. 40, 147–153 (1997).10.1016/S0925-4005(97)80254-7Search in Google Scholar

[7] A. Fernández Gavela, D. Grajales Garca, J. C. Ramirez, and L. M. Lechuga, Sensors 16, 285 (2016).10.3390/s16030285Search in Google Scholar PubMed PubMed Central

[8] W. Bogaerts, R. Baets, P. Dumon, V. Wiaux, S. Beckx, et al., J. Lightwave Technol. 23, 401–412 (2005).10.1109/JLT.2004.834471Search in Google Scholar

[9] R. Heideman, A. Leinse, W. Hoving, R. Dekker, D. H. Geuzebroek, et al., Proc. SPIE 7221, 7221-7221-15 (2009). doi: 10.1117/12.808409.10.1117/12.808409Search in Google Scholar

[10] C. Monat, P. Domachuk and B. J. Eggleton, Nat. Photonics 1, 106–114 (2007).10.1038/nphoton.2006.96Search in Google Scholar

[11] M. J. Shaw, J. Guo, G. A. Vawter, S. Habermehl and C. T. Sullivan, MOEMS 5720 (2005), 109–118.Search in Google Scholar

[12] A. Yalcin, K. C. Popat, J. C. Aldridge, T. A. Desai, J. Hryniewicz, et al., IEEE J. Sel. Top. Quantum Electron. 12, 148–155 (2006).10.1109/JSTQE.2005.863003Search in Google Scholar

[13] A. Schimpf, F. Canto, D. Bucci, A. Magnaldo, L. Couston, et al., In: ‘2011 2nd International Conference on Microfluidics and Integrated Optics Glass Sensor for In-line Microprobing of Nuclear Samples in Advancements in Nuclear Instrumentation Measurement Methods and Their Applications (ANIMMA) (IEEE, 2011), 1–7.10.1109/ANIMMA.2011.6172925Search in Google Scholar

[14] I. D. Block, L. L. Chan and B. T. Cunningham, Sens. Actuat. B: Chem. 120, 187–193 (2006).10.1016/j.snb.2006.02.006Search in Google Scholar

[15] A. H. Hosseinnia, A. H. Atabaki, A. A. Eftekhar and A. Adibi, Opt. Express 23, 30297 (2015).10.1364/OE.23.030297Search in Google Scholar PubMed

[16] G. A. J. Besselink, R. G. Heideman, E. Schreuder, L. S. Wevers, F. Falke, et al. Biosens. Bioelectron. 7, 1–11 (2016).Search in Google Scholar

[17] D. McCloskey and J. F. Donegan, Silicon nitride microdisks in the visible range in Transparent Optical Networks (ICTON), 2011 13th International Conference on (IEEE, 2011), 1–4.10.1109/ICTON.2011.5971052Search in Google Scholar

[18] D. N. Urrios, F. F. Lupi, J. Montserrat, C. Domínguez, P. Pellegrino, et al., Optical characterisation of high Q silicon rich silicon nitride u-disks in the visible range in CLEO/Europe and EQEC 2011 Conference Digest (2011), paper CK2_4 The European Conference on Lasers and Electro-Optics (Optical Society of America, 2011), CK2_4.Search in Google Scholar

[19] S. Romero-Garca, F. Merget, F. Zhong, H. Finkelstein and J. Witzens, Opt. Lett. 38, 2521–2523 (2013).10.1364/OL.38.002521Search in Google Scholar PubMed

[20] S. Romero-Garcia, T. Klos, E. Klein, J. Leuermann, D. Geuzebroek, et al., Proc. SPIE, 101080 (2017).Search in Google Scholar

[21] D. Martens, A. Z. Subramanian, S. Pathak, M. Vanslembrouck, P. Bienstman, et al., IEEE Photon. Technol. Lett. 27, 137–140 (2015).10.1109/LPT.2014.2363298Search in Google Scholar

