Multi-scale referencing and coordinate unification of optical sensors in multi-axis machines

Marc Gronle; Wolfgang Osten

doi:10.1515/aot-2016-0053

Article

Multi-scale referencing and coordinate unification of optical sensors in multi-axis machines

Marc Gronle
Marc Gronle received his Diploma in Mechatronics from the University of Stuttgart in 2011. Since Mai 2011 he is employed at the Institute of Applied Optics (ITO) at University of Stuttgart as research assistant. From October 2014 on, he is heading the group of 3D metrology. His research work is focused on multi-sensor optical systems, 3D view and automatic measurement planning as well as sensor technologies and image processing for 3D metrology. Furthermore, he is leading the development team for the open source lab automation and measurement software itom.
and Wolfgang Osten
Wolfgang Osten received the Diploma in Physics from the Friedrich-Schiller-University Jena in 1979 and in 1983 the PhD degree from the Martin-Luther-University Halle-Wittenberg for his thesis in the field of holographic interferometry. From 1984 to 1991 he was employed at the Central Institute of Cybernetics and Information Processes in Berlin making investigations in digital image processing and computer vision. In 1991 he joined the Bremen Institute of Applied Beam Technology (BIAS) to establish the Department Optical 3D-Metrology. Since September 2002 he has been a full professor at the University of Stuttgart and director of the Institute for Applied Optics. His research work is focused on new concepts for industrial inspection and metrology by combining modern principles of optical metrology, sensor technology and image processing. Special attention is directed to the development of resolution enhanced technologies for the investigation of micro and nano structures.

Published/Copyright: December 12, 2016

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From the journal Advanced Optical Technologies Volume 5 Issue 5-6

Abstract

Multi-scale optical sensor systems help to overcome the area of conflict between resolution, field size, and inspection time if it comes to the frequent problem of detecting small defects on large areas. The sensors of such systems are chosen according to two main properties: On the one hand, they should measure in opposed scales; on the other hand, their measurement principles should vary as well in order to be suitable for different material and surface properties. However, these systems can only operate at full capacity if it is possible to unify the acquired data from each sensor into one common coordinate system such that an overall analysis is possible, or subsequent sub-measurements can be triggered. In this paper, a general approach for a common sensor referencing is proposed, whose focus lies on microscopic optical sensors for both scattering and reflecting surfaces. The method is able to handle resolutions from the nanometer to millimeter scale in one single system, but is also feasible for a coordinate unification across several single sensor systems.

Keywords: coordinate unification; multi-scale measurement system; sensor fusion; sensor referencing

PACS: 00.06; 00.07; 40.42

About the authors

Marc Gronle

Marc Gronle received his Diploma in Mechatronics from the University of Stuttgart in 2011. Since Mai 2011 he is employed at the Institute of Applied Optics (ITO) at University of Stuttgart as research assistant. From October 2014 on, he is heading the group of 3D metrology. His research work is focused on multi-sensor optical systems, 3D view and automatic measurement planning as well as sensor technologies and image processing for 3D metrology. Furthermore, he is leading the development team for the open source lab automation and measurement software itom.

Wolfgang Osten

Wolfgang Osten received the Diploma in Physics from the Friedrich-Schiller-University Jena in 1979 and in 1983 the PhD degree from the Martin-Luther-University Halle-Wittenberg for his thesis in the field of holographic interferometry. From 1984 to 1991 he was employed at the Central Institute of Cybernetics and Information Processes in Berlin making investigations in digital image processing and computer vision. In 1991 he joined the Bremen Institute of Applied Beam Technology (BIAS) to establish the Department Optical 3D-Metrology. Since September 2002 he has been a full professor at the University of Stuttgart and director of the Institute for Applied Optics. His research work is focused on new concepts for industrial inspection and metrology by combining modern principles of optical metrology, sensor technology and image processing. Special attention is directed to the development of resolution enhanced technologies for the investigation of micro and nano structures.

Acknowledgments

The authors would like to thank L. Fu (Institut für Technische Optik, Univ. Stuttgart) for the preparation of the cross structure in the reference specimen. Further, we would like to extend our thanks to Prof. Sawodny et al. (Institut für Systemdynamik, Univ. Stuttgart) for their good and fruitful cooperation in the joint research field of precise multi-axis inspection machines.

References

[1] W. Osten, Proc. SPIE 9960, 99600P (2016).10.1117/12.2240661Search in Google Scholar

[2] W. Osten, in ‘Optical Imaging and Metrology’, Ed. By W. Osten and N. Reingand (Wiley-WCH, Berlin, 2012).10.1002/9783527648443Search in Google Scholar

[3] J. Siepmann, M. Heinze, P. Kühmstedt and G. Notni, Proc. SPIE 7432, 74320Y (2009).10.1117/12.827053Search in Google Scholar

[4] R. Schmitt, M. Uekita and K. Vielhaber, Meas. Sci. Technol. 20, 117003 (2009).10.1088/0957-0233/20/11/117003Search in Google Scholar

[5] W. Osten, P. Andrä and D. Kayser, Technisches Messen 66, 413–428 (1999).10.1524/teme.1999.66.11.413Search in Google Scholar

