Index

Chapters in this book

1. Frontmatter I
2. Preface V
3. Contents VII
4. Chapter 1 Introduction to precision manufacturing for micro- and nanofabrication 1
5. Chapter 2 Principle of precision engineering 25
6. Chapter 3 Microfabrication: techniques and technology 47
7. Chapter 4 Materials for micro- and nanofabrication 77
8. Chapter 5 Transition metal oxide semiconductor materials: properties and applications 101
9. Chapter 6 Precision manufacturing through cryogenic treatment: a case study 133
10. Chapter 7 Ferromagnetic composite nanofiber for low magnetic field sensing: a case study 149
11. Chapter 8 Environmental impact, sustainability, and future direction 163
12. Index 173