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Considerations on automation of coating machines

  • Markus K. Tilsch

    Markus K. Tilsch received his PhD degree in Physics from the University of Technology, Darmstadt, Germany, in 1997. He joined Optical Coatings Laboratory, Inc. (OCLI) in Santa Rosa, CA, USA, in 1998. OCLI was acquired by JDSU in 2000. Markus has held multiple positions in research and manufacturing of precision optical coatings from the UV to IR spectral region. Currently he works in R&D on processes for optical security applications. He served as the general chair of the OSA-sponsored Optical Interference Coatings conference in 2013. The challenge to produce precision coatings at low and very high volumes has given him a lot of exposure to the state of the art and limits of automation systems.

     EMAIL logo     and Michael S. O’Donnell

    Michael S. O’Donnell has more than 30 years of equipment automation experience. He designed automated lab calibration systems in 1986 on HP9000/3852 hardware, automated plastic dispensing systems in the early 1990s, and Wonderware/Siemens PLC systems in the mid 1990s. Michael joined JDSU in 2000, working in the R&D group, gas lasers group, project management of product/equipment transfers, and is currently controls engineering manager.
Published/Copyright: March 16, 2015
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Advanced Optical Technologies
From the journal Advanced Optical Technologies Volume 4 Issue 2

Abstract

Most deposition chambers sold into the optical coating market today are outfitted with an automated control system. We surveyed several of the larger equipment providers, and nine of them responded with information about their hardware architecture, data logging, level of automation, error handling, user interface, and interfacing options. In this paper, we present a summary of the results of the survey and describe commonalities and differences together with some considerations of tradeoffs, such as between capability for high customization and simplicity of operation.

Keywords: automation; controls; equipment; optical coating machines
Corresponding author: Markus K. Tilsch, JDSU, 1402 Mariner Way, Santa Rosa, CA 95407, USA, e-mail:

About the authors

Markus K. Tilsch

Markus K. Tilsch received his PhD degree in Physics from the University of Technology, Darmstadt, Germany, in 1997. He joined Optical Coatings Laboratory, Inc. (OCLI) in Santa Rosa, CA, USA, in 1998. OCLI was acquired by JDSU in 2000. Markus has held multiple positions in research and manufacturing of precision optical coatings from the UV to IR spectral region. Currently he works in R&D on processes for optical security applications. He served as the general chair of the OSA-sponsored Optical Interference Coatings conference in 2013. The challenge to produce precision coatings at low and very high volumes has given him a lot of exposure to the state of the art and limits of automation systems.

Michael S. O’Donnell

Michael S. O’Donnell has more than 30 years of equipment automation experience. He designed automated lab calibration systems in 1986 on HP9000/3852 hardware, automated plastic dispensing systems in the early 1990s, and Wonderware/Siemens PLC systems in the mid 1990s. Michael joined JDSU in 2000, working in the R&D group, gas lasers group, project management of product/equipment transfers, and is currently controls engineering manager.

Acknowledgments

We would like to thank Klaus Trageser from Applied Materials, Sean Smith and Steve Chiavaroli from Dynavac, Stephan Waldner from Evatec, Alfons Zöller and Martin Quinke from Leybold Optics, Bin Fan from Optorun, Yoshimasa Ohmae from Shincron, Masaaki Shinoda, Tomohiro Hayasaka, and Ryou Shibano from ULVAC, John Davis and Jason George from Veeco, and Ralf Faber from VPT for their input to this paper.

References

[1] M. Banning, J. Opt. Soc. Am. 37, 792–795 (1947).10.1364/JOSA.37.000792Search in Google Scholar PubMed

[2] R. Sargent, M. Tilsch, G. Ockenfuss, K. Hendrix, M. Grigonis, et al. ‘Advances in Precision Optical Coatings through the Use of a Fast-Cycle Sputter Coater’, paper O-1 in Society of Vacuum Coaters 51st Technical Conference (2008).Search in Google Scholar

[3] W. Bolton, ‘Programmable Logic Controllers’, Fifth Edition Paperback (Newnes, 2009).10.1016/B978-1-85617-751-1.00001-XSearch in Google Scholar

[4] ODBC is a Microsoft standard for Open Database Connectivity; see the Microsoft developer network for more detail: http://msdn.microsoft.com/en-us/library/ms714177(v=vs.85).aspx.Search in Google Scholar

[5] P. Massiglia, ‘The Raidbook: A Handbook of Storage Systems Technology’, RAID Advisory Board, 1997 ISBN 1573980285, 9781573980289.Search in Google Scholar

[6] International Society of Automation (ISA), Research Triangle Park, North Carolina, USA, www.isa.org.Search in Google Scholar