[6] A. Weckenmann, X. Jiang, K.-D. Sommer, U. Neuschaefer-Rube, J. Seewig, et al., CIRP Ann. – Manuf. Technol. 58, 701–721 (2009).10.1016/j.cirp.2009.09.008Search in Google Scholar

[7] H. F. Durrant-Whyte, Int. J. Rob. Res. 7, 97–113 (1988).10.1177/027836498800700608Search in Google Scholar

[8] H. Ruser and F. Puente León, tm – Technisches Messen 74, 93–102 (2007).10.1524/teme.2007.74.3.93Search in Google Scholar

[9] W. Osten and N. Reingand, editors. in ‘Optical Imaging and Metrology’, (Wiley-WCH, Berlin, 2012).10.1002/9783527648443Search in Google Scholar

[10] K. Gastinger and W. Osten, in ‘Imaging and Applied Optics’, (Optical Society of America, Arlington, 2013) pp. ATu2B.1.10.1364/AIO.2013.ATu2B.1Search in Google Scholar

[11] K. Gastinger, L. Johnsen, M. Kujawinska, M. Jozwik, U. Zeitner, et al., Proc. SPIE 7718, 77180F (2010).10.1117/12.855087Search in Google Scholar

[12] D. Kayser, T. Bothe and W. Osten, Opt. Eng. 43, 2469–2477 (2004).10.1117/1.1788690Search in Google Scholar

[13] W. Lyda, A. Burla, T. Haist, J. Zimmermann, W. Osten, et al. Proc. SPIE 7718, 77180G (2010).10.1117/12.853819Search in Google Scholar

[14] W. Lyda, A. Burla, T. Haist, M. Gronle and W. Osten, Int. J. Precis. Eng. Man. 13, 483–489 (2012).10.1007/s12541-012-0063-xSearch in Google Scholar

[15] F. Franceschini, M. Galetto, D. Maisano and L. Mastrogiacomo, Int. J. Precis. Eng. Manuf. 15, 1739–1758 (2014).10.1007/s12541-014-0527-2Search in Google Scholar

[16] J. Böhm, J. Gühring and C. Brenner, Proc. SPIE 4309, 154–161 (2001).10.1117/12.410871Search in Google Scholar

[17] A. Loderer and T. Hausotte, J. Sens. Sens. Syst. 5, 1–8 (2016).10.5194/jsss-5-1-2016Search in Google Scholar

[18] S. Rusinkiewicz and M. Levoy, in ‘Proc. 3rd Int. Conf. on 3-D Digital Imaging and Modeling’, 3, 145–152 (2001).10.1109/IM.2001.924423Search in Google Scholar

[19] Y. Huang, X. Qian and S. Chen, Comput. Aided Des. 41, 240–255 (2009).10.1016/j.cad.2008.10.003Search in Google Scholar

[20] F. Li, A. P. Longstaff, S. Fletcher and A. Myers, Opt. Laser Eng. 55, 189–196 (2014).10.1016/j.optlaseng.2013.11.004Search in Google Scholar

[21] D. Wang, W. Tang, X. Zhang, Q. Ma, J. Wang, et al. Proc. ICMA, 1761–1766 (2015).10.1109/ICMA.2015.7237752Search in Google Scholar

[22] A. Keck, M. Böhm, K. L. Knierim, O. Sawodny, M. Gronle, et al., Technisches Messen 81, 280–288 (2014).10.1515/teme-2014-0402Search in Google Scholar

[23] W. Kabsch, Acta Crystallogr. 32, 922–923 (1976).10.1107/S0567739476001873Search in Google Scholar

[24] X. Schwab, C. Kohler, K. Körner, N. Eichhorn and W. Osten. Proc. SPIE 6995, 69950Q (2008).10.1117/12.781822Search in Google Scholar

[25] M. Gronle, W. Lyda, A. Burla and W. Osten, Proc. SPIE 8430, 84300J (2012).10.1117/12.922583Search in Google Scholar

[26] C. A. Wilson and J. A. Theriot, IEEE Trans. Image Process. 15, 1939–1951 (2006).10.1109/TIP.2006.873434Search in Google Scholar

[27] B. Jähne, H. Scharr and S. Körkel, in ‘Handbook of Computer Vision and Applications’, Ed. By B. Jähne, H. Haußecker and P. Geißler, volume 2 (Academic Press, San Diego and London, 1999) pp. 125–151.Search in Google Scholar

[28] P. J. Rousseeuw, J. Am. Stat. Assoc. 79, 871–880 (1984).10.1080/01621459.1984.10477105Search in Google Scholar

[29] M. Gronle, W. Lyda, M. Wilke, C. Kohler and W. Osten, Appl. Opt. 53, 2974 (2014).10.1364/AO.53.002974Search in Google Scholar PubMed

Received: 2016-9-22

Accepted: 2016-11-8

Published Online: 2016-12-12

Published in Print: 2016-12-1

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https://doi.org/10.1515/aot-2016-0053

Keywords for this article

coordinate unification; multi-scale measurement system; sensor fusion; sensor referencing