[22] D. Geuzebroek, A. van Rees, E. Klein and K. Lawniczuk, Visible arrayed waveguide grating (400 nm–700 nm) for ultra-wide band (400–1700 nm) integrated spectrometer for spectral tissue sensing. in CLEO/Europe and EQEC 2017 Conference Digest (2017).10.1109/CLEOE-EQEC.2017.8087114Search in Google Scholar

[23] G. Calafiore, A. Koshelev, S. Dhuey, A. Goltsov, P. Sasorov, et al., Light Sci. Appl. 3, e203 (2014).10.1038/lsa.2014.84Search in Google Scholar

[24] X. Nie, E. Ryckeboer, G. Roelkens and R. Baets, Opt. Express 25, A409 (2017).10.1364/OE.25.00A409Search in Google Scholar PubMed

[25] C. H. Henry, R. F. Kazarinov, H. J. Lee, K. J. Orlowsky and L. E. Katz LE, Appl. Opt. 26, 2621 (1987).10.1364/AO.26.002621Search in Google Scholar PubMed

[26] J. F. Bauters, M. J. Heck, D. John, D. Dai, M. C. Tien, et al., Opt. Express 19, 3163–3174 (2011).10.1364/OE.19.003163Search in Google Scholar PubMed

[27] A. Leinse, R. G. Heideman, E. J. Klein, R. Dekker, C. G. H. Roeloffzen, et al., TriPleX™ platform technology for photonic integration: applications from UV through NIR to IR in Information Photonics (IP), 2011 ICO International Conference on (IEEE, 2011), 1–2.10.1109/ICO-IP.2011.5953782Search in Google Scholar

[28] S. Romero-García, F. Merget, F. Zhong, H. Finkelstein and J. Witzens, Opt. Express 21, 14036 (2013).10.1364/OE.21.014036Search in Google Scholar PubMed

[29] A. Z. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, et al., IEEE Photon. J. 5, 2202809 (2013).10.1109/JPHOT.2013.2292698Search in Google Scholar

[30] K. Misiakos, I. Raptis, A. Salapatas, E. Makarona, A. Botsialas, et al., Opt. Express 22, 8856 (2014).10.1364/OE.22.008856Search in Google Scholar PubMed

[31] D. Duval, J. Osmond, S. Dante, C. Domínguez and L. M. Lechuga, IEEE Photon. J. 5, 3700108–3700108 (2013).10.1109/JPHOT.2013.2251873Search in Google Scholar

[32] F. Ghasemi, A. A. Eftekhar, D. S. Gottfried, X. Song, R. D. Cummings, et al., Self-referenced silicon nitride array microring biosensor for toxin detection using glycans at visible wavelength in (2013), 85940A.10.1117/12.2005653Search in Google Scholar

[33] C. A. Barrios, Anal. Bioanal. Chem. 403, 1467–1475 (2012).10.1007/s00216-012-5937-3Search in Google Scholar PubMed

[34] L. Martiradonna, F. Pisanello, T. Stomeo, A. Qualtieri, G. Vecchio, et al., Silicon nitride photonic crystal nanocavities for biochip applications in Transparent Optical Networks (ICTON), 2011 13th International Conference on (IEEE, 2011), 1–4.10.1109/ICTON.2011.5970900Search in Google Scholar

[35] P. V. Lambeck, Integrated optical sensors for the chemical domain. Meas. Sci. Technol. 17, R93–R116 (2006).10.1088/0957-0233/17/8/R01Search in Google Scholar

[36] F. Prieto, B. Sepúlveda, A. Calle, A. Llobera, C. Domínguez, et al., Nanotechnology 14, 907–912 (2003).10.1088/0957-4484/14/8/312Search in Google Scholar

[37] F. Ghasemi, A. A. Eftekhar, H. S. Mousavi, R. Abbaspour, H. Moradinejad, et al., Lab-on-chip Silicon Nitride Microring Sensor at Visible Wavelength Using Glycoprotein Receptors in CLEO: Applications and Technology (Optical Society of America, 2014), AW1L–3.10.1364/CLEO_AT.2014.AW1L.3Search in Google Scholar

