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Computational metrology and inspection (CMI) in mask inspection, metrology, review, and repair

• Linyong Pang

  Dr. Linyong (Leo) Pang is currently the Senior Vice President of Computational Inspection and Metrology Technologies, at Luminescent Technologies. Dr. Pang joined Luminescent’s executive team in 2004 and has had leadership roles in its products, technologies, marketing, and customer relations. His pioneering work in Computational Lithography and Inspection started in 1999, and as the inventor of Numerical Tech’s i-Virtual Stepper System, was given the ‘2001 Editors’ Choice Best Product Award’ by Semiconductor International. Prior to joining Luminescent, Dr. Pang held several product development and marketing management positions at Numerical and Synopsys (after acquisition), and held a research scientist position at Acuson. Dr. Pang is the author of 30 issued patents, 22 pending patents, and 45 publications. Dr. Pang received a B.S. and a M.S. in Mechanical Engineering from the University of Science and Technology of China (USTC), and a M.S. in Computer Science and a Ph.D. in Mechanical Engineering from Stanford University, CA, USA.

  , Danping Peng

  Dr. Danping Peng got his BS degree in 1986 and master degree in 1989, both in mathematics, from Peking University. From 1991 to 1994 he taught at the Applied mathematics Department of Tsinghua University, before he went to USA to pursue his interests in applied mathematics at UCLA, where he obtained his PhD degree in 1999 from Prof. Stan Osher. After a brief stint as a financial modeler, he joined Luminescent as the founding member of the engineer group in 2002. Dr. Peng was the principle developer of ILT and LAIPH defect management software, and the lithographic models across the product line. He had numerous related patents granted and publications on level-set method and inverse problems in lithography. Over the years Dr. Peng played roles of increasing responsibility. He is currently the Chief Scientist and CTO of Luminescent Technologies.

  , Peter Hu

  Dr. Changqing (Peter) Hu is currently the Software Engineering Director of Optical Imaging, at Luminescent Technologies. Dr. Hu joined Luminescent in 2004, working on development and implementation of Inverse Lithography Technology , one of most advanced lithography enhancement solutions to the semiconductor industry; with designing and formulating mathematical models to create numerical approximations for masking and imaging processes. Prior to joining Luminescent, Dr. Hu held an architect position for software development at Oracle Corporation, working on Business Intelligence Applications. Dr. Hu received a BS degree in Applied Mathematics at Peking University in China, and a MS degree in Computer Science and a PhD degree in Applied Mathematics from Brown University, RI, USA.

  , Dongxue Chen

  Dr. Dongxue Chen is currently Software Engineering Director at Luminescent Technologies. Dr. Chen joined Luminescent in 2004 and has since assumed leading role in the development of inspection and metrology product related to e-beam systems. Prior to joining Luminescent, Dr. Chen was a research scientist at Lawrence Berkeley National Lab. Dr. Chen is the author of 20 publications and 2 pending patents. Dr. Chen received BS from Beijing University and PhD in chemistry from University of North Carolina at Chapel Hill.

  , Lin He

  Dr. Lin He is currently the Senior Research and Development Engineer at Luminescent Technologies. Dr. He joined the Luminescent in 2008 and has played a critical role in developing many cutting edge products in the photomask inspection area and the wafer image inspection area. Some of the products are the industry’s first off-line computational inspection products and have brought multi-million dollars to the Luminescent. Prior to joining Luminescent, Dr. He received a PhD Degree in Applied Mathematics from the University of California, Los Angeles and a BS Degree in Mathematics from Peking University.

  , Ying Li

  Dr. Ying Li is currently a key developer in lithography model team at Luminescent Technologies. Dr. Li joined Luminescent in 2009, she’s been working on building and improving DUV optical models in the most advanced technology nodes. Dr. Li also pioneers in EUV optical model development and buried defect printability analysis. Prior to joining Luminescent, Dr. Li obtained a PhD degree in Physics from Georgia Institute of Technology, USA and a BS degree in Physics from Peking University, China. Her research focus on large scale quantum simulation of fermionic clusters.

  , Masaki Satake

  Masaki Satake is currently Senior Application Engineer, Computational Defect Management Group at Luminescent Technologies. He joined Luminescent in 2010 and has been working for application engineering and development of products. Prior to joining Luminescent, he worked at lithography process R&D division in Toshiba. He has 2 issued patents and 11 pending patents. He received a BS in applied chemistry and a MS in material science and engineering from the Nagoya University in Japan.

  and Vikram Tolani

  Vikram Tolani is currently the Director of Applications Engineering at Luminescent Technologies. He joined Luminescent in 2007 focusing on product management, and, application development using novel computational inspection and metrology technologies. Prior to Luminescent, Vikram worked at Intel Corporation’s mask shop as a Sr. Process Engineer in the inspection and repair areas.