[7] U.S. Nuclear Regulatory Commission (NUREG), Washington, DC 20555-0001. http://www.nrc.gov/reading-rm/doc-collections/nuregs/staff/sr0700/.Search in Google Scholar

[8] International Organization for Standardization (ISO), ISO Central Secretariat 1, ch. de la Voie-Creuse, CP 56, CH-1211 Geneva 20, Switzerland, email: .Search in Google Scholar

[9] Abnormal Situation Management (ASM) Consortium, www.asmconsortium.org.Search in Google Scholar

[10] Federal Aviation Administration (FAA): U.S. Department of Transportation, 800 Independence Avenue, SW, Washington, DC 20591, http://hf.tc.faa.gov/hfds/default.htm.Search in Google Scholar

[11] National Aeronautics and Space Administration (NASA), NASA Headquarters, Suite 5R30, Washington, DC 20546, www.nasa.gov.Search in Google Scholar

[12] American Society of Mechanical Engineers/Human Factors and Ergonomics Society ASME/HFES, P.O. Box 1369, Santa Monica, CA 90406-1369 USA, http://www.hfes.org/Publications/ProductDetail.aspx?ProductID=76.Search in Google Scholar

[13] EEMUA, The Engineering Equipment and Materials Users Association, 63 Mark Lane, LONDON, EC3R 7NQ, http://www.eemua.org/Products/Publications/Print/EEMUA-Publication-201.aspx.Search in Google Scholar

[14] B. T. Sullivan and J. A. Dobrowolski, Appl. Opt. 31, 3821–3835 (1992).Search in Google Scholar

[15] B. T. Sullivan and J. A. Dobrowolski, Appl. Opt. 32, 2351–2360 (1993).Search in Google Scholar

[16] S. Wilbrandt, O. Stenzel, N. Kaiser, M. K. Trubetskov and A. V. Tikhonravov, Appl. Opt. 47, C49–C54 (2008).10.1364/AO.47.000C49Search in Google Scholar

[17] S. Waldner, P. Biedermann and S. Schwyn Thony, Chin. Opt. Lett. 11, S10207 (2013).10.3788/col201311.s10207Search in Google Scholar

[18] Standards in the semiconductor industry (SEMI); http://www.semi.org/Standards.Search in Google Scholar

[19] JIS, Japanese Industrial Standards, 1-3-1 Kasumigaseki, Chiyoda-ku, Tokyo 100-8901, JAPAN.Search in Google Scholar

[20] NFPA, 1 Batterymarch Park, Quincy, Massachusetts, USA, 02169-7471, Tel: +1 617 770-3000.Search in Google Scholar

[21] UL, Underwriters Laboratories, www.UL.com, Tel: 877.UL.HELPS (877.854.3577).Search in Google Scholar

[22] CSA, Canadian Standards Association, 5060 Spectrum Way, Suite 100, Mississauga, Ontario L4W 5N6 Canada.Search in Google Scholar

[23] International Electrotechnical Commission (IEC), 3, rue de Varembé, P.O. Box 131, 1211 Geneva 20, Switzerland, Tel: +41 22 919 02 11.Search in Google Scholar

[24] VDE, Verband der Elektrotechnik, Stresemannallee 15, 60596 Frankfurt am Main, Germany, Phone: +49 (0) 69 6308-284.Search in Google Scholar

[25] CE, European Commission, Enterprise and Industry DG, Information activities Unit R4, BREY 13/092, B-1049 Brussels (Belgium).Search in Google Scholar

[26] European Committee for Standardization, https://www.cen.eu.Search in Google Scholar

Received: 2015-1-27
Accepted: 2015-2-18
Published Online: 2015-3-16
Published in Print: 2015-4-1

©2015 THOSS Media & De Gruyter

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https://doi.org/10.1515/aot-2015-0015
Keywords for this article
automation; controls; equipment; optical coating machines

Articles in the same Issue

  1. Cover and Frontmatter
  2. Community
  3. News from the European Optical Society
  4. Conference Calendar
  5. Topical Issue: Integrated Photonic Devices: Sensors, Materials, Systems
  6. Editorial
  7. Special issue on ‘integrated photonic devices: sensors, materials, systems’
  8. Review Articles
  9. Silicon photonics WDM transmitter with single section semiconductor mode-locked laser
  10. Photonic IC design software and process design kits
  11. Open access to technology platforms for InP-based photonic integrated circuits
  12. AlGaInAs MOVPE selective area growth for photonic integrated circuits
  13. Lasers in InP generic photonic integration technology platforms
  14. TriPleX: a versatile dielectric photonic platform
  15. Review Article
  16. Considerations on automation of coating machines
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