[38] J. Maldonado, A. B. González-Guerrero, C. Domínguez and L. M. Lechuga, Biosens. Bioelectron. 85, 310–316 (2016).10.1016/j.bios.2016.04.095Search in Google Scholar PubMed

[39] M. Welkenhuysen, L. Hoffman, Z. Luo, A. De Proft, C. Van den Haute, et al., Sci. Rep. 6, 1–10 (2016).10.1038/s41598-016-0001-8Search in Google Scholar PubMed PubMed Central

[40] J. P. Epping, T. Hellwig, M. Hoekman, R. Mateman, A. Leinse, et al., Opt. Express 23, 19596–19604 (2015).10.1364/OE.23.019596Search in Google Scholar PubMed

[41] M. A. G. Porcel, F. Schepers, J. P. Epping, T. Hellwig and M. Hoekman, et al., Opt. Express 25, 1542 (2017).10.1364/OE.25.001542Search in Google Scholar PubMed

[42] D. J. Moss, R. Morandotti, A. L. Gaeta and M. Lipson, Nat. Photonics 7, 597–607 (2013).10.1038/nphoton.2013.183Search in Google Scholar

[43] S. Sabouri, M. Namdari, S. Hosseini and K. Jamshidi, 1-D array of silicon nitride grating couplers for visible light communications in Wireless for Space and Extreme Environments (WiSEE), 2016 IEEE International Conference on (IEEE, 2016), 73–76.10.1109/WiSEE.2016.7877307Search in Google Scholar

[44] M. Raval, A. Yaacobi, D. Coleman, N. M. Fahrenkopf, C. Baiocco, et al., Nanophotonic phased array for visible light image projection in Photonics Conference (IPC) (IEEE, 2016), 206–207.10.1109/IPCon.2016.7831042Search in Google Scholar

[45] M. J. Heck, Nanophotonics 6, 93–107 (2016).10.1515/nanoph-2015-0152Search in Google Scholar

[46] P. Muellner, E. Melnika, G. Koppitsch, J. Kraft, F. Schrank, et al., Procedia Eng. 120, 578–581 (2015).10.1016/j.proeng.2015.08.728Search in Google Scholar

[47] E. Ryckeboer, J. Vierendeels, A. Lee, S. Werquin, P. Bienstman, et al., Lab Chip 13, 4392 (2013).10.1039/c3lc50752aSearch in Google Scholar PubMed

[48] D. Bischof, F. Kehl and M. Michler, Opt. Commun. 380, 273–279 (2016).10.1016/j.optcom.2016.06.013Search in Google Scholar

[49] X.-J. Liu, J.-J. Zhang, X.-W. Sun, Y.-B. Pan, L.-P. Huang, et al., Thin Solid Films 460, 72–77 (2004).10.1016/j.tsf.2004.01.104Search in Google Scholar

[50] R. G. Heideman, A. Melloni, M. Hoekman, A. Borreman, A. Leinse, et al., Proc. IEEE Benelux, 71–74 (2005).Search in Google Scholar

[51] A. Z. Subramanian, E. Ryckeboer, A. Dhakal, F. Peyskens, A. Malik, et al., Photon. Res. 3, 47–59 (2015).10.1364/PRJ.3.000B47Search in Google Scholar

[52] T. Chalyan, L. Pasquardini, F. Falke, M. Zanetti, R. Guider, et al., Proc. SPIE 9899, 1–9 (2016).Search in Google Scholar

[53] B. Sepúlveda, J. Sánchez del Río, M. Moreno, F. J. Blanco, K. Mayora, et al., J. Opt. A Pure Appl. Opt. 8, S561–S566 (2006).10.1088/1464-4258/8/7/S41Search in Google Scholar

[54] T. Claes, W. Bogaerts and P. Bienstman, Opt. Lett. 36, 3320 (2011).10.1364/OL.36.003320Search in Google Scholar PubMed

[55] D. Dai, Z. Wang, J. F. Bauters, M.-C. Tien, M. J. R. Heck, et al., Opt. Express 19, 14130–14136 (2011).10.1364/OE.19.014130Search in Google Scholar PubMed

