Chapter 4 Materials for micro- and nanofabrication
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Debabrata Panda
, Abhishek Kumar and Krunal M. Gangawane
Abstract
The advancement in the use of smart materials in micro- and nanofabrication offers great advantages in precise production - high accuracy, low cost, and ease of operation. Current emphasis on research in customization of materials, controlling mechanisms, ameliorated operation processes, and controlled structure facilitate meeting the specific application requirements of different industries. A series of continuous silicon, metal oxides, and nanomaterials with great surface topographies mimic the nanostructure of semiconductor devices, nanofluidic chips, sensors, flexible electronics, and optical nanodevices. A brief utilization of nanomaterials such as graphene, carbon nanotubes, quantum dots, and metal organic frameworks in conjunction with nanotechnology have also revolutionized the electronics, photonics, and energy sector by using various imprinting methodologies. In addition, the use of biomaterials such as alginate, gelatin, and collagen can also provide promising prospects in artificial lymph nodes, 3D acellular scaffolds, mRNA vaccines in biomedical engineering, drug delivery, and tissue engineering applications due to the characteristics of surface topography, surface energy, surface chemistry, and surface wettability. The present review identifies the potential use of nanomaterials, in conjunction with micro- and nanofabrication, to pave a new era of precise manufacturing. This chapter also provides a futuristic approach of these materials in advancing micro- and nanomanufacturing, transforming applications across various domains.
Abstract
The advancement in the use of smart materials in micro- and nanofabrication offers great advantages in precise production - high accuracy, low cost, and ease of operation. Current emphasis on research in customization of materials, controlling mechanisms, ameliorated operation processes, and controlled structure facilitate meeting the specific application requirements of different industries. A series of continuous silicon, metal oxides, and nanomaterials with great surface topographies mimic the nanostructure of semiconductor devices, nanofluidic chips, sensors, flexible electronics, and optical nanodevices. A brief utilization of nanomaterials such as graphene, carbon nanotubes, quantum dots, and metal organic frameworks in conjunction with nanotechnology have also revolutionized the electronics, photonics, and energy sector by using various imprinting methodologies. In addition, the use of biomaterials such as alginate, gelatin, and collagen can also provide promising prospects in artificial lymph nodes, 3D acellular scaffolds, mRNA vaccines in biomedical engineering, drug delivery, and tissue engineering applications due to the characteristics of surface topography, surface energy, surface chemistry, and surface wettability. The present review identifies the potential use of nanomaterials, in conjunction with micro- and nanofabrication, to pave a new era of precise manufacturing. This chapter also provides a futuristic approach of these materials in advancing micro- and nanomanufacturing, transforming applications across various domains.
Chapters in this book
- Frontmatter I
- Preface V
- Contents VII
- Chapter 1 Introduction to precision manufacturing for micro- and nanofabrication 1
- Chapter 2 Principle of precision engineering 25
- Chapter 3 Microfabrication: techniques and technology 47
- Chapter 4 Materials for micro- and nanofabrication 77
- Chapter 5 Transition metal oxide semiconductor materials: properties and applications 101
- Chapter 6 Precision manufacturing through cryogenic treatment: a case study 133
- Chapter 7 Ferromagnetic composite nanofiber for low magnetic field sensing: a case study 149
- Chapter 8 Environmental impact, sustainability, and future direction 163
- Index 173
Chapters in this book
- Frontmatter I
- Preface V
- Contents VII
- Chapter 1 Introduction to precision manufacturing for micro- and nanofabrication 1
- Chapter 2 Principle of precision engineering 25
- Chapter 3 Microfabrication: techniques and technology 47
- Chapter 4 Materials for micro- and nanofabrication 77
- Chapter 5 Transition metal oxide semiconductor materials: properties and applications 101
- Chapter 6 Precision manufacturing through cryogenic treatment: a case study 133
- Chapter 7 Ferromagnetic composite nanofiber for low magnetic field sensing: a case study 149
- Chapter 8 Environmental impact, sustainability, and future direction 163
- Index 173