Chapter 3 Microfabrication: techniques and technology
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Abhishek Kumar
Abstract
Microfabrication is a broad term for a variety of processes and tools used to create structures and devices on a microscopic size. This research delves into the cuttingedge techniques and advanced technology used in microfabrication, which allows for the precise and intricate downsizing of devices and systems. This chapter takes a look at the development and fundamental ideas of several lithographic methods. Soft lithography, hot embossing, MEMS, and electron-beam lithography are non-lithographic approaches that fall under this category. Optical and nanoimprint lithography are also part of this category. Many industries, including semiconductors and optoelectronics, have adopted microfabrication methods, as discussed in this chapter. Also, it highlights how important microfabrication is in the biomedical field, especially for creating lab-on-a-chip gadgets and microfluidic systems. In addition, the chapter explores the present challenges and emerging technologies in microfabrication, helping readers get a deeper understanding of this groundbreaking field and its boundless potential for advancement.
Abstract
Microfabrication is a broad term for a variety of processes and tools used to create structures and devices on a microscopic size. This research delves into the cuttingedge techniques and advanced technology used in microfabrication, which allows for the precise and intricate downsizing of devices and systems. This chapter takes a look at the development and fundamental ideas of several lithographic methods. Soft lithography, hot embossing, MEMS, and electron-beam lithography are non-lithographic approaches that fall under this category. Optical and nanoimprint lithography are also part of this category. Many industries, including semiconductors and optoelectronics, have adopted microfabrication methods, as discussed in this chapter. Also, it highlights how important microfabrication is in the biomedical field, especially for creating lab-on-a-chip gadgets and microfluidic systems. In addition, the chapter explores the present challenges and emerging technologies in microfabrication, helping readers get a deeper understanding of this groundbreaking field and its boundless potential for advancement.
Chapters in this book
- Frontmatter I
- Preface V
- Contents VII
- Chapter 1 Introduction to precision manufacturing for micro- and nanofabrication 1
- Chapter 2 Principle of precision engineering 25
- Chapter 3 Microfabrication: techniques and technology 47
- Chapter 4 Materials for micro- and nanofabrication 77
- Chapter 5 Transition metal oxide semiconductor materials: properties and applications 101
- Chapter 6 Precision manufacturing through cryogenic treatment: a case study 133
- Chapter 7 Ferromagnetic composite nanofiber for low magnetic field sensing: a case study 149
- Chapter 8 Environmental impact, sustainability, and future direction 163
- Index 173
Chapters in this book
- Frontmatter I
- Preface V
- Contents VII
- Chapter 1 Introduction to precision manufacturing for micro- and nanofabrication 1
- Chapter 2 Principle of precision engineering 25
- Chapter 3 Microfabrication: techniques and technology 47
- Chapter 4 Materials for micro- and nanofabrication 77
- Chapter 5 Transition metal oxide semiconductor materials: properties and applications 101
- Chapter 6 Precision manufacturing through cryogenic treatment: a case study 133
- Chapter 7 Ferromagnetic composite nanofiber for low magnetic field sensing: a case study 149
- Chapter 8 Environmental impact, sustainability, and future direction 163
- Index 173