[56] K. Zinoviev, L. G. Carrascosa, J. Sánchez del Río, B. Sepúlveda, C. Domínguez, et al., Adv. Opt. Technol. 2008, 1–6 (2008).10.1155/2008/383927Search in Google Scholar

[57] F. Ghasemi, M. Chamanzar, E. S. Hosseini, A. A. Eftekhar, Q. Li, et al., Compact fluorescence sensor using on-chip silicon nitride microdisk in Photonics Conference (PHO) (IEEE, 2011), 151–152.10.1109/PHO.2011.6110470Search in Google Scholar

[58] M. Mahmud-Ul-Hasan, P. Neutens, R. Vos, L. Lagae, P. V. Dorpe, et al., ACS Photonics 4, 495–500 (2017).10.1021/acsphotonics.6b01016Search in Google Scholar

[59] T. Korthorst, R. Stoffer and A. Bakker, Adv. Opt. Technol. 4, 147–155 (2015).10.1515/aot-2015-0004Search in Google Scholar

[60] Luceda. http://www.lucedaphotonics.com/.Search in Google Scholar

[61] PhoeniX Software – Solutions for micro and nano technologies. http://www.phoenixbv.com/.Search in Google Scholar

[62] Photon Design. https://www.photond.com/.Search in Google Scholar

[63] RSoft Products. https://www.synopsys.com/optical-solutions/rsoft.html.Search in Google Scholar

[64] Optiwave. https://optiwave.com/.Search in Google Scholar

[65] Lumerical Inc. / Innovative Photonic Design ToolsSearch in Google Scholar

[66] COMSOL Wave Optics Simulation Software. https://www.comsol.com/wave-optics-module.Search in Google Scholar

[67] L. Bolla, ElectroMagnetic-Python version 0.1.2.Search in Google Scholar

[68] Prototyping multi project wafer runs. www.europracticeic.com.Search in Google Scholar

[69] PIX4life. http://www.pix4life.eu/.Search in Google Scholar

[70] PIXAPP. http://www.pixapp.eu/.Search in Google Scholar

[71] T. Claes, W. Bogaerts and P. Bienstman, Opt. Express 18, 22747 (2010).10.1364/OE.18.022747Search in Google Scholar PubMed

[72] R. Dekker, E. Klein and D. Geuzebroek, Polarization maintaining single mode color combining using TriPleX™ based integrated optics for biophotonic applications in (IEEE, 2012), 286–287.10.1109/IPCon.2012.6358604Search in Google Scholar

[73] L. Chang, M. H. P. Pfeiffer, N. Volet, M. Zervas, J. D. Peters, et al., Opt. Lett. 42, 803–806 (2017).10.1364/OL.42.000803Search in Google Scholar PubMed

[74] M. J. R. Heck, J. F. Bauters, M. L. Davenport, K. K. Doylend, S. Jain, et al., IEEE J. Sel. Top. Quantum Electron. 19, 6100117–6100117 (2013).10.1109/JSTQE.2012.2235413Search in Google Scholar

[75] E. P. Haglund, S. Kumari, E. Haglund, J. Gustavsson, R. G. Baets, et al., IEEE J. Sel. Top. Quantum Electron. 23, 1–9 (2017).10.1109/JSTQE.2016.2633823Search in Google Scholar

[76] D. K. Schroder, Semiconductor Material and Device Characterization (Wiley, Hoboken, NJ, USA, 1998).Search in Google Scholar

[77] S. Kumari, E. P. Haglund, J. S. Gustavsson, A. Larsson, G. Roelkens, et al., Design of an intra-cavity SiN grating for integrated 850nm VCSELs in Proceedings Symposium IEEE Photonics Society Benelux (2016), 263–266.Search in Google Scholar

[78] LioniX International. http://www.lionix-international.com/.Search in Google Scholar

[79] Imec R&D, nano electronics and digital technologies. https://www.imec-int.com/.Search in Google Scholar

Received: 2017-10-5
Accepted: 2017-12-4
Published Online: 2018-3-24
Published in Print: 2018-4-25

©2018 THOSS Media & De Gruyter, Berlin/Boston

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