Multi-scale referencing and coordinate unification of optical sensors in multi-axis machines
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Marc Gronle
Marc Gronle received his Diploma in Mechatronics from the University of Stuttgart in 2011. Since Mai 2011 he is employed at the Institute of Applied Optics (ITO) at University of Stuttgart as research assistant. From October 2014 on, he is heading the group of 3D metrology. His research work is focused on multi-sensor optical systems, 3D view and automatic measurement planning as well as sensor technologies and image processing for 3D metrology. Furthermore, he is leading the development team for the open source lab automation and measurement software
itom .
und
Wolfgang Osten
Wolfgang Osten received the Diploma in Physics from the Friedrich-Schiller-University Jena in 1979 and in 1983 the PhD degree from the Martin-Luther-University Halle-Wittenberg for his thesis in the field of holographic interferometry. From 1984 to 1991 he was employed at the Central Institute of Cybernetics and Information Processes in Berlin making investigations in digital image processing and computer vision. In 1991 he joined the Bremen Institute of Applied Beam Technology (BIAS) to establish the Department Optical 3D-Metrology. Since September 2002 he has been a full professor at the University of Stuttgart and director of the Institute for Applied Optics. His research work is focused on new concepts for industrial inspection and metrology by combining modern principles of optical metrology, sensor technology and image processing. Special attention is directed to the development of resolution enhanced technologies for the investigation of micro and nano structures.
Abstract
Multi-scale optical sensor systems help to overcome the area of conflict between resolution, field size, and inspection time if it comes to the frequent problem of detecting small defects on large areas. The sensors of such systems are chosen according to two main properties: On the one hand, they should measure in opposed scales; on the other hand, their measurement principles should vary as well in order to be suitable for different material and surface properties. However, these systems can only operate at full capacity if it is possible to unify the acquired data from each sensor into one common coordinate system such that an overall analysis is possible, or subsequent sub-measurements can be triggered. In this paper, a general approach for a common sensor referencing is proposed, whose focus lies on microscopic optical sensors for both scattering and reflecting surfaces. The method is able to handle resolutions from the nanometer to millimeter scale in one single system, but is also feasible for a coordinate unification across several single sensor systems.
About the authors
Marc Gronle received his Diploma in Mechatronics from the University of Stuttgart in 2011. Since Mai 2011 he is employed at the Institute of Applied Optics (ITO) at University of Stuttgart as research assistant. From October 2014 on, he is heading the group of 3D metrology. His research work is focused on multi-sensor optical systems, 3D view and automatic measurement planning as well as sensor technologies and image processing for 3D metrology. Furthermore, he is leading the development team for the open source lab automation and measurement software itom.
Wolfgang Osten received the Diploma in Physics from the Friedrich-Schiller-University Jena in 1979 and in 1983 the PhD degree from the Martin-Luther-University Halle-Wittenberg for his thesis in the field of holographic interferometry. From 1984 to 1991 he was employed at the Central Institute of Cybernetics and Information Processes in Berlin making investigations in digital image processing and computer vision. In 1991 he joined the Bremen Institute of Applied Beam Technology (BIAS) to establish the Department Optical 3D-Metrology. Since September 2002 he has been a full professor at the University of Stuttgart and director of the Institute for Applied Optics. His research work is focused on new concepts for industrial inspection and metrology by combining modern principles of optical metrology, sensor technology and image processing. Special attention is directed to the development of resolution enhanced technologies for the investigation of micro and nano structures.
Acknowledgments
The authors would like to thank L. Fu (Institut für Technische Optik, Univ. Stuttgart) for the preparation of the cross structure in the reference specimen. Further, we would like to extend our thanks to Prof. Sawodny et al. (Institut für Systemdynamik, Univ. Stuttgart) for their good and fruitful cooperation in the joint research field of precise multi-axis inspection machines.
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©2016 THOSS Media & De Gruyter
Artikel in diesem Heft
- Cover and Frontmatter
- Community
- Conference Notes
- Conference Calendar
- News from the European Optical Society EOS
- Topical Issue: Optical 3D Sensing
- Review Articles
- High-speed optical 3D sensing and its applications
- Infrared deflectometry for the inspection of diffusely specular surfaces
- Multi-scale referencing and coordinate unification of optical sensors in multi-axis machines
- Research Articles
- 3D shape measurement with thermal pattern projection
- A new form measurement system based on subaperture stitching with a line-scanning interferometer
- Evaluation of pixel-wise geometric constraint-based phase-unwrapping method for low signal-to-noise-ratio (SNR) phase
- Single-shot phase-measuring deflectometry for cornea measurement
- Modeling of imaging fiber bundles and adapted signal processing for fringe projection
- Noncontact three-dimensional quantitative profiling of fast aspheric lenses by optical coherence tomography
- Tutorial
- Aspherics in spectacle lenses
- Research Article
- Structural noise tolerance of photonic crystal optical properties
Artikel in diesem Heft
- Cover and Frontmatter
- Community
- Conference Notes
- Conference Calendar
- News from the European Optical Society EOS
- Topical Issue: Optical 3D Sensing
- Review Articles
- High-speed optical 3D sensing and its applications
- Infrared deflectometry for the inspection of diffusely specular surfaces
- Multi-scale referencing and coordinate unification of optical sensors in multi-axis machines
- Research Articles
- 3D shape measurement with thermal pattern projection
- A new form measurement system based on subaperture stitching with a line-scanning interferometer
- Evaluation of pixel-wise geometric constraint-based phase-unwrapping method for low signal-to-noise-ratio (SNR) phase
- Single-shot phase-measuring deflectometry for cornea measurement
- Modeling of imaging fiber bundles and adapted signal processing for fringe projection
- Noncontact three-dimensional quantitative profiling of fast aspheric lenses by optical coherence tomography
- Tutorial
- Aspherics in spectacle lenses
- Research Article
- Structural noise tolerance of photonic crystal optical properties
