Considerations on automation of coating machines
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Markus K. Tilsch
Markus K. Tilsch received his PhD degree in Physics from the University of Technology, Darmstadt, Germany, in 1997. He joined Optical Coatings Laboratory, Inc. (OCLI) in Santa Rosa, CA, USA, in 1998. OCLI was acquired by JDSU in 2000. Markus has held multiple positions in research and manufacturing of precision optical coatings from the UV to IR spectral region. Currently he works in R&D on processes for optical security applications. He served as the general chair of the OSA-sponsored Optical Interference Coatings conference in 2013. The challenge to produce precision coatings at low and very high volumes has given him a lot of exposure to the state of the art and limits of automation systems.
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Michael S. O’Donnell
Michael S. O’Donnell has more than 30 years of equipment automation experience. He designed automated lab calibration systems in 1986 on HP9000/3852 hardware, automated plastic dispensing systems in the early 1990s, and Wonderware/Siemens PLC systems in the mid 1990s. Michael joined JDSU in 2000, working in the R&D group, gas lasers group, project management of product/equipment transfers, and is currently controls engineering manager.
Abstract
Most deposition chambers sold into the optical coating market today are outfitted with an automated control system. We surveyed several of the larger equipment providers, and nine of them responded with information about their hardware architecture, data logging, level of automation, error handling, user interface, and interfacing options. In this paper, we present a summary of the results of the survey and describe commonalities and differences together with some considerations of tradeoffs, such as between capability for high customization and simplicity of operation.
About the authors
Markus K. Tilsch received his PhD degree in Physics from the University of Technology, Darmstadt, Germany, in 1997. He joined Optical Coatings Laboratory, Inc. (OCLI) in Santa Rosa, CA, USA, in 1998. OCLI was acquired by JDSU in 2000. Markus has held multiple positions in research and manufacturing of precision optical coatings from the UV to IR spectral region. Currently he works in R&D on processes for optical security applications. He served as the general chair of the OSA-sponsored Optical Interference Coatings conference in 2013. The challenge to produce precision coatings at low and very high volumes has given him a lot of exposure to the state of the art and limits of automation systems.
Michael S. O’Donnell has more than 30 years of equipment automation experience. He designed automated lab calibration systems in 1986 on HP9000/3852 hardware, automated plastic dispensing systems in the early 1990s, and Wonderware/Siemens PLC systems in the mid 1990s. Michael joined JDSU in 2000, working in the R&D group, gas lasers group, project management of product/equipment transfers, and is currently controls engineering manager.
Acknowledgments
We would like to thank Klaus Trageser from Applied Materials, Sean Smith and Steve Chiavaroli from Dynavac, Stephan Waldner from Evatec, Alfons Zöller and Martin Quinke from Leybold Optics, Bin Fan from Optorun, Yoshimasa Ohmae from Shincron, Masaaki Shinoda, Tomohiro Hayasaka, and Ryou Shibano from ULVAC, John Davis and Jason George from Veeco, and Ralf Faber from VPT for their input to this paper.
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©2015 THOSS Media & De Gruyter
Artikel in diesem Heft
- Cover and Frontmatter
- Community
- News from the European Optical Society
- Conference Calendar
- Topical Issue: Integrated Photonic Devices: Sensors, Materials, Systems
- Editorial
- Special issue on ‘integrated photonic devices: sensors, materials, systems’
- Review Articles
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- TriPleX: a versatile dielectric photonic platform
- Review Article
- Considerations on automation of coating machines
Artikel in diesem Heft
- Cover and Frontmatter
- Community
- News from the European Optical Society
- Conference Calendar
- Topical Issue: Integrated Photonic Devices: Sensors, Materials, Systems
- Editorial
- Special issue on ‘integrated photonic devices: sensors, materials, systems’
- Review Articles
- Silicon photonics WDM transmitter with single section semiconductor mode-locked laser
- Photonic IC design software and process design kits
- Open access to technology platforms for InP-based photonic integrated circuits
- AlGaInAs MOVPE selective area growth for photonic integrated circuits
- Lasers in InP generic photonic integration technology platforms
- TriPleX: a versatile dielectric photonic platform
- Review Article
- Considerations on automation of coating